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A study on NEMS-Casimir multifunction sensors

Research Project

Project/Area Number 25630138
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionTokyo Institute of Technology

Principal Investigator

YAMANE Daisuke  東京工業大学, 精密工学研究所, 助教 (70634096)

Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywordsマイクロ・ナノデバイス / ナノギャップ / ナノエレクトロニクス / Casimir効果 / 金めっき / 光ミキサ / テラヘルツ波 / 静電容量型センサ / ナノデバイス / 無電解金めっき / 微細電極
Outline of Final Research Achievements

First, we have theoretically analyzed the behavior of nano structures under Casimir effect. Then, we have developed proof-of-concept devices in micro-meter scale, and experimentally evaluated their fundamental characteristics. The results shows that the developed micro structures can be used to achieve not only NEMS-Casimir sensors but also various miniaturized high-sensitivity sensors.
In this work, we have published 7 journal papers (2 papers are to be published), and presented 3 invited talks (one talk is to be presented), 6 international conferences, an international workshop, 4 domestic symposiums, and 14 domestic conferences. The research results won 4 academic prizes.
Our research was reported by a TV program, 5 newspapers, 4 web news, a lecture on National United university in Taiwan (presented by Daisuke Yamane), and 5 press releases in Tokyo Institute of Technology.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (27 results)

All 2015 2014 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Acknowledgement Compliant: 2 results) Presentation (18 results) (of which Invited: 2 results) Remarks (5 results)

  • [Journal Article] An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors2015

    • Author(s)
      山根 大輔, 小西 敏文, 松島 隆明, 亀井 将太, 益 一哉, 町田 克之
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 135 Issue: 4 Pages: 142-143

    • DOI

      10.1541/ieejsmas.135.142

    • NAID

      130005061970

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A dual-axis MEMS capacitive inertial sensor with high-density proof mass2015

    • Author(s)
      Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
    • Journal Title

      Microsystem Technologies

      Volume: 印刷中 Issue: 3 Pages: 459-464

    • DOI

      10.1007/s00542-015-2539-y

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A Sub-1G MEMS Sensor2015

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
    • Journal Title

      ECS Transactions

      Volume: 66

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated CMOS-MEMS Technology and Its Applications2014

    • Author(s)
      Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
    • Journal Title

      ECS Transactions

      Volume: 61 Issue: 6 Pages: 21-39

    • DOI

      10.1149/06106.0021ecst

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Presentation] A Sub-1G MEMS Sensor2015

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
    • Organizer
      the 227th ECS Meeting
    • Place of Presentation
      Chicago, Illinois(米国)
    • Year and Date
      2015-05-24 – 2015-05-28
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-2015

    • Author(s)
      Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
    • Organizer
      2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
    • Place of Presentation
      Kyoto Terrsa, Kyoto(日本)
    • Year and Date
      2015-04-14 – 2015-04-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Sub-1G検出可能な3軸MEMS加速度センサの基礎検討2015

    • Author(s)
      山根大輔, 小西敏文, 松島隆明, 年吉 洋, 町田克之, 益 一哉
    • Organizer
      平成27年電気学会全国大会
    • Place of Presentation
      東京都市大学世田谷キャンパス(東京都世田谷区)
    • Year and Date
      2015-03-24 – 2015-03-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討2015

    • Author(s)
      山根大輔, 小西敏文, 松島隆明, 年吉 洋, 町田克之, 益 一哉
    • Organizer
      第62回応用物理学会春季学術講演会、分科企画シンポジウム
    • Place of Presentation
      東海大学 湘南キャンパス(神奈川県平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] MEMS for sensing sub-1G2014

    • Author(s)
      Daisuke Yamane, Katsuyuki Machida, Kazuya Masu
    • Organizer
      The First Joint Workshop on Electrical Engineering between Tokyo Tech & KAIST
    • Place of Presentation
      KAIST, Daejeon(韓国)
    • Year and Date
      2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] 1mG-to-20G Integrated MEMS Inertial Sensor2014

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
    • Organizer
      IEEE SENSORS 2014
    • Place of Presentation
      Valencia Conference Center, Valencia(スペイン)
    • Year and Date
      2014-11-02 – 2014-11-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討2014

    • Author(s)
      山根大輔, 小西敏文, 松島隆明, 亀井将太, 益 一哉, 町田克之
    • Organizer
      応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ(島根県松江市)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集積化CMOS-MEMS技術によるSub-1G加速度センサの基礎検討2014

    • Author(s)
      山根大輔, 小西敏文, 松島隆明, 年吉洋, 益 一哉, 町田克之
    • Organizer
      応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ(島根県松江市)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Au積層形成技術による3軸MEMS加速度センサの検討2014

    • Author(s)
      松島隆明, 山根大輔, 小西敏文, 年吉洋, 益 一哉, 町田克之
    • Organizer
      応用物理学会集積化MEMS技術研究会 第6回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ(島根県松江市)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集積化CMOS-MEMS加速度センサへ向けたsub-1G静電容量型センサの検討2014

    • Author(s)
      亀井将太, 山根大輔, 小西敏文, 松島隆明, 年吉 洋, 町田克之, 益 一哉
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス(北海道札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] 積層メタル構造による3軸加速度センサの検討2014

    • Author(s)
      松島隆明, 小西敏文, 山根大輔, 年吉 洋, 益 一哉, 町田克之
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス(北海道札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers2014

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
    • Organizer
      Int. Conf. on Solid-State Devices and Materials (SSDM 2014)
    • Place of Presentation
      Tsukuba International Congress Center(茨城県つくば市)
    • Year and Date
      2014-09-08 – 2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 積層メタルによる静電容量型3軸加速度センサの基礎検討2014

    • Author(s)
      松島隆明, 小西敏文, 山根大輔, 亀井将太, 年吉 洋, 益 一哉, 町田克之
    • Organizer
      応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      豊橋技術科学大学(愛知県豊橋市)
    • Year and Date
      2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ2014

    • Author(s)
      山根大輔, 亀井将太, 小西敏文, 松島隆明, 年吉 洋, 益 一哉, 町田克之
    • Organizer
      応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      豊橋技術科学大学(愛知県豊橋市)
    • Year and Date
      2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers2014

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)
    • Place of Presentation
      EXCO, Daegu(韓国)
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] 集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討2014

    • Author(s)
      山根大輔, 松島隆明, 小西敏文, 年吉 洋, 町田克之, 益 一哉
    • Organizer
      平成26年電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京大学生産技術研究所(東京都目黒区)
    • Year and Date
      2014-05-27 – 2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer2014

    • Author(s)
      Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
    • Organizer
      2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014)
    • Place of Presentation
      San Jose, CA(米国)
    • Year and Date
      2014-05-20 – 2014-05-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer2014

    • Author(s)
      Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
    • Organizer
      Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)
    • Place of Presentation
      Cannes, Cote d'Azur(フランス)
    • Year and Date
      2014-04-01 – 2014-04-04
    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京工業大学 フロンティア研究所機構 益研究室ホームページ 研究成果(山根分)

    • URL

      http://masu-www.pi.titech.ac.jp/member_files/daisuke_yamane/daisuke_yamane.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京工業大学 東工大ニュース(2014年12月4日)

    • URL

      http://www.titech.ac.jp/news/2014/029271.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京工業大学 精密工学研究所 平成26年度プレスリリース (2014年12月4日)

    • URL

      http://www.pi.titech.ac.jp/news/detail_1108.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京工業大学 精密工学研究所 平成26年度プレスリリース (2014年12月5日)

    • URL

      http://www.pi.titech.ac.jp/news/detail_1112.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 東京工業大学 精密工学研究所 平成26年度プレスリリース (2014年12月9日)

    • URL

      http://www.pi.titech.ac.jp/news/detail_1118.html

    • Related Report
      2014 Annual Research Report

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Published: 2014-07-25   Modified: 2019-07-29  

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