| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
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| Outline of Final Research Achievements |
A very sensitive thin film sensor was developed using a meandering coplanar line fabricated from SrTiO film (3 μm thick), amorphous CoNbZr film (1.0 mm x 2.45 mm, 0.3 μm-2 μm thick) and Cu/Cr film (2 μ m/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 300 degrees/Oe being achieved. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of around 0.5-1 micro m. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film. A sensor module was composed of meandering sensor element and commercial IC. A resolution of about 100 pT was obtained the module. We succeeded in wireless magnetic field measurement using the sensor module.
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