Thin film magnetic field sensor inside body at room temperature
| Project/Area Number |
25630172
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Measurement engineering
|
|---|
| Research Institution | Tohoku Gakuin University |
|---|
Principal Investigator |
YABUKAMI Shin 東北学院大学, 工学部, 教授 (00302232)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
HAGA Yoichi 東北大学, 大学院機械系, 教授 (00282096)
|
|---|
| Project Period (FY) |
2013-04-01 – 2016-03-31
|
| Project Status |
Completed (Fiscal Year 2015)
|
| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
|
|---|
| Keywords | 計測システム |
|---|
| Outline of Final Research Achievements |
A very sensitive thin film sensor was developed using a meandering coplanar line fabricated from SrTiO film (3 μm thick), amorphous CoNbZr film (1.0 mm x 2.45 mm, 0.3 μm-2 μm thick) and Cu/Cr film (2 μ m/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 300 degrees/Oe being achieved. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of around 0.5-1 micro m. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film. A sensor module was composed of meandering sensor element and commercial IC. A resolution of about 100 pT was obtained the module. We succeeded in wireless magnetic field measurement using the sensor module.
|
Report
(4 results)
Research Products
(30 results)
-
-
-
-
-
-
-
-
[Presentation] 高周波駆動薄膜磁界センサの開発2016
Author(s)
薮上 信, 植竹宏明, 小澤哲也, 小林伸聖, 荒井賢一
Organizer
第58回スピンエレクトロニクス専門研究会（第3回超高感度マイクロ磁気センサ専門研究会）
Place of Presentation
中央大学駿河台記念館（東京都）
Year and Date
2016-03-29
Related Report
Invited
-
[Presentation] 磁気センサ用アモルファスワイヤの動的磁化過程の解析2016
Author(s)
上原裕二, 古屋篤史, 清水香壱, 藤崎 淳, 安宅 正, 田中智大, 大島弘敬, 中山幸仁, 薮上 信, 本蔵義信
Organizer
第58回スピンエレクトロニクス専門研究会（第3回超高感度マイクロ磁気センサ専門研究会）
Place of Presentation
中央大学駿河台記念館（東京都）
Year and Date
2016-03-29
Related Report
Invited
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Patent(Industrial Property Rights)] 特許2015
Inventor(s)
薮上 信，植竹宏明
Industrial Property Rights Holder
薮上 信，植竹宏明
Industrial Property Rights Type
特許
Industrial Property Number
2015-090209
Filing Date
2015-04-27
Related Report
-
