| Project/Area Number |
25630389
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Aerospace engineering
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| Research Institution | Shizuoka University |
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Principal Investigator |
MATSUI Makoto 静岡大学, 工学研究科, 准教授 (90547100)
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| Project Period (FY) |
2013-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | レーザー吸収分光 / 波長変調法 / 集積共振器出力分光法 / 酸素原子数密度測定 / プラズマ診断 / レーザー分光 / キャビティ法 / 数密度測定 |
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| Outline of Final Research Achievements |
High sensitive laser absorption spectroscopy system was developed to measure atomic oxygen number density using a forbidden line of OI 636 nm. Firstly, to detect the small transition probability line, integrated cavity output spectroscopy (ICOS) was developed. The sensitivity enhancement was estimated as 822 times by the ring down time measurement. As a result of microwave plasma diagnostics, the number density could be measured as low as 1.2×1021 m-3. Next, wavelength modulation spectroscopy (WMS) was combined with ICOS to increase the sensitivity. For the optimized modulation frequency, sweep frequency and time constant, the signal to noise ratio of WM-ICOS was increased 26 times as much as that of ICOS. This result shows the WM-ICOS system enables the number density measurement of atomic oxygen as low as 250 Pa.
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