| Budget Amount *help |
¥25,480,000 (Direct Cost: ¥19,600,000、Indirect Cost: ¥5,880,000)
Fiscal Year 2014: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2013: ¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
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| Outline of Final Research Achievements |
We recognized the generation of nano-metric optical spot through the near-field to near-field coupling by using FDTD numerical simulations. According to the investigatoin of the dependence of optical spot generation on the probe shape and phsical properties, we found out the probe structure with high throughput.
We confirmed spatial measurement of 3.0 nm and measurement repeatabiliy of 1.0 nm by demonstration experiments. These resolution and repeatability are the best in the world. We also deveolped a scanning probe microscope for fast optical imaging. This instrument satisfies the target of imaging rate: 1.8 Hz.
Products: 3 peer-reviewed papers, 5 conference presentations(1 invited talk), and 1 prize.
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