High-speed nano optical measurement with high throughput optical probe
Project/Area Number |
25706024
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Research Category |
Grant-in-Aid for Young Scientists (A)
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Allocation Type | Partial Multi-year Fund |
Research Field |
Thin film/Surface and interfacial physical properties
|
Research Institution | Tokai University (2014) Keio University (2013) |
Principal Investigator |
|
Project Period (FY) |
2013-04-01 – 2015-03-31
|
Project Status |
Completed (Fiscal Year 2014)
|
Budget Amount *help |
¥25,480,000 (Direct Cost: ¥19,600,000、Indirect Cost: ¥5,880,000)
Fiscal Year 2014: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2013: ¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
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Keywords | ナノ光計測 / 走査プローブ顕微鏡 / 光計測 / ナノ光学 |
Outline of Final Research Achievements |
We recognized the generation of nano-metric optical spot through the near-field to near-field coupling by using FDTD numerical simulations. According to the investigatoin of the dependence of optical spot generation on the probe shape and phsical properties, we found out the probe structure with high throughput. We confirmed spatial measurement of 3.0 nm and measurement repeatabiliy of 1.0 nm by demonstration experiments. These resolution and repeatability are the best in the world. We also deveolped a scanning probe microscope for fast optical imaging. This instrument satisfies the target of imaging rate: 1.8 Hz. Products: 3 peer-reviewed papers, 5 conference presentations(1 invited talk), and 1 prize.
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Report
(3 results)
Research Products
(8 results)