Statistical process control for semiconductor process

• Project/Area Number: 25750120
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Social systems engineering/Safety system
• Research Institution: Nagoya Institute of Technology (2015-2016); University of Tsukuba (2013-2014)
• Principal Investigator: Kawamura Hironobu 名古屋工業大学, 工学(系)研究科(研究院), 准教授 (50548261)
• Project Period (FY): 2013-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
• Keywords: 統計的工程管理 / 実験計画法 / 品質管理 / 半導体製造 / 管理図 / 多品種少量生産 / ベイズ統計学 / 過飽和計画 / ベイズ統計 / 統計的品質管理 / 多変量管理図

Outline of Final Research Achievements

Traditional control charts are designed for processes where large historical data sets are available before a production run for estimating process parameters and computing control limits. Many processes, particularly in semiconductor manufacturing, often involve limited data sets, which result from high-mix low-volume production. Therefore, we proposed a control chart based on bayesian statistics, an application of multivariate control charts, and a selection guide for two-level supersaturated designs.

Research Products

• [Journal Article] Multifaceted Evaluation of 2-Level Supersaturated Designs (2016)
  • Author(s): Tomohiro Nakajima, Hironobu Kawamura
  • Journal Title: Total Quality Science Volume: 2 Pages: 48-59
  • NAID: 130005167411
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Multifaced Evaluation of Supersaturared Designs (2015)
  • Author(s): Tomohiro Nakajima, Hironobu Kawamura
  • Journal Title: Proceedings of the thirteenth ANQ Congress Volume: 13 Pages: 1-12
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A Xbar-chart Using the Bayesian Method for Monitoring High-Mix Low-Volume Production (2015)
  • Author(s): Yasunari Tsuruoka, Hironobu Kawamura
  • Journal Title: Proceedings of the thirteenth ANQ Congress Volume: 13 Pages: 1-14
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] 半導体製造工程におけるT2-Q管理図の実践 : 変動の大きさの管理から変動パターンの管理へ” (2014)
  • Author(s): 東出政信，仁科健，川村大伸
  • Journal Title: 品質 Volume: 44 Pages: 341-350
  • NAID: 110009833208
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] 半導体製造におけるプロセス管理 (2014)
  • Author(s): 川村大伸
  • Journal Title: 品質 Volume: 44 Pages: 276-279
  • NAID: 110009833197
  • Acknowledgement Compliant
• [Journal Article] Application of Q Charts for Short-Run Autocorrelated Data (2013)
  • Author(s): Kawamura，H．，Nishina，K．，Higashide，M．and Suzuki，T．
  • Journal Title: International Journal of Innovative Computing, Information and Control Volume: 9 Pages: 3667-3676
  • Peer Reviewed
• [Presentation] 多品種少量生産に対するベイズQ管理図 (2016)
  • Author(s): 鶴岡靖成，川村大伸
  • Organizer: 日本品質管理学会第46回年次大会
  • Place of Presentation: 名古屋工業大学
• [Presentation] ウエーハ内変動パターンに同期したCMP装置異常の検出 (2016)
  • Author(s): 東出政信，仁科健，川村大伸，杉浦遼太
  • Organizer: 精密工学会
  • Place of Presentation: 名古屋大学
  • Invited
• [Presentation] The Detection of Process Variation Synchronous within Wafer Variation Pattern (2015)
  • Author(s): Masanobu HIGASHIDE, Ken NISHINA, Hironobu KAWAMURA, Ryota SUGIURA
  • Organizer: AEC/APC Symposium Asia 2015
  • Place of Presentation: 学術総合センター
  • Year and Date: 2015-11-11
  • Int'l Joint Research
• [Presentation] 多品種少量生産用の管理図 (2013)
  • Author(s): 川村大伸，仁科健，東出政信
  • Organizer: 第5回横幹連合コンファレンス
  • Place of Presentation: 香川大学