Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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Outline of Final Research Achievements |
Plasma chemical vapor deposition (CVD) is advantageous for low-temperature, high-throughput, and large-area synthesis for carbon materials. We have synthesized nitrogen-doped graphene films by plasma CVD to clarify the electrical properties for that graphene films. The actual partial pressures of methane and nitrogen gases during graphene synthesis were measured directly by mass spectrometry. Controlling small amounts of flow rates for methane and nitrogen gases by this technique, nitrogen-doped graphene films were synthesized.
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