Examination of anisotropic stress state evaluation in III-V compound semiconductors by oil-immersion Raman spectroscopy
| Project/Area Number |
25790049
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Crystal engineering
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| Research Institution | Meiji University |
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Principal Investigator |
KOSEMURA Daisuke 明治大学, 研究・知財戦略機構, 客員研究員 (00608284)
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| Project Period (FY) |
2013-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | III-V化合物半導体 / GaN / 非極性面 / 液浸ラマン分光法 / 表面増強ラマン分光法 / フォノン / ウルツ鉱構造 / カソードルミネッセンス / 化合物半導体 / パワーデバイス / 異方性応力 / フォノン変形ポテンシャル |
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| Outline of Final Research Achievements |
Anisotropic stress states at the surfaces of GaN samples were studied. Strain-shift coefficients which are important to accomplish this study were introduced by using a tool for strain introduction as well as methodology with Raman spectroscopy and X-ray diffraction. The information at the surface of the GaN sample was extracted by the combination of oil-immersion Raman and surface-enhanced Raman. The Raman polarization selection rules not only for c-plane but also for a-, m-, and s-plane GaN were experimentally and numerically examined. An anomalous behavior of the E1TO peak excited by oil-immersion Raman was observed, which was attributed to the phonon mixing effect. The anisotropic stress state in the GaN can be evaluated using this phonon mixing effect. The results described above include important insights regarding the stress evaluation in GaN, which can contribute to the technology of measurement and crystal growth for GaN related materials.
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Report
(3 results)
Research Products
(20 results)
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[Presentation] Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy2014
Author(s)
S. Yamamoto, D. Kosemura, M. Tomita, S. N. Che Mohd Yusoff, K. Kijima, R. Imai, K. Takeuchi, R. Yokogawa, K. Usuda, and A. Ogura
Organizer
ECS and SMEQ Joint International Meeting
Place of Presentation
Cancun, Mexico
Year and Date
2014-10-09
Related Report
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