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Examination of anisotropic stress state evaluation in III-V compound semiconductors by oil-immersion Raman spectroscopy

Research Project

Project/Area Number 25790049
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Crystal engineering
Research InstitutionMeiji University

Principal Investigator

KOSEMURA Daisuke  明治大学, 研究・知財戦略機構, 客員研究員 (00608284)

Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
KeywordsIII-V化合物半導体 / GaN / 非極性面 / 液浸ラマン分光法 / 表面増強ラマン分光法 / フォノン / ウルツ鉱構造 / カソードルミネッセンス / 化合物半導体 / パワーデバイス / 異方性応力 / フォノン変形ポテンシャル
Outline of Final Research Achievements

Anisotropic stress states at the surfaces of GaN samples were studied. Strain-shift coefficients which are important to accomplish this study were introduced by using a tool for strain introduction as well as methodology with Raman spectroscopy and X-ray diffraction. The information at the surface of the GaN sample was extracted by the combination of oil-immersion Raman and surface-enhanced Raman. The Raman polarization selection rules not only for c-plane but also for a-, m-, and s-plane GaN were experimentally and numerically examined. An anomalous behavior of the E1TO peak excited by oil-immersion Raman was observed, which was attributed to the phonon mixing effect. The anisotropic stress state in the GaN can be evaluated using this phonon mixing effect. The results described above include important insights regarding the stress evaluation in GaN, which can contribute to the technology of measurement and crystal growth for GaN related materials.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (20 results)

All 2015 2014

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 3 results) Presentation (15 results) (of which Invited: 1 results)

  • [Journal Article] Oil-Immersion Raman Spectroscopy for c-Plane GaN on Si and Al2O3 substrates2015

    • Author(s)
      R. Imai, D. Kosemura, and A. Ogura
    • Journal Title

      ECS Transactions

      Volume: TBD

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Evaluation of Anisotropic Biaxial stress in Si1-xGex/Ge Mesa-Structure by Oil-Immersion Raman Spectroscopy2015

    • Author(s)
      S. Yamamoto, K. Takeuchi, R. Yokogawa, M. Tomita, D. Kosemura K. Usuda, and A. Ogura
    • Journal Title

      ECS Transactions

      Volume: TBD

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical field analysis of metal-surface plasmon resonance using a biaxially strained Si substrate2014

    • Author(s)
      Daisuke Kosemura,Siti Norhidayah binti CheMohd Yusoff and Atsushi Ogura
    • Journal Title

      J. Raman Spectrosc.

      Volume: 45 Issue: 6 Pages: 414-417

    • DOI

      10.1002/jrs.4478

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy2014

    • Author(s)
      S. Yamamoto, D. Kosemura, M. Tomita, S. Che Mohd Yusoff, T. Kijima, R. Imai, K. Takeuchi, R. Yokogawa, K. Usuda, and A. Ogura
    • Journal Title

      ECS Transactions

      Volume: 64 Issue: 6 Pages: 841-847

    • DOI

      10.1149/06406.0841ecst

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Anisotropic strain evaluation in the finite Si area by surface plasmon enhanced Raman spectroscopy2014

    • Author(s)
      A. Ogura and D. Kosemura
    • Journal Title

      ECS Transactions

      Volume: 64 Issue: 6 Pages: 67-77

    • DOI

      10.1149/06406.0067ecst

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Oil-Immersion Raman Spectroscopy for c-Plane GaN on Si and Al2O3 substrates2015

    • Author(s)
      R. Imai, D. Kosemura, and A. Ogura
    • Organizer
      ECS meeting
    • Place of Presentation
      Chicago, USA
    • Year and Date
      2015-05-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] Evaluation of Anisotropic Biaxial stress in Si1-xGex/Ge Mesa-Structure by Oil-Immersion Raman Spectroscopy2015

    • Author(s)
      S. Yamamoto, K. Takeuchi, R. Yokogawa, M. Tomita, D. Kosemura, K. Usuda, and A. Ogura
    • Organizer
      ECS Meeting
    • Place of Presentation
      Chicago, USA
    • Year and Date
      2015-05-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高Ge濃度SiGeにおけるフォノン変形ポテンシャルの導出2015

    • Author(s)
      武内一真、小瀬村大亮、山本章太郎、富田基裕、臼田宏治、小椋厚志
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高Ge濃度歪SiGeメサ構造に印加された異方性2軸応力評価2015

    • Author(s)
      山本章太郎、武内一真、富田基裕、小瀬村大亮、臼田宏治、小椋厚志
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 局在プラズモン共鳴を用いたラマン分光法におけるひずみSi表面のAg粒子被覆率と信号増強の関係2015

    • Author(s)
      木嶋隆浩、山本章太郎、横川凌、武内一真、村上達美、小瀬村大亮、小椋厚志
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy2014

    • Author(s)
      S. Yamamoto, D. Kosemura, M. Tomita, S. N. Che Mohd Yusoff, K. Kijima, R. Imai, K. Takeuchi, R. Yokogawa, K. Usuda, and A. Ogura
    • Organizer
      ECS and SMEQ Joint International Meeting
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-10-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Anisotropic strain evaluation in the finite Si area by surface plasmon enhanced Raman spectroscopy2014

    • Author(s)
      A. Ogura and D. Kosemura
    • Organizer
      ECS and SMEQ Joint International Meeting
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-10-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 液浸ラマン分光法を用いたTO/LOフォノンスペクトル励起による高Ge濃度歪SiGeメサ構造の異方性2軸応力緩和の観測2014

    • Author(s)
      山本章太郎、小瀬村大亮、富田基裕、武内一真、横川凌、臼田宏治、小椋厚志
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 液浸ラマン分光法による選択的イオン注入により作製された一軸歪SiGe/Siの異方性2軸応力評価2014

    • Author(s)
      山本章太郎、小瀬村大亮、富田基裕、武内一真、横川凌、米倉瑛介、澤野憲太郎、野平博司、小椋厚志
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Strain evaluation in the Si channels of transistors by surface-enhanced Raman spectroscopy2014

    • Author(s)
      T. Kijima, D. Kosemura, S. N. Che Mohd Yusoff, S. Yamamoto, R. Imai, and A. Ogura
    • Organizer
      International Conference on Raman Spectroscopy
    • Place of Presentation
      Yena, Germany
    • Year and Date
      2014-08-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 銀ナノ粒子による電場増強効果を用いたGaN最表面のラマン測定2014

    • Author(s)
      今井亮佑、小瀬村大亮、永田晃基、シティノルヒダヤー・ビンティ・チェモハマドユソフ、木嶋隆浩、山本章太郎、小椋厚志
    • Organizer
      春季応用物理学会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report
  • [Presentation] 表面増強ラマン分光法による歪SiGe薄膜のLO/TOフォノン励起2014

    • Author(s)
      山本章太郎、小瀬村大亮、シティノルヒダヤー・ビンティ・チェモハマドユソフ、木嶋隆浩、今井亮佑、臼田宏治、小椋厚志
    • Organizer
      春季応用物理学会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report
  • [Presentation] 局在プラズモン共鳴を用いたトランジスタチャネル領域最表面のラマン評価2014

    • Author(s)
      木嶋隆浩、小瀬村大亮、シティノルヒダヤー・ビンティ・チェモハマドユソフ、山本章太郎、今井亮佑、小椋厚志
    • Organizer
      春季応用物理学会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report
  • [Presentation] 表面増強ラマン散乱を用いた歪Si異方性二軸応力のパターンサイズ依存測定2014

    • Author(s)
      岩崎竜平、永田晃基、小瀬村大亮、小椋厚志
    • Organizer
      春季応用物理学会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report
  • [Presentation] チップ増強ラマン分光法による歪Si評価2014

    • Author(s)
      小瀬村大亮、富田基裕、シティノルヒダヤー・ビンティ・チェモハマドユソフ、後藤千絵、川口哲成、三澤真弓、小椋厚志
    • Organizer
      春季応用物理学会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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