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Development of nondestructive evaluation technique of electronic states of thin-film solar cells by soft X-ray emission spectroscopy

Research Project

Project/Area Number 25790060
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

IMAZONO Takashi  独立行政法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 研究副主幹 (50370359)

Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords軟X線発光分光 / 多層膜回折格子 / 電子状態分析 / 薄膜太陽電池 / 化学結合状態 / 軟X線多層膜
Outline of Final Research Achievements

The purpose of this study is to develop nondestructive technique for electronic state analysis of the absorbers in thin-film CIS solar cells by soft X-ray emission spectroscopy. In order to detect simultaneously the L emission lines of Cu, In and Se in the soft X-ray region of 1-3.5 keV, an aperiodic Ni/C multilayer film was invented and deposited onto a laminar-type diffraction grating by an ion-beam sputtering method. The optical property was characterized by synchrotron radiation. As the result, it has been verified experimentally that the new aperiodic layer structure is effective for expanding the bandwidth of the diffraction efficiency of the multilayer grating. This means that a wideband soft X-ray emission spectrometer has been developed successfully.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (36 results)

All 2015 2014 2013 Other

All Journal Article (7 results) (of which Peer Reviewed: 4 results,  Acknowledgement Compliant: 1 results) Presentation (28 results) (of which Invited: 7 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] 多層膜回折格子の放射光への応用 -keV領域回折格子分光器ビームラインにおける新展開-2015

    • Author(s)
      小池雅人, 今園孝志, 石野雅彦
    • Journal Title

      X線分析の進歩

      Volume: 46 Pages: 159-166

    • NAID

      40020424731

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a compact polarization analysis apparatus for plasma soft X-ray laser2014

    • Author(s)
      T. Imazono and M. Koike
    • Journal Title

      Thin Solid Films

      Volume: 571 Pages: 513-516

    • DOI

      10.1016/j.tsf.2014.02.011

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry2014

    • Author(s)
      M. Terauchi, S. Koshiya, F. Satoh, H. Takahashi, N. Handa, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
    • Journal Title

      Microscopy and Microanalysis

      Volume: 20 Issue: 3 Pages: 692-697

    • DOI

      10.1017/s1431927614000439

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 50~4000 eV領域の軟X線平面結像型分光器の開発と電子顕微鏡への応用2014

    • Author(s)
      今園孝志
    • Journal Title

      応用物理

      Volume: 83 Pages: 288-292

    • NAID

      130007718497

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of a wideband multilayer grating spectrometer for the study of electronic structure of thin-film CIS solar cells2014

    • Author(s)
      T. Imazono, M. Koike, S. Kuramoto, T. Nagano, M. Koeda, and N. Moriya
    • Journal Title

      JAEA-Conf

      Volume: 2014-001 Pages: 41-44

    • Related Report
      2014 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Characteristic Features and Applications of a Newly Developed Wavelength Dispersive Soft X-ray Emission Spectrometer for Electron Probe X-ray Microanalyzers and Scanning Electron Microscopes2014

    • Author(s)
      H. Takahashi, T. Murano, M. Takakura, N. Handa, M. Terauchi, M. Koike, T. Kawachi, T. Imazono, N. Hasegawa, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
    • Journal Title

      JEOL News

      Volume: 49 Pages: 73-80

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Development of an objective flat-field spectrograph for electron microscopic soft x-ray emission spectrometry in 50-4000 eV2013

    • Author(s)
      Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
    • Journal Title

      Proceedings of SPIE

      Volume: 8848 Pages: 88481201-14

    • DOI

      10.1117/12.2024652

    • Related Report
      2013 Research-status Report
  • [Presentation] Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft X-ray region2015

    • Author(s)
      M. Koike, T. Imazono, T Nagano, H. Sasai, Y. Oue, S. Kuramoto, M. Terauchi, H. Takahashi, T. Notoya, and T. Murano
    • Organizer
      12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
    • Place of Presentation
      New York, USA
    • Year and Date
      2015-07-06 – 2015-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development of a flat-field spectrometer with a wideband Ni/C multilayer grating in the 1-3.5 keV range2015

    • Author(s)
      T. Imazono
    • Organizer
      12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
    • Place of Presentation
      New York, USA
    • Year and Date
      2015-07-06 – 2015-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Experimental evaluation of a method to enhance the diffraction efficiency by overcoating diamond-like carbon (DLC) on soft X-ray laminar-type gratings2015

    • Author(s)
      T. Imazono, M. Koike, T Nagano, H. Sasai, Y. Oue, S. Kuramoto, M. Terauchi, H. Takahashi, T. Notoya, and T. Murano
    • Organizer
      12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
    • Place of Presentation
      New York, USA
    • Year and Date
      2015-07-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development of soft X-ray polarizing elements and polarization measurement apparatus at JAEA2015

    • Author(s)
      T. Imazono
    • Organizer
      SLAC Seminar
    • Place of Presentation
      SLAC, California, USA
    • Year and Date
      2015-02-23
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 1~3.5 keV領域を一定入射角でカバーする広帯域Ni/C多層膜回折格子分光器の開発2015

    • Author(s)
      今園孝志, 小池雅人
    • Organizer
      第28回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学, 草津市
    • Year and Date
      2015-01-10 – 2015-01-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] リチウムK発光計測のためのダイヤモンドライクカーボン膜を用いた高回折効率回折格子の設計2015

    • Author(s)
      小池雅人、今園孝志、長野哲也、笹井浩行、大上裕紀、倉本智史、寺内正己、高橋秀之、能登谷智史、村野孝訓
    • Organizer
      第28回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学, 草津市
    • Year and Date
      2015-01-10 – 2015-01-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] 軌道角運動量を持つ円偏光アンジュレータ高次光干渉実験2015

    • Author(s)
      佐々木茂美, 宮本篤, 加藤政博, 許斐太郎, 保坂将人, 山本尚人,今園孝志,小池雅人
    • Organizer
      第28回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学, 草津市
    • Year and Date
      2015-01-10 – 2015-01-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] DLC光学素子の軟X線への応用2014

    • Author(s)
      小池雅人, 今園孝志, 長野哲也
    • Organizer
      レーザー励起X線源とその応用研究会
    • Place of Presentation
      ホテルラフォーレ琵琶湖, 守山市
    • Year and Date
      2014-12-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] EM用軟X線発光分析技術開発のこれまでと今後の展望2014

    • Author(s)
      寺内正己, 高橋秀之, 飯田信雄, 村野孝訓, 小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
    • Organizer
      日本顕微鏡学会第56回九州支部学術講演会
    • Place of Presentation
      宮崎市民プラザ, 宮崎市
    • Year and Date
      2014-12-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Development of a soft X-ray emission spectrometer with a wideband Ni/C multilayer grating covering the range 1-3.5 keV2014

    • Author(s)
      T. Imazono, M. Koike, S. Kuramoto, and T. Nagano
    • Organizer
      第15回光量子科学研究シンポジウム
    • Place of Presentation
      日本原子力研究開発機構, 木津川市
    • Year and Date
      2014-11-13 – 2014-11-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Chemical state information of bulk materials obtained by SEM-based SXES grating spectrometer2014

    • Author(s)
      M. Terauchi, S. Koshiya, F. Satoh, H. Takahashi, T. Notoya, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, S. Kuramoto
    • Organizer
      第15回光量子科学研究シンポジウム
    • Place of Presentation
      日本原子力研究開発機構, 木津川市
    • Year and Date
      2014-11-13 – 2014-11-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] 多層膜回折格子の放射光への応用 -keV領域回折格子分光器ビームラインにおける新展開-2014

    • Author(s)
      小池雅人, 今園孝志, 石野雅彦
    • Organizer
      第50回X線分析討論会
    • Place of Presentation
      東北大学片平さくらホール, 仙台市
    • Year and Date
      2014-10-30 – 2014-10-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 1~3.5 keV領域をカバーするワイドバンド多層膜回折格子を用いた平面結像型軟X線分光器の設計2014

    • Author(s)
      今園孝志, 小池雅人, 倉本智史, 長野哲也
    • Organizer
      第50回X線分析討論会
    • Place of Presentation
      東北大学片平さくらホール, 仙台市
    • Year and Date
      2014-10-30 – 2014-10-31
    • Related Report
      2014 Annual Research Report
  • [Presentation] リチウムK発光高感度分光計測のための軟X線高効率回折格子の設計2014

    • Author(s)
      小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史, 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓
    • Organizer
      第50回X線分析討論会
    • Place of Presentation
      東北大学片平さくらホール, 仙台市
    • Year and Date
      2014-10-30 – 2014-10-31
    • Related Report
      2014 Annual Research Report
  • [Presentation] Present State of TEM-SXES Analysis and its Application to SEM aiming Chemical Analysis of Bulk Materials2014

    • Author(s)
      M. Terauchi, H. Takahashi, N. Handa, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
    • Organizer
      Microscopy & Microanalysis
    • Place of Presentation
      Hartford, USA
    • Year and Date
      2014-08-03 – 2014-08-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 電子顕微鏡用平面結像型軟X線回折格子発光分光器の開発とその性能2014

    • Author(s)
      今園孝志, 小池雅人, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史, 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓
    • Organizer
      2014年度立命館大学SRセンター研究成果報告会
    • Place of Presentation
      立命館大学, 草津市
    • Year and Date
      2014-06-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 1~3.5 keV領域ワイドバンド多層膜回折格子の開発2014

    • Author(s)
      今園孝志, 小池雅人
    • Organizer
      2014年度立命館大学SRセンター研究成果報告会
    • Place of Presentation
      立命館大学, 草津市
    • Year and Date
      2014-06-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 電子顕微鏡用軟X線分光器の開発と応用2014

    • Author(s)
      高橋秀之, 飯田信雄, 村野孝訓, 寺内正己, 小池雅人, 今園孝志, 長谷川登, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
    • Organizer
      第30回分析電子顕微鏡討論会
    • Place of Presentation
      幕張メッセ国際会議場, 千葉市
    • Year and Date
      2014-05-12
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 電子顕微鏡用SXES技術の現状と今後の展望2014

    • Author(s)
      寺内正己, 高橋秀之, 飯田信雄, 村野孝訓, 小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
    • Organizer
      日本顕微鏡学会第70回学術講演会
    • Place of Presentation
      幕張メッセ国際会議場, 千葉市
    • Year and Date
      2014-05-11 – 2014-05-13
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] EPMA/SEM軟X線分光法による化学結合効果の各種情報観察2014

    • Author(s)
      高橋秀之, 村野孝訓, 飯田信雄, 寺内正己, 小池雅人, 今園孝志, 長谷川登, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
    • Organizer
      日本顕微鏡学会第70回記念学術講演会
    • Place of Presentation
      幕張メッセ国際会議場, 千葉市
    • Year and Date
      2014-05-11 – 2014-05-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development of a compact polarization analysis apparatus for plasma soft x-ray laser

    • Author(s)
      Takashi Imazono, Masato Koike
    • Organizer
      6th International Conference on Spectroscopic Ellipsometry
    • Place of Presentation
      Kyoto Research Park Corp., Kyoto
    • Related Report
      2013 Research-status Report
  • [Presentation] 薄膜型太陽電池の化学結合状態分析のための1~3.5 keV領域用広エネルギー帯域多層膜回折格子分光器の設計

    • Author(s)
      今園孝志、小池雅人
    • Organizer
      2013年度SRセンター研究成果報告会
    • Place of Presentation
      立命館大学、草津市
    • Related Report
      2013 Research-status Report
  • [Presentation] Development of an objective flat-field spectrograph for electron microscopic soft x-ray emission spectrometry in 50-4000 eV

    • Author(s)
      Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
    • Organizer
      SPIE Optics + Photonics
    • Place of Presentation
      San Diego Convention Center, San Diego, CA, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] 50~4000eV領域対応ワイドバンド軟X線回折格子分光器の開発と汎用電子顕微鏡への応用

    • Author(s)
      今園孝志、小池雅人、河内哲哉、長谷川登、小枝勝、長野哲也、笹井浩行、大上裕紀、米澤善央、倉本智史、寺内正己、高橋秀之、飯田信雄、村野孝訓
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学(京田辺キャンパス)、京田辺市
    • Related Report
      2013 Research-status Report
  • [Presentation] Wide band soft x-ray grating spectrographs in the 50-4000 eV range and their application to electron microscopes

    • Author(s)
      Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
    • Organizer
      12th Symposium on X-ray Imaging Optics
    • Place of Presentation
      大阪大学中ノ島センター、大阪市
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Design of a wideband multilayer grating spectrometer for the study of electronic structure of thin-film CIS solar cells

    • Author(s)
      Takashi Imazono, Masato Koike, Satoshi Kuramoto, Tetsuya Nagano, Masaru Koeda, Naoji Moriya
    • Organizer
      第14回光量子科学研究シンポジウム
    • Place of Presentation
      日本原子力研究開発機構、木津川市
    • Related Report
      2013 Research-status Report
  • [Presentation] 1~3.5 keV領域用ワイドバンド多層膜回折格子とそれを用いた軟X線発光分光器の設計

    • Author(s)
      今園孝志、小池雅人、小枝 勝、長野哲也、笹井浩行、大上裕紀、米澤善央、倉本智史、寺内正己、高橋秀之、飯田信雄、村野孝訓
    • Organizer
      第27回日本放射光学会年会放射光科学合同シンポジウム
    • Place of Presentation
      広島国際会議場、広島市
    • Related Report
      2013 Research-status Report
  • [Presentation] Development of Soft X-Ray Multilayered Gratings and Polarizing Elements

    • Author(s)
      Takashi Imazono
    • Organizer
      ALS Seminar
    • Place of Presentation
      Advanced Light Source (ALS), Lawrence Berkeley National Laboratory (LBNL), CA, USA
    • Related Report
      2013 Research-status Report
    • Invited
  • [Patent(Industrial Property Rights)] 回折格子2013

    • Inventor(s)
      今園孝志、小池雅人、長野哲也
    • Industrial Property Rights Holder
      今園孝志、小池雅人、長野哲也
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-11-13
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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