Development of nondestructive evaluation technique of electronic states of thin-film solar cells by soft X-ray emission spectroscopy

• Project/Area Number: 25790060
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: IMAZONO Takashi 独立行政法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 研究副主幹 (50370359)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: 軟Ｘ線発光分光 / 多層膜回折格子 / 電子状態分析 / 薄膜太陽電池 / 化学結合状態 / 軟Ｘ線多層膜

Outline of Final Research Achievements

The purpose of this study is to develop nondestructive technique for electronic state analysis of the absorbers in thin-film CIS solar cells by soft X-ray emission spectroscopy. In order to detect simultaneously the L emission lines of Cu, In and Se in the soft X-ray region of 1-3.5 keV, an aperiodic Ni/C multilayer film was invented and deposited onto a laminar-type diffraction grating by an ion-beam sputtering method. The optical property was characterized by synchrotron radiation. As the result, it has been verified experimentally that the new aperiodic layer structure is effective for expanding the bandwidth of the diffraction efficiency of the multilayer grating. This means that a wideband soft X-ray emission spectrometer has been developed successfully.

Research Products

• [Journal Article] 多層膜回折格子の放射光への応用 -keV領域回折格子分光器ビームラインにおける新展開- (2015)
  • Author(s): 小池雅人, 今園孝志, 石野雅彦
  • Journal Title: X線分析の進歩 Volume: 46 Pages: 159-166
  • NAID: 40020424731
  • Peer Reviewed
• [Journal Article] Development of a compact polarization analysis apparatus for plasma soft X-ray laser (2014)
  • Author(s): T. Imazono and M. Koike
  • Journal Title: Thin Solid Films Volume: 571 Pages: 513-516
  • DOI: 10.1016/j.tsf.2014.02.011
  • Peer Reviewed
• [Journal Article] Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry (2014)
  • Author(s): M. Terauchi, S. Koshiya, F. Satoh, H. Takahashi, N. Handa, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
  • Journal Title: Microscopy and Microanalysis Volume: 20 Issue: 3 Pages: 692-697
  • DOI: 10.1017/s1431927614000439
  • Peer Reviewed
• [Journal Article] 50～4000 eV領域の軟Ｘ線平面結像型分光器の開発と電子顕微鏡への応用 (2014)
  • Author(s): 今園孝志
  • Journal Title: 応用物理 Volume: 83 Pages: 288-292
  • NAID: 130007718497
  • Peer Reviewed
• [Journal Article] Design of a wideband multilayer grating spectrometer for the study of electronic structure of thin-film CIS solar cells (2014)
  • Author(s): T. Imazono, M. Koike, S. Kuramoto, T. Nagano, M. Koeda, and N. Moriya
  • Journal Title: JAEA-Conf Volume: 2014-001 Pages: 41-44
  • Acknowledgement Compliant
• [Journal Article] Characteristic Features and Applications of a Newly Developed Wavelength Dispersive Soft X-ray Emission Spectrometer for Electron Probe X-ray Microanalyzers and Scanning Electron Microscopes (2014)
  • Author(s): H. Takahashi, T. Murano, M. Takakura, N. Handa, M. Terauchi, M. Koike, T. Kawachi, T. Imazono, N. Hasegawa, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
  • Journal Title: JEOL News Volume: 49 Pages: 73-80
• [Journal Article] Development of an objective flat-field spectrograph for electron microscopic soft x-ray emission spectrometry in 50-4000 eV (2013)
  • Author(s): Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
  • Journal Title: Proceedings of SPIE Volume: 8848 Pages: 88481201-14
  • DOI: 10.1117/12.2024652
• [Presentation] Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft X-ray region (2015)
  • Author(s): M. Koike, T. Imazono, T Nagano, H. Sasai, Y. Oue, S. Kuramoto, M. Terauchi, H. Takahashi, T. Notoya, and T. Murano
  • Organizer: 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
  • Place of Presentation: New York, USA
  • Year and Date: 2015-07-06 – 2015-07-10
• [Presentation] Development of a flat-field spectrometer with a wideband Ni/C multilayer grating in the 1-3.5 keV range (2015)
  • Author(s): T. Imazono
  • Organizer: 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
  • Place of Presentation: New York, USA
  • Year and Date: 2015-07-06 – 2015-07-10
• [Presentation] Experimental evaluation of a method to enhance the diffraction efficiency by overcoating diamond-like carbon (DLC) on soft X-ray laminar-type gratings (2015)
  • Author(s): T. Imazono, M. Koike, T Nagano, H. Sasai, Y. Oue, S. Kuramoto, M. Terauchi, H. Takahashi, T. Notoya, and T. Murano
  • Organizer: 12th International Conference on Synchrotron Radiation Instrumentation (SRI2015)
  • Place of Presentation: New York, USA
  • Year and Date: 2015-07-06
• [Presentation] Development of soft X-ray polarizing elements and polarization measurement apparatus at JAEA (2015)
  • Author(s): T. Imazono
  • Organizer: SLAC Seminar
  • Place of Presentation: SLAC, California, USA
  • Year and Date: 2015-02-23
  • Invited
• [Presentation] 1～3.5 keV領域を一定入射角でカバーする広帯域Ni/C多層膜回折格子分光器の開発 (2015)
  • Author(s): 今園孝志, 小池雅人
  • Organizer: 第28回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学, 草津市
  • Year and Date: 2015-01-10 – 2015-01-12
• [Presentation] リチウムK発光計測のためのダイヤモンドライクカーボン膜を用いた高回折効率回折格子の設計 (2015)
  • Author(s): 小池雅人、今園孝志、長野哲也、笹井浩行、大上裕紀、倉本智史、寺内正己、高橋秀之、能登谷智史、村野孝訓
  • Organizer: 第28回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学, 草津市
  • Year and Date: 2015-01-10 – 2015-01-12
• [Presentation] 軌道角運動量を持つ円偏光アンジュレータ高次光干渉実験 (2015)
  • Author(s): 佐々木茂美, 宮本篤, 加藤政博, 許斐太郎, 保坂将人, 山本尚人，今園孝志，小池雅人
  • Organizer: 第28回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学, 草津市
  • Year and Date: 2015-01-10 – 2015-01-12
• [Presentation] DLC光学素子の軟X線への応用 (2014)
  • Author(s): 小池雅人, 今園孝志, 長野哲也
  • Organizer: レーザー励起X線源とその応用研究会
  • Place of Presentation: ホテルラフォーレ琵琶湖, 守山市
  • Year and Date: 2014-12-11
• [Presentation] EM用軟X線発光分析技術開発のこれまでと今後の展望 (2014)
  • Author(s): 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓, 小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
  • Organizer: 日本顕微鏡学会第56回九州支部学術講演会
  • Place of Presentation: 宮崎市民プラザ, 宮崎市
  • Year and Date: 2014-12-06
  • Invited
• [Presentation] Development of a soft X-ray emission spectrometer with a wideband Ni/C multilayer grating covering the range 1-3.5 keV (2014)
  • Author(s): T. Imazono, M. Koike, S. Kuramoto, and T. Nagano
  • Organizer: 第15回光量子科学研究シンポジウム
  • Place of Presentation: 日本原子力研究開発機構, 木津川市
  • Year and Date: 2014-11-13 – 2014-11-14
• [Presentation] Chemical state information of bulk materials obtained by SEM-based SXES grating spectrometer (2014)
  • Author(s): M. Terauchi, S. Koshiya, F. Satoh, H. Takahashi, T. Notoya, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, S. Kuramoto
  • Organizer: 第15回光量子科学研究シンポジウム
  • Place of Presentation: 日本原子力研究開発機構, 木津川市
  • Year and Date: 2014-11-13 – 2014-11-14
• [Presentation] 多層膜回折格子の放射光への応用 -keV領域回折格子分光器ビームラインにおける新展開- (2014)
  • Author(s): 小池雅人, 今園孝志, 石野雅彦
  • Organizer: 第50回Ｘ線分析討論会
  • Place of Presentation: 東北大学片平さくらホール, 仙台市
  • Year and Date: 2014-10-30 – 2014-10-31
  • Invited
• [Presentation] 1～3.5 keV領域をカバーするワイドバンド多層膜回折格子を用いた平面結像型軟Ｘ線分光器の設計 (2014)
  • Author(s): 今園孝志, 小池雅人, 倉本智史, 長野哲也
  • Organizer: 第50回Ｘ線分析討論会
  • Place of Presentation: 東北大学片平さくらホール, 仙台市
  • Year and Date: 2014-10-30 – 2014-10-31
• [Presentation] リチウムK発光高感度分光計測のための軟X線高効率回折格子の設計 (2014)
  • Author(s): 小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史, 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓
  • Organizer: 第50回Ｘ線分析討論会
  • Place of Presentation: 東北大学片平さくらホール, 仙台市
  • Year and Date: 2014-10-30 – 2014-10-31
• [Presentation] Present State of TEM-SXES Analysis and its Application to SEM aiming Chemical Analysis of Bulk Materials (2014)
  • Author(s): M. Terauchi, H. Takahashi, N. Handa, T. Murano, M. Koike, T. Imazono, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, and S. Kuramoto
  • Organizer: Microscopy & Microanalysis
  • Place of Presentation: Hartford, USA
  • Year and Date: 2014-08-03 – 2014-08-07
• [Presentation] 電子顕微鏡用平面結像型軟Ｘ線回折格子発光分光器の開発とその性能 (2014)
  • Author(s): 今園孝志, 小池雅人, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史, 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓
  • Organizer: 2014年度立命館大学SRセンター研究成果報告会
  • Place of Presentation: 立命館大学, 草津市
  • Year and Date: 2014-06-07
• [Presentation] 1～3.5 keV領域ワイドバンド多層膜回折格子の開発 (2014)
  • Author(s): 今園孝志, 小池雅人
  • Organizer: 2014年度立命館大学SRセンター研究成果報告会
  • Place of Presentation: 立命館大学, 草津市
  • Year and Date: 2014-06-07
• [Presentation] 電子顕微鏡用軟X線分光器の開発と応用 (2014)
  • Author(s): 高橋秀之, 飯田信雄, 村野孝訓, 寺内正己, 小池雅人, 今園孝志, 長谷川登, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
  • Organizer: 第30回分析電子顕微鏡討論会
  • Place of Presentation: 幕張メッセ国際会議場, 千葉市
  • Year and Date: 2014-05-12
  • Invited
• [Presentation] 電子顕微鏡用SXES技術の現状と今後の展望 (2014)
  • Author(s): 寺内正己, 高橋秀之, 飯田信雄, 村野孝訓, 小池雅人, 今園孝志, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
  • Organizer: 日本顕微鏡学会第70回学術講演会
  • Place of Presentation: 幕張メッセ国際会議場, 千葉市
  • Year and Date: 2014-05-11 – 2014-05-13
  • Invited
• [Presentation] EPMA/SEM軟X線分光法による化学結合効果の各種情報観察 (2014)
  • Author(s): 高橋秀之, 村野孝訓, 飯田信雄, 寺内正己, 小池雅人, 今園孝志, 長谷川登, 小枝勝, 長野哲也, 笹井浩行, 大上裕紀, 米澤善央, 倉本智史
  • Organizer: 日本顕微鏡学会第70回記念学術講演会
  • Place of Presentation: 幕張メッセ国際会議場, 千葉市
  • Year and Date: 2014-05-11 – 2014-05-13
• [Presentation] Development of a compact polarization analysis apparatus for plasma soft x-ray laser
  • Author(s): Takashi Imazono, Masato Koike
  • Organizer: 6th International Conference on Spectroscopic Ellipsometry
  • Place of Presentation: Kyoto Research Park Corp., Kyoto
• [Presentation] 薄膜型太陽電池の化学結合状態分析のための1～3.5 keV領域用広エネルギー帯域多層膜回折格子分光器の設計
  • Author(s): 今園孝志、小池雅人
  • Organizer: 2013年度SRセンター研究成果報告会
  • Place of Presentation: 立命館大学、草津市
• [Presentation] Development of an objective flat-field spectrograph for electron microscopic soft x-ray emission spectrometry in 50-4000 eV
  • Author(s): Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
  • Organizer: SPIE Optics + Photonics
  • Place of Presentation: San Diego Convention Center, San Diego, CA, USA
• [Presentation] 50～4000eV領域対応ワイドバンド軟X線回折格子分光器の開発と汎用電子顕微鏡への応用
  • Author(s): 今園孝志、小池雅人、河内哲哉、長谷川登、小枝勝、長野哲也、笹井浩行、大上裕紀、米澤善央、倉本智史、寺内正己、高橋秀之、飯田信雄、村野孝訓
  • Organizer: 2013年第74回応用物理学会秋季学術講演会
  • Place of Presentation: 同志社大学（京田辺キャンパス）、京田辺市
• [Presentation] Wide band soft x-ray grating spectrographs in the 50-4000 eV range and their application to electron microscopes
  • Author(s): Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano
  • Organizer: 12th Symposium on X-ray Imaging Optics
  • Place of Presentation: 大阪大学中ノ島センター、大阪市
  • Invited
• [Presentation] Design of a wideband multilayer grating spectrometer for the study of electronic structure of thin-film CIS solar cells
  • Author(s): Takashi Imazono, Masato Koike, Satoshi Kuramoto, Tetsuya Nagano, Masaru Koeda, Naoji Moriya
  • Organizer: 第14回光量子科学研究シンポジウム
  • Place of Presentation: 日本原子力研究開発機構、木津川市
• [Presentation] 1～3.5 keV領域用ワイドバンド多層膜回折格子とそれを用いた軟Ｘ線発光分光器の設計
  • Author(s): 今園孝志、小池雅人、小枝 勝、長野哲也、笹井浩行、大上裕紀、米澤善央、倉本智史、寺内正己、高橋秀之、飯田信雄、村野孝訓
  • Organizer: 第27回日本放射光学会年会放射光科学合同シンポジウム
  • Place of Presentation: 広島国際会議場、広島市
• [Presentation] Development of Soft X-Ray Multilayered Gratings and Polarizing Elements
  • Author(s): Takashi Imazono
  • Organizer: ALS Seminar
  • Place of Presentation: Advanced Light Source (ALS), Lawrence Berkeley National Laboratory (LBNL), CA, USA
  • Invited
• [Patent(Industrial Property Rights)] 回折格子 (2013)
  • Inventor(s): 今園孝志、小池雅人、長野哲也
  • Industrial Property Rights Holder: 今園孝志、小池雅人、長野哲也
  • Industrial Property Rights Type: 特許
  • Filing Date: 2013-11-13