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Computational Analysis of Defects in the Directed-Self Assembly of Block Copolymer

Research Project

Project/Area Number 25800237
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Biological physics/Chemical physics/Soft matter physics
Research InstitutionKyoto University

Principal Investigator

YOSHIMOTO Kenji  京都大学, 学際融合教育研究推進センター, 特定准教授 (00645278)

Research Collaborator TANIGUCHI Takashi  京都大学, 大学院工学研究科化学工学専攻, 准教授 (60293669)
OHSHIMA Masahiro  京都大学, 大学院工学研究科化学工学専攻, 教授 (60185254)
FUKAWATASE Ken  京都大学, 大学院工学研究科化学工学専攻
HORI Yoshihiro  京都大学, 大学院工学研究科化学工学専攻
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2013: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
KeywordsDSA / 誘導自己組織化 / ブロック共重合体 / 欠陥構造 / 欠陥ダイナミクス / 大規模シミュレーション / ホールシュリンク / ブロックコポリマー / シミュレーション / モデル / リソグラフィ / 微細加工
Outline of Final Research Achievements

Due to a high demand for electrical devices with compact size and high performance, design of electric circuit has to be smaller than ever. Among various new emerging methods, we investigated the so-called directed self-assembly of diblock copolymer (DSA) in this study. Our goal was to gain insight into mechanisms of defect formation observed in some DSA processes. By employing the simplified model and fitting the model parameters with the experimental data, we were able to perform large-scale dynamic simulations and to observe various defects over a long course of simulation time. We found that on the chemically pre-patterned surface, the defect density decays exponentially with time. Also, for the DSA process in which the nano-scale holes were used as a guiding template, our simulations showed that the wall affinity to the diblock copolymers could largely affect on the defect formation and that the phase-separated morphology could be different from the one in the bulk.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (16 results)

All 2015 2014 2013 Other

All Journal Article (5 results) (of which Peer Reviewed: 3 results,  Open Access: 2 results,  Acknowledgement Compliant: 2 results) Presentation (10 results) (of which Invited: 7 results) Remarks (1 results)

  • [Journal Article] Effects of Thermal Fluctuations and Block Copolymers Compositions on Defects in Directed Self-Assembly Hole Shrink Process2015

    • Author(s)
      Ken Fukawatase, Kenji Yoshimoto, Masahiro Ohshima
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 6S1 Pages: 06FE01-06FE01

    • DOI

      10.7567/jjap.54.06fe01

    • NAID

      210000145222

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Optimization of directed self-assembly hole shrink process with simplified model2014

    • Author(s)
      Kenji Yoshimoto, Ken Fukawatase, Masahiro Ohshima, Yoshihiro Naka, Shimon Maeda, Satoshi Tanaka, Seiji Morita, Hisako Aoyama, Shoji Mimotogi
    • Journal Title

      JOURNAL OF MICRO/NANOLITHOGRAPHY, MEMS, AND MOEMS

      Volume: 13 Issue: 3 Pages: 031305-031305

    • DOI

      10.1117/1.jmm.13.3.031305

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] DFM for defect-free DSA hole shrink process2014

    • Author(s)
      Ken Fukawatase, Kenji Yoshimoto, Masahiro Ohshima, Yoshihiro Naka, Shimon Maeda, Satoshi Tanaka, Seiji Morita, Hisako Aoyama, Shoji Mimotogi
    • Journal Title

      Proceedings of SPIE

      Volume: 9049 Pages: 90491K-90491K

    • DOI

      10.1117/12.2046108

    • Related Report
      2013 Research-status Report
  • [Journal Article] Multiscale DSA simulations for efficient hotspot analysis2014

    • Author(s)
      Yoshihiro Hori, Kenji Yoshimoto, Takashi Taniguchi, Masahiro Ohshima
    • Journal Title

      Proceedings of SPIE

      Volume: 9049 Pages: 90492L-90492L

    • DOI

      10.1117/12.2046155

    • Related Report
      2013 Research-status Report
  • [Journal Article] Large-Scale Simulations of Directed Self-Assembly with Simplified Model2013

    • Author(s)
      Kenji Yoshimoto and Takashi Taniguchi
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 26 Issue: 6 Pages: 809-816

    • DOI

      10.2494/photopolymer.26.809

    • NAID

      130004833557

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] ブロックコポリマーを用いた微細加工プロセスのモデリングと最適化2014

    • Author(s)
      吉元 健治、深渡瀬 健、大嶋 正裕
    • Organizer
      化学工学会 姫路大会2014
    • Place of Presentation
      じばさんびる(兵庫)
    • Year and Date
      2014-12-08 – 2014-12-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Effects of Thermal Fluctuations and Block Copolymers Compositions on Defects in Directed Self-assembly Contact Hole Shrink Process2014

    • Author(s)
      K. Fukawatase, K. Yoshimoto, Y. Naka, S. Maeda, S. Tanaka, S. Morita, H. Aoyama, S. Mimotogi
    • Organizer
      27th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Hilton Fukuoka Sea Hawk, Fukuoka, Japan
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] ブロックコポリマーの誘導自己組織化に関するプロセ スと材料の最適化2014

    • Author(s)
      吉元 健治、深渡瀬 健
    • Organizer
      高分子討論会
    • Place of Presentation
      長崎大学(長崎)
    • Year and Date
      2014-09-24 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Computational approach to DSA process and materials optimization2014

    • Author(s)
      Kenji Yoshimoto
    • Organizer
      Next Generation Lithography Workshop
    • Place of Presentation
      Tokyo Institute of Technology, Tokyo, Japan
    • Year and Date
      2014-07-17 – 2014-07-18
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Application of Simplified Model to DSA Process Optimizations2014

    • Author(s)
      Kenji Yoshimoto, Takashi Taniguchi, Ken Fukawatase, Yoshihiro Hori
    • Organizer
      The 31st International Conference of Photopolymer Science and Technology
    • Place of Presentation
      Chiba University, Chiba, Japan
    • Year and Date
      2014-07-08 – 2014-07-11
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] DFM for defect-free DSA hole shrink process2014

    • Author(s)
      Ken Fukawatase, Kenji Yoshimoto, Masahiro Ohshima, Yoshihiro Naka, Shimon Maeda, Satoshi Tanaka, Seiji Morita, Hisako Aoyama, Shoji Mimotogi
    • Organizer
      SPIE Advanced Lithography Meeting
    • Place of Presentation
      San Jose, California, USA
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Multiscale DSA simulations for efficient hotspot analysis2014

    • Author(s)
      Yoshihiro Hori, Kenji Yoshimoto, Takashi Taniguchi, Masahiro Ohshima
    • Organizer
      SPIE Advanced Lithography Meeting
    • Place of Presentation
      San Jose, California, USA
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Large-Scale Dynamic Simulations of DSA Defects2013

    • Author(s)
      Kenji Yoshimoto, Takashi Taniguchi
    • Organizer
      Next Generation Lithography Workshop
    • Place of Presentation
      東工大蔵前会館(東京)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 誘導自己組織化によるブロックコポリマーの半導体製造工程への応用2013

    • Author(s)
      吉元健治
    • Organizer
      化学工学会 第45回秋季大会
    • Place of Presentation
      岡山大学津島キャンパス(岡山)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Multiscale DSA simulations for efficient hotspot analysis2013

    • Author(s)
      Kenji Yoshimoto, Ken Fukawatase, Yoshihiro Hori, Takashi Taniguchi
    • Organizer
      International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      ロイトン札幌(北海道)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Remarks] 京都大学大学院工学研究科化学工学専攻 材料プロセス工学研究室

    • URL

      http://www.cheme.kyoto-u.ac.jp/6koza

    • Related Report
      2014 Annual Research Report

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Published: 2014-07-25   Modified: 2019-07-29  

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