Development of an innovative atmospheric-pressure CVD method for the synthesis of graphene films

• Project/Area Number: 25800309
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Plasma science
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: KIM JAEHO 独立行政法人産業技術総合研究所, 電子光技術研究部門, 主任研究員 (30376595)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: グラフェン / ナノカーボン材料 / 大気圧プラズマ / プラズマCVD / マイクロ波プラズマ / カーボンナノ材料 / 透明導電膜

Outline of Final Research Achievements

The technology for the production of a large-scale atmospheric pressure plasma jet is realized using microstrip line and an array configuration. The developed plasma jet provides a low-temperature plasma with high uniformity even at atmospheric pressure and has advanced discharge characteristics as a plasma source for CVD applications. Also, the high-pressure CVD system for the synthesis of graphene films was developed using the plasma jet.

Research Products

• [Journal Article] Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials (2015)
  • Author(s): Jaeho Kim, Hajime Sakakita, Hiroyuki Osaki, Makoto Katsurai
  • Journal Title: JAPANESE JOURNAL OF APPLIED PHYSICS 54 Volume: - Issue: 1S Pages: 1-4
  • DOI: 10.7567/jjap.54.01aa02
  • NAID: 210000144719
  • Peer Reviewed / Open Access
• [Journal Article] Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials (2014)
  • Author(s): 金載浩，榊田創，大崎博之，桂井誠
  • Journal Title: Japanese of Journal Applied Physics Volume: 印刷中
  • Peer Reviewed
• [Presentation] Optical emission spectroscopy of atmospheric-pressure microwave-excited plasma jets for materials processing (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: 第24回日本MRS年次大会
  • Place of Presentation: 横浜
  • Year and Date: 2014-12-11
• [Presentation] Development of a large-area atmospheric-pressure plasma CVD system (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: Plasma Conference 2014
  • Place of Presentation: 新潟
  • Year and Date: 2014-11-20
• [Presentation] Optical diagnostics of atmospheric pressure microwave-excited plasma jets (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: International Congress on Plasma Physics 2014
  • Place of Presentation: Lisbon, Portugal
  • Year and Date: 2014-09-19
• [Presentation] 吹き出し形大気圧マイクロ波プラズマにおける分光測定 (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 大阪
  • Year and Date: 2014-09-10
• [Presentation] A widely-blowing microwave-excited plasma for atmospheric pressure chemical vapor deposition of carbon nanomaterials (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: IUMRS-ICA2014
  • Place of Presentation: 福岡
  • Year and Date: 2014-08-28
• [Presentation] Advanced microwave-excited plasma for materials processing and medical applidcations (2014)
  • Author(s): 金載浩
  • Organizer: The 4th International Symposium for Plasma Biosciences
  • Place of Presentation: Sokcho, Korea
  • Year and Date: 2014-08-19
  • Invited
• [Presentation] Advanced microwave plasma CVD processes for the synthesis of nanocrystalline diamond and graphene films (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: 7th International Conference on Advanced Materials and Development & Performance
  • Place of Presentation: Busan, Korea
  • Year and Date: 2014-07-18
  • Invited
• [Presentation] 大気圧マイクロ波プラズマによるカーボンナノ材料の合成 (2014)
  • Author(s): 金載浩、榊田創
  • Organizer: 酸化グラフェン研究会
  • Place of Presentation: 熊本
  • Year and Date: 2014-06-24
• [Presentation] Microwave plasma CVD technologies for the synthesis of nanocrystalline diamond and graphene films (2014)
  • Author(s): Jaeho Kim
  • Organizer: The 9th EU-Japan Joint Symposium on Plasma Processing (JSPP2014)
  • Place of Presentation: Slovenia
  • Invited
• [Presentation] Microwave-excited atmospheric pressure plasma jet with a wide aperture for carbon nanomaterials depositions (2014)
  • Author(s): Jaeho Kim, Hajime Sakakita
  • Organizer: ICRP-8/SPP-31
  • Place of Presentation: 福岡
• [Presentation] 21 世紀グラフェン産業を支えるプラズマプロセスの現状と展望(シンポジウムの企画趣旨） (2014)
  • Author(s): 金載浩
  • Organizer: 応用物理学会春季学術講演会
  • Place of Presentation: 相模原市
  • Invited
• [Presentation] Atmospheric pressure CVD technology for the synthesis of carbon thin materials using a microwave plasma (2013)
  • Author(s): Jaeho Kim, Hajime Sakakita
  • Organizer: Joint Symposium on Plasma and Electrostatic Technologies for Environmental Applications & 2nd Japan-Korea WG Meeting for Plasma Application
  • Place of Presentation: 下呂
• [Presentation] "Microwave plasma jets for the synthesis of carbon materials at atmosheric pressure (2013)
  • Author(s): Jaeho Kim
  • Organizer: 5th International Workshop on Plasma Scientech for All Something (PLASAS)
  • Place of Presentation: 東京
  • Invited
• [Presentation] マイクロストリップ線路を用いた広い幅のマイクロ波励起大気圧プラズマジェット (2013)
  • Author(s): 金載浩、榊田創
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 名古屋
• [Presentation] 大面積・低温カーボンナノ材料合成用大気圧マイクロ波プラズマCVD技術 (2013)
  • Author(s): 金載浩、榊田創
  • Organizer: エネルギー技術シンポジウム
  • Place of Presentation: 東京
• [Presentation] Large-area atmospheric pressure plasma CVD technology for carbon nanomaterials synthesis using microwave powers (2013)
  • Author(s): Jaeho Kim, Hajime Sakakita
  • Organizer: 第23回日本MRS年次大会・国際シンポジウム
  • Place of Presentation: 横浜
• [Patent(Industrial Property Rights)] マイクロ波プラズマ処理装置 (2015)
  • Inventor(s): 金載浩、榊田創
  • Industrial Property Rights Holder: 金載浩、榊田創
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2015-003867
  • Filing Date: 2015-02-27
• [Patent(Industrial Property Rights)] マイクロ波プラズマ処理装置 (2014)
  • Inventor(s): 金載浩、榊田創
  • Industrial Property Rights Holder: 金載浩、榊田創
  • Industrial Property Rights Type: 特許
  • Filing Date: 2014-08-10
  • Overseas