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Defect analysis in p- Diamond Layer of Diamond Power Device

Research Project

Project/Area Number 25820128
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Kato Yukako  国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクス研究センター, 主任研究員 (90509837)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywordsダイヤモンド / パワーデバイス / 転位 / ショットキーバリアダイオード / X線トポグラフィー / X線トポグラフィ / ラマン顕微鏡 / 複屈折顕微鏡
Outline of Final Research Achievements

For development of high-performance diamond power device, I study about the dislocations in semiconducting diamond layer of Schottky barrier diode by using x-ray topography. Focused device performance is breakdown voltage characteristics. For the estimate the distribution of dislocations in the area of the each Schottky electrode, dislocations in semiconducting diamond layer were estimated by using X-ray topography. From experimental data, any killer dislocation was not found. However, if dislocations work as several type of resistors of power device, it is assumed that edge dislocation and unknown defect disturb the device performance.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • 2013 Research-status Report
  • Research Products

    (17 results)

All 2016 2015 2014 2013 Other

All Journal Article (7 results) (of which Peer Reviewed: 6 results,  Acknowledgement Compliant: 2 results,  Open Access: 1 results) Presentation (9 results) Remarks (1 results)

  • [Journal Article] X-ray topographic study of defect in p- diamond layer of Schottky barrier diode2015

    • Author(s)
      Yukako KATO, Hitoshi UMEZAWA, Shin-ichi SHIKATA
    • Journal Title

      Diamond and Related Materials

      Volume: 57 Pages: 22-27

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] X-ray topographic study of defect in p− diamond layer of Schottky barrier diode2015

    • Author(s)
      Yukako Kato, Hitoshi Umezawa, Shin-ichi Shikata
    • Journal Title

      Diamond related mateirlas

      Volume: in press Pages: 1-6

    • DOI

      10.1016/j.diamond.2015.03.021

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] X-ray Topographic Study of a Homoepitaxial Diamond Layer on an Ultraviolet-irradiated Precision Polished Substrate2014

    • Author(s)
      Yukako Kato, Hitoshi Umezawa, Shin-ichi Shikata
    • Journal Title

      acta physica polonica A

      Volume: 125 Issue: 4 Pages: 969-971

    • DOI

      10.12693/aphyspola.125.969

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] A 2-in. mosaic wafer made of a single-crystal diamond2014

    • Author(s)
      H. Yamada, A. Chayahara, Y. Mokuno, Y. Kato and S. Shikata
    • Journal Title

      Applied Physics Letters

      Volume: 104 Issue: 10 Pages: 102110-102110

    • DOI

      10.1063/1.4868720

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of an Ultraflat Substrate on the Epitaxial Growth of Chemical-Vapor-Deposited Diamond2013

    • Author(s)
      Yukako Kato, Hitoshi Umezawa, Shin-ichi Shikata
    • Journal Title

      Photon Factory Activity Report 2012 Part A

      Volume: 30 Pages: 66-67

    • NAID

      10031152708

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] X線トポグラフィを用いたダイヤモンドの欠陥評価2013

    • Author(s)
      加藤有香子
    • Journal Title

      NEW DIAMOND

      Volume: 29 Pages: 23-24

    • Related Report
      2013 Research-status Report
  • [Journal Article] Leakage current analysis of diamond Schottky barrier diodes by defect imaging2013

    • Author(s)
      H. Umezawa, N. Tatsumi, Y. Kato and S. Shikata
    • Journal Title

      Diamond and Related Materials

      Volume: 40 Pages: 56-59

    • DOI

      10.1016/j.diamond.2013.09.011

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] ダイヤモンドショットキーバリアダイオードのデバイス動作と結晶品質2016

    • Author(s)
      加藤 有香子、梅澤 仁
    • Organizer
      電子デバイス界面テクノロジー研究会
    • Place of Presentation
      東レ総合研修センター(三島市)
    • Year and Date
      2016-01-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] X-ray Topographic Study of Defect in p- diamond layer of Schottky barrier diode2014

    • Author(s)
      Yukako Kato, Hitoshi Umezawa, Shin-ichi Shikata
    • Organizer
      International conference on diamond and carbon materials
    • Place of Presentation
      マドリード. スペイン
    • Year and Date
      2014-09-07
    • Related Report
      2014 Research-status Report
  • [Presentation] PF BL-20B X線トポグラフィービームラインの現状2014

    • Author(s)
      山口 博隆、志村考功、水野薫、岡本博之、加藤有香子、平野馨一、杉山弘
    • Organizer
      第27回日本放射光学会放射光科学合同シンポジウム
    • Place of Presentation
      広島国際会議場(広島)
    • Related Report
      2013 Research-status Report
  • [Presentation] ショットキーバリアダイオードのp-層の欠陥評価2013

    • Author(s)
      加藤有香子、梅澤仁、鹿田真一
    • Organizer
      第27回ダイヤモンドシンポジウム
    • Place of Presentation
      日本工業大学(埼玉県)
    • Related Report
      2013 Research-status Report
  • [Presentation] ダイヤモンドパワーデバイス:ドリフト層中の転位密度とリーク電流特性2013

    • Author(s)
      加藤有香子、梅澤仁、鹿田真一
    • Organizer
      第22回SiC講演会
    • Place of Presentation
      埼玉会館(埼玉県)
    • Related Report
      2013 Research-status Report
  • [Presentation] X-ray Topographic Study of Homoepitaxial Diamond Layer2013

    • Author(s)
      加藤有香子、梅澤仁、鹿田真一
    • Organizer
      15th International Conference on Defects Recognition, Imaging and Physics in Semiconductors
    • Place of Presentation
      Hotel Sound Garden (Warsaw, Poland)
    • Related Report
      2013 Research-status Report
  • [Presentation] Diamond based power device

    • Author(s)
      鹿田真一、梅澤仁、加藤有香子、山田英明、坪内信輝、杢野由明、茶谷原昭義、舟木剛
    • Organizer
      The International Conference on Silicon Carbide and Related Materials
    • Place of Presentation
      Phoenix Seagaia Resort(Miyazaki)
    • Related Report
      2013 Research-status Report
  • [Presentation] パワーデバイス応用を目指したウェハ・デバイスの開発課題

    • Author(s)
      鹿田真一、梅澤仁、加藤有香子、山田英明、坪内信輝、杢野由明、茶谷原昭義、舟木剛
    • Organizer
      第27回ダイヤモンドシンポジウム
    • Place of Presentation
      日本工業大学(埼玉県)
    • Related Report
      2013 Research-status Report
  • [Presentation] Diamond power devices for high temperature and high current applications

    • Author(s)
      梅澤仁、加藤有香子、鹿田真一
    • Organizer
      JSAP-MRS Joint Symposia
    • Place of Presentation
      Doshisha University(Kyoto)
    • Related Report
      2013 Research-status Report
  • [Remarks] 産総研ダイヤモンドデバイス化グループ研究成果

    • URL

      https://unit.aist.go.jp/ubiqen/gdr/result01.html

    • Related Report
      2013 Research-status Report

URL: 

Published: 2014-07-25   Modified: 2019-07-29  

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