Low-voltage electrostatic micro three-dimantional scanner for endoscope
| Project/Area Number |
25820132
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Electron device/Electronic equipment
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
SASAKI Takashi 東北大学, 工学(系)研究科(研究院), 助教 (60633394)
|
|---|
| Project Period (FY) |
2013-04-01 – 2016-03-31
|
| Project Status |
Completed (Fiscal Year 2015)
|
| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
|
|---|
| Keywords | MEMS / 焦点可変ミラー / スキャナ / マイクロミラー / 共振 |
|---|
| Outline of Final Research Achievements |
We have developed a fabrication process of low-voltage micro three-dimensional scanner for endoscope, and low-voltage actuation technology for varifocal mirror, and image construction system. We have studied a resonant varifocal mirror. We successfully obtained 150-times displacement amplification of varifocal mirror. Furthermore, by using the silicon-on-insulator wafer bonding technology, we successfully developed and conformed the actuation of the device with lateral and axial laser scanning function. The important technology was developed for obtaining the high precision living body measurement system.
|
Report
(4 results)
Research Products
(19 results)
