| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Outline of Final Research Achievements |
We have developed a fabrication process of low-voltage micro three-dimensional scanner for endoscope, and low-voltage actuation technology for varifocal mirror, and image construction system. We have studied a resonant varifocal mirror. We successfully obtained 150-times displacement amplification of varifocal mirror. Furthermore, by using the silicon-on-insulator wafer bonding technology, we successfully developed and conformed the actuation of the device with lateral and axial laser scanning function. The important technology was developed for obtaining the high precision living body measurement system.
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