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Improvement of piezoelectric property of PZT thin films for MEMS by wakeup

Research Project

Project/Area Number 25820339
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Inorganic materials/Physical properties
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

KOBAYASHI Takeshi  独立行政法人産業技術総合研究所, 集積マイクロシステム研究センター, 主任研究員 (20415681)

Research Collaborator FUNAKUBO Hiroshi  東京工業大学, 総合理工学研究科, 教授
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords圧電 / 薄膜 / ポーリング / PZT / MEMS / チタン酸ジルコン酸鉛 / 圧電MEMS / ゾルゲル法
Outline of Final Research Achievements

We have investigated the influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin films. 1.9-μm-thick PZT thin films were deposited by sol-gel method and fabricated into microelectromechanical systems (MEMS) based piezoelectric microcantilevers. 1 kHz of unipolar or bipolar triangle pulse wave between 30-100 V was applied to the PZT thin films. The effective piezoelectric constant d31, under small signal actuation at 1-3 Vpp, was estimated from the tip displacement of the piezoelectric microcantilevers. The highest piezoelectric constant |d31| as high as 105 pm/V has been obtained by downward unipolar pulse poling at 100 V.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (18 results)

All 2015 2014 2013 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (9 results) (of which Invited: 4 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Impact of pulse poling on static and dynamic ferroelastic-domain contributions in tetragonal Pb(Ti, Zr2014

    • Author(s)
      中島 光雅、和田 亜由美、山田 智明、江原 祥隆、小林 健、舟窪 浩
    • Journal Title

      JOURNAL OF APPLIED PHYSICS

      Volume: 116 Issue: 19 Pages: 194102-194102

    • DOI

      10.1063/1.4898321

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films2014

    • Author(s)
      小林 健、鈴木 靖弘、牧本 なつみ、舟窪 浩、前田 龍太郎
    • Journal Title

      AIP ADVANCES

      Volume: 4 Issue: 11 Pages: 117116-117116

    • DOI

      10.1063/1.4901912

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties2013

    • Author(s)
      Takeshi Kobayashi, Natsumi Makimoto, Yasuhiro Suzuki, Hiroshi Funakubo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 9S1 Pages: 09KA01-09KA01

    • DOI

      10.7567/jjap.52.09ka01

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers2013

    • Author(s)
      Takeshi Kobayashi, Shoji Oyama, Natsumi Makimoto, Hironao Okada, Toshihiro Itoh, Rryutaro Maeda
    • Journal Title

      SENSORS AND ACTUATORS A-PHYSICAL

      Volume: 198 Pages: 87-90

    • DOI

      10.1016/j.sna.2013.04.016

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Piezoelectric MEMS switch to activate2013

    • Author(s)
      Hirofumi Nogami, Takeshi Kobayashi, Hironao Okada, Natsumi Makimoto, Rryutaro Maeda, Toshihiro Itoh
    • Journal Title

      Smart Materials and Structures

      Volume: 22 Issue: 9 Pages: 095001-095001

    • DOI

      10.1088/0964-1726/22/9/095001

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch2013

    • Author(s)
      Yutaka Tomimatsu, Hidetoshi Takahashi, Takeshi Kobayashi, Kiyoshi Matsumoto, Isao Shimoyama, Toshihiro Itoh, Ryutaro Maeda
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 23 Issue: 12 Pages: 125023-125023

    • DOI

      10.1088/0960-1317/23/12/125023

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] 強誘電体薄膜の圧電MEMSへの応用2015

    • Author(s)
      小林 健、牧本 なつみ、岡田 浩尚、高松 誠一、鈴木 靖弘、伊藤 寿浩、前田龍太郎
    • Organizer
      第62回応用物理学会学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] PULSE POLING WITHIN 1 SECOND ENHANCE THE PIEZOELECTRIC PROPERTY OF PZT THIN FILMS2015

    • Author(s)
      小林 健、鈴木 靖弘、牧本 なつみ、舟窪 浩、前田 龍太郎
    • Organizer
      The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015)
    • Place of Presentation
      ポルトガル
    • Year and Date
      2015-01-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 圧電MEMS デバイス上に集積化したPZT 薄膜の圧電特性2014

    • Author(s)
      小林 健、牧本 なつみ、鈴木 靖弘、舟窪 浩、伊藤 寿浩、前田 龍太郎
    • Organizer
      日本セラミックス協会第27回秋季シンポジウム
    • Place of Presentation
      鹿児島大学
    • Year and Date
      2014-09-09
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Comparison of output voltage and power generated from tetragonal and MPB composition PZT thin films integrated on piezoelectric microcantilevers with proof mass2014

    • Author(s)
      小林 健、鈴木 靖弘、牧本 なつみ、伊藤 寿浩、前田 龍太郎、舟窪 浩
    • Organizer
      13th International Conference on Modern Materials and Technologies
    • Place of Presentation
      イタリア
    • Year and Date
      2014-06-12
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] ゾルゲル法PZT薄膜を用いた圧電MEMSデバイスの開発

    • Author(s)
      小林 健
    • Organizer
      第42回EMシンポジウム
    • Place of Presentation
      東京理科大学森戸記念館(東京都)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] ENHANCED PERFOMANCE OF SENSOR/ACTUATOR INTEGRATED PIEZOELECTRIC

    • Author(s)
      Takeshi Kobayashi, Natsumi Makimoto, Hiroshi Funakubo, Takahiro Oikawa, Ayumi Wada, Toshihiro Itoh, Ryutaro Maeda
    • Organizer
      Transducers 2013
    • Place of Presentation
      バルセロナ国際会議場(バルセロナ、スペイン)
    • Related Report
      2013 Research-status Report
  • [Presentation] PZT薄膜の最適化による自己検知圧電MEMSカンチレバーの出力電圧向上

    • Author(s)
      小林 健、小山 昌二、牧本 なつみ、舟窪 浩、前田 龍太郎
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      立命館大学(京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] テトラ組成PZT 薄膜の圧電特性にwake-up 処理電圧が与える影響

    • Author(s)
      小林 健、牧本 なつみ、鈴木 靖弘、舟窪 浩、和田 亜由美、及川 貴弘、前田 龍太郎
    • Organizer
      第30回強誘電体応用会議
    • Place of Presentation
      コープイン京都(京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] テトラ組成PZT薄膜を用いた圧電MEMS振動型センサの特性向上

    • Author(s)
      鈴木 靖弘、牧本 なつみ、舟窪 浩、前田 龍太郎、小林 健
    • Organizer
      第5回集積化MEMSシンポジウム
    • Place of Presentation
      仙台国際会議場(仙台)
    • Related Report
      2013 Research-status Report
  • [Patent(Industrial Property Rights)] センサ装置及びその製造方法2014

    • Inventor(s)
      小林健(40)、高松誠一(50)、伊藤寿浩(10)
    • Industrial Property Rights Holder
      小林健(40)、高松誠一(50)、伊藤寿浩(10)
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-09-01
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 電子デバイス及びその製造方法2014

    • Inventor(s)
      小林健(80)、伊藤寿浩(20)
    • Industrial Property Rights Holder
      小林健(80)、伊藤寿浩(20)
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-08-11
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 圧電MEMSデバイスおよびその製造方法2014

    • Inventor(s)
      小林健、鈴木、牧本、前田、伊藤、舟窪
    • Industrial Property Rights Holder
      小林健、鈴木、牧本、前田、伊藤、舟窪
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-033068
    • Filing Date
      2014-02-24
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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