Fabrication of Diamond-Like Carbon Molecular Sieve Membrane via Plasma-Enhanced CVD

• Project/Area Number: 25820382
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Properties in chemical engineering process/Transfer operation/Unit operation
• Research Institution: Hiroshima University
• Principal Investigator: NAGASAWA Hiroki 広島大学, 工学(系)研究科(研究院), 特任助教 (30633937)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: プラズマ化学気相蒸着法 / ダイヤモンドライクカーボン / 分子ふるい膜

Outline of Final Research Achievements

Diamond-like carbon-based molecular sieve membranes were successfully synthesized on porous TiO2 and SiO2-ZrO2 substrates via a plasma-enhanced chemical vapor deposition (PECVD) at room temperature. The membranes exhibited high permeselectivity for H2/N2 (28.8), H2/CF4 (619), and H2/SF6 (1030) with an excellent thermal stability. The results showed that PECVD is promising for the preparation of DLC molecular sieve membranes for gas separation.

Research Products

• [Presentation] Plasma-enhanced CVD-derived amorphous carbon membranes and their permeation characteristics (2015)
  • Author(s): Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka, Tishinori Tsuru
  • Organizer: AMS9
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 2015-07-19 – 2015-07-21
• [Presentation] Preparation of a-C molecular sieve membranes via Plasma-Enhanced CVD (2014)
  • Author(s): Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka, Tishinori Tsuru
  • Organizer: AIChE annual meeting
  • Place of Presentation: Atlanta, GA, USA
  • Year and Date: 2014-11-16 – 2014-11-20
• [Presentation] プラズマCVDアモルファスカーボン膜の分子ふるい特性 (2014)
  • Author(s): 長澤 寛規，金指 正言，吉岡 朋久，都留 稔了
  • Organizer: 化学工学会 第46回 秋季大会
  • Place of Presentation: 九州大学，福岡
  • Year and Date: 2014-09-17 – 2014-09-19
• [Presentation] Plasma-Enhanced CVD-Derived Amorphous Carbon Membranes for Molecular Sieve Separation (2014)
  • Author(s): Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka, Tishinori Tsuru
  • Organizer: 10th International Congress on Membrane and Membrane Processes
  • Place of Presentation: Suzhou, China
  • Year and Date: 2014-07-20 – 2014-07-25
• [Presentation] Plasma-Enhanced CVD-Derived Amorphous Carbon Membranes for Molecular Sieve Separation (2014)
  • Author(s): Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka, Toshinori Tsuru
  • Organizer: he 10th International Congress on Membrane and Membrane Processes (ICOM2014)
  • Place of Presentation: Suzhou, China
• [Presentation] Preparation of Amorphous Carbon Membranes by Plasma-Enhanced Chemical Vapor Deposition and Their Gas Permeation Characteristics (2013)
  • Author(s): Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka, Toshinori Tsuru
  • Organizer: The 8th Conference of Aseanian Membrane Society (AMS8)
  • Place of Presentation: Xian, China
• [Presentation] ダイヤモンドライクカーボン膜のプラズマCVD製膜および透過特性評価 (2013)
  • Author(s): 長澤 寛規, 金指 正言, 吉岡 朋久, 都留 稔了
  • Organizer: 化学工学会 第45回秋季大会
  • Place of Presentation: 岡山大学，岡山