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Ultra low loss acoustic wave devices for future communication systems

Research Project

Project/Area Number 25870042
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Nano/Microsystems
Electron device/Electronic equipment
Research InstitutionTohoku University

Principal Investigator

HARA Motoaki  東北大学, 工学(系)研究科(研究院), 准教授 (00417966)

Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2013: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords圧電薄膜共振子 / 電極 / 薄膜
Outline of Final Research Achievements

A Thin Film Bulk Acoustic Resonator (FBAR) is a new class of acoustic devices fabricated on the substrate with thin film technologies. Ccharacteristics of the FBAR can be determined by the thickness or material of electrodes in comparison with bulk acoustic devices such as a quartz resonator. Conventionally, the FBAR is mainly applied to the wide band filter. So maximization of the coupling coefficient is a main issue in the FBAR design. Contrary, in this study, we newly focused on maximization of the Q factor for the application of the clock device with low phase noise.
To maximize the Q-factor, numerical program to calculate the resonance characteristic was originally developed based on the distributed constant equivalent circuit. Using this program, design parameters can be continuously tuned unlike conventional finite element method. Also, calculation time is much compressed, and calculation for various electrode material can be facilitated by combining with batch processing.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • Research Products

    (3 results)

All 2014 2013

All Presentation (3 results)

  • [Presentation] Q-enhancement with electrode materials in the FBAR for timing devices2014

    • Author(s)
      Motoaki Hara
    • Organizer
      IEEE International Ultrasonic Symposium 2014
    • Place of Presentation
      シカゴ、アメリカ合衆国
    • Year and Date
      2014-09-03 – 2014-09-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] INVESTIGATION OF DOMINANT FACTORS TO CONTROL C-AXIS TILT ANGLE OF ALN THIN FILMS FOR EFFICIENT ENERGY HARVESTING2014

    • Author(s)
      Q. Wang, H. Oguchi, M. Hara, H. Kuwano
    • Organizer
      IEEE International conference on micro electromechanical systems
    • Place of Presentation
      サンフランシスコ、USA
    • Related Report
      2013 Research-status Report
  • [Presentation] Oscillator-based strain gauges employing surface acoustic wave resonators for wireless sensor network2013

    • Author(s)
      T. Konno, M. Hara, H. Kuwano
    • Organizer
      IEEE International Ultrasonic Symposium 2013
    • Place of Presentation
      プラハ、チェコ共和国
    • Related Report
      2013 Research-status Report

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Published: 2014-07-25   Modified: 2019-07-29  

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