optical profile measurement system with the high horizontal resolution by the collecting laser irradiation

• Project/Area Number: 25870216
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies; Measurement engineering
• Research Institution: Meiji University (2015); Tokyo Institute of Technology (2013-2014)
• Principal Investigator: Sawano Hiroshi 明治大学, 理工学部, 講師 (40514295)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: 形状計測 / 光プローブ / 水平分解能 / 集中照射 / 非点収差法 / 光線追跡法 / 計測工学 / レーザ / 光学シミュレーション

Outline of Final Research Achievements

In this study, in order to realize the profile measurement by the optical probe with a high horizontal resolution, an optical profile measurement system by the collecting laser irradiation. Results of the optical simulation showed that the proposed optical probe had higher horizontal resolution compared with the conventional optical probe. In addition, experimental results confirmed that the profile calculation method determined from the simulation results can measure the specimen shape. From these results, it was shown that the proposed optical probe by the collecting laser irradiation is effective as a method of improving the horizontal resolution of optical probe.