Photon-stimulated desorption surface spectroscopy by extreme ultraviolet emissions from a laser-produced plasma

• Project/Area Number: 25870565
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment; Optical engineering, Photon science
• Research Institution: University of Miyazaki
• Principal Investigator: Kaku Masanori 宮崎大学, 工学部, 助教 (10425621)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 光プロセッシング / 微細プロセス / 光脱離 / 表面分析 / 光プロセシング / 微細プロセス技術

Outline of Final Research Achievements

We have demonstrated the photon-stimulated surface spectroscopy using broadband vacuum ultraviolet (VUV) emissions from a laser-produced plasma, in which adsorbed atoms or molecules on material surfaces were to be desorbed and dissociated as a result of absorption of the wavelength-selected VUV photons. Desorbed and dissociated atoms or molecules were then detected by a mass spectrometer. Mass spectra of polyethylene and polyvinyl chloride samples were obtained as a function of the irradiation wavelength. We have found sufficient characteristic differences of the mass spectra in the irradiation wavelength shorter than 200 nm in each sample. The desorption and dissociation of atoms or molecules from material surfaces depended on bond energy or molecular structure.

Research Products

• [Journal Article] Surface analysis by photo-stimulated desorption using tunable VUV radiation (2015)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Shoichi Kubodera, and Wataru Sasaki
  • Journal Title: Applied Physics B Volume: 119 Issue: 3 Pages: 427-433
  • DOI: 10.1007/s00340-015-6093-1
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Development of ultrashort pulsed VUV laser and its applications (2014)
  • Author(s): Masahito Katto, Masanori Kaku, Atsushi Yokotani, Kenzo Miyazaki, Noriaki Miyanaga, Shoichi Kubodera
  • Journal Title: Journal of Laser Micro/Nanoengineering Volume: 9 Issue: 2 Pages: 108-112
  • DOI: 10.2961/jlmn.2014.02.0006
  • Peer Reviewed
• [Presentation] Photon-stimulated desorption surface spectroscopy of polymers by VUV emissions from a laser-produced plasma (2016)
  • Author(s): Masanori Kaku, Masahito Katto, Wataru Sasaki, and Shoichi Kubodera
  • Organizer: The 5th Advanced Lasers and Photon Sources (ALPS’16)
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2016-05-17
  • Int'l Joint Research
• [Presentation] 真空紫外光域における高強度レーザー光源の開発と応用 (2015)
  • Author(s): 甲藤正人，加来昌典，横谷篤至，窪寺昌一
  • Organizer: レーザー学会第483 回研究会「短波長量子ビーム発生と応用」
  • Place of Presentation: 広島大学
  • Year and Date: 2015-12-02
• [Presentation] Vacuum ultraviolet photon-stimulated desorption surface spectroscopy of polymers by using laser-produced plasma emissions (2015)
  • Author(s): Masanori Kaku, Masahito Katto, Atushi Yokotani, Wataru Sasaki and Shoichi Kubodera
  • Organizer: 31th European Conference on Surface Science
  • Place of Presentation: Centre de Convencions Internacional de Barcelona
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] Photon-stimulated desorption surface spectroscopy by VUV emissions from a laser-produced plasma (2015)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Wataru Sasaki, Shoichi Kubodera
  • Organizer: CLEO 2015
  • Place of Presentation: San Jose, CA, USA
  • Year and Date: 2015-05-10 – 2015-05-15
• [Presentation] Photon-stimulated desorption surface spectroscopy by VUV emissions from a laser-produced plasma (2015)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Wataru Sasaki, and Shoichi Kubodera
  • Organizer: Conference on Lasers and Electro-Optics (CLEO:2015)
  • Place of Presentation: San Jose Convention Center
  • Year and Date: 2015-05-10
  • Int'l Joint Research
• [Presentation] Photon-stimulated desorption surface spectroscopy system by using a laser-produced argon plasma (2015)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Wataru Sasaki, Shoichi Kubodera
  • Organizer: The 4th Advanced Lasers and Photon Sources (ALPS'15)
  • Place of Presentation: 神奈川県横浜市
  • Year and Date: 2015-04-22 – 2015-04-24
• [Presentation] Photon-stimulated desorption surface spectroscopy system by using a laser-produced argon plasma (2015)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Wataru Sasaki, and Shoichi Kubodera
  • Organizer: The 4th Advanced Lasers and Photon Sources (ALPS'15)
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2015-04-22
  • Int'l Joint Research
• [Presentation] 真空紫外光によって誘起される光脱離現象を利用した表面分析技術 (2014)
  • Author(s): 加来昌典，甲斐大智，甲藤正人，横谷篤至，窪寺昌一
  • Organizer: レーザー学会第471回研究会
  • Place of Presentation: 滋賀県守山市
  • Year and Date: 2014-12-11
• [Presentation] Surface analysis by photo-stimulated desorption using tunable VUV radiation (2014)
  • Author(s): Masanori Kaku, Daichi Kai, Masahito Katto, Atsushi Yokotani, Shoichi Kubodera, Wataru Sasaki
  • Organizer: 9th International Conference on Photo-Excited Processes and Applications
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2014-09-29 – 2014-10-03
• [Presentation] 真空紫外光によって誘起される光脱離現象を用いた表面分析技術に関する研究 (2014)
  • Author(s): 甲斐大智，加来昌典，窪寺昌一
  • Organizer: レーザー学会九州支部学生講演会
  • Place of Presentation: 鹿児島県指宿市
  • Year and Date: 2014-09-07
• [Presentation] Photon-stimulated desorption surface spectroscopy using vacuum ultraviolet emissions from a laser-produced-plasma (2014)
  • Author(s): Masanori Kaku, Daichi Kai, Shoichi Kubodera
  • Organizer: 30th European Conference on Surface Science (ECOSS30)
  • Place of Presentation: Antalya, Turkey
  • Year and Date: 2014-08-31 – 2014-09-05
• [Presentation] Vacuum ultraviolet surface desorption spectroscopy system (2014)
  • Author(s): Daichi Kai, Naoyuki Deshimaru, Masanori Kaku, Shoichi Kubodera
  • Organizer: The 5th Shanghai Tokyo Advanced Research Symposium (STARS5)
  • Place of Presentation: Miyazaki, Japan
  • Year and Date: 2014-05-21 – 2014-05-24
• [Presentation] 真空紫外光によって誘起される光脱離現象を用いた表面分析技術に関する研究 (2014)
  • Author(s): 甲斐 大智，加来 昌典，窪寺 昌一
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 青山学院大学相模原キャンパス
• [Presentation] 超短パルス真空紫外レーザーの開発 (2014)
  • Author(s): 加来昌典
  • Organizer: レーザー学会学術講演会第34回年次大会
  • Place of Presentation: 北九州国際会議場
  • Invited
• [Presentation] 真空紫外光によって誘起される光脱離現象を用いた表面分析技術に関する研究 (2013)
  • Author(s): 甲斐大智，加来昌典，窪寺昌一
  • Organizer: 応用物理学会九州支部学術講演会
  • Place of Presentation: 長崎大学文教キャンパス
• [Presentation] 高強度真空光源の開発とその応用
  • Author(s): 甲藤正人，大休寺匠，加来昌典，宮永憲明，横谷篤至，窪寺昌一
  • Organizer: レーザー学会第455回研究会「短波長量子ビーム発生と応用」
  • Place of Presentation: 日本原子力研究開発機構敦賀本部アトムプラザ
• [Presentation] 深紫外～極端紫外光源を活用した分析・計測技術の開発
  • Author(s): 亀山晃弘，加来昌典，甲藤正人，窪寺昌一，横谷篤至
  • Organizer: レーザー学会第449回研究会「レーザー応用」
  • Place of Presentation: 佐賀県武雄市