| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Outline of Final Research Achievements |
A hydrogen gas sensor based on an ultra-thin palladium film was fabricated using a fibre-textured aluminium nitride buffer layer. Since the film was prepared using the continuous sputter deposition, the local-epitaxial growth at the interface is enhanced and the film is highly (111) textured. The sensor works at room temperature and exhibits high resistance against hydrogen absorption/desorption processes. The in-situ X-ray diffraction measurement during hydrogen absorption revealed the large expansion along the film normal direction and the relatively small expansion along the in-plane direction. This selective expansion suppresses both the crystallinity degradation of the palladium lattice and the formation of palladium hydride, resulting in the enhanced sensing properties.
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