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Emergence of giant piezoelectric properties in non-perovskite zirconia-based ferroelectrics

Research Project

Project/Area Number 25889024
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHIMIZU Takao  東京工業大学, 元素戦略研究センター, 特任助教 (60707587)

Project Period (FY) 2013-08-30 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywords圧電 / 蛍石型酸化物 / 強弾性 / 強誘電性 / 強誘電体 / 蛍石型構造 / エピタキシャル薄膜 / 強弾性体 / 薄膜 / エピタキシャル成長
Outline of Final Research Achievements

The discovery of ferroelectricity in fluorite oxides materials indicates possibility to realize the giant electro-mechanism in the non-perovskite ferroelectric materials with high CMOS compatibility. As a results, it is found that generated phases can be changed by changing the crystallization condition. This means that the formation energy of the orthorhombic phase, which is considered to exhibit ferroelectricity, has similar value to that of the monoclinic and tetragonal phases. In addition, the comparison of the film crystalized under various atmosphere and measurement at low temperature were carried. The results imply that the ferroelectricity is not mediated by the mobile defect, such as oxygen vacancy. This means that the piezoelectricity can be expected because the ferroelectricity has structural origin.

Report

(3 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • Research Products

    (12 results)

All 2015 2014

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 2 results) Presentation (10 results)

  • [Journal Article] Contribution of oxygen vacancies to the ferroelectric behavior of Hf0.5Zr0.5O2 thin films2015

    • Author(s)
      Takao Shimizu, Tatsuhiko Yokouchi, Takahiro Oikawa, Takahisa Shiraishi, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Alexei Gruverman, and Hiroshi Funakubo
    • Journal Title

      Applied Physics Letters

      Volume: 106 Issue: 11

    • DOI

      10.1063/1.4915336

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2 thin film on Ir electrode2014

    • Author(s)
      Takao Shimizu, Tatsuhiko Yokouchi, Takahisa Shiraish, Takahiro Oikawa, P. S. Sankara Rama Krishnan, and Hiroshi Funakubo
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 53 Issue: 9S Pages: 09PA04-09PA04

    • DOI

      10.7567/jjap.53.09pa04

    • NAID

      210000144473

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] HfO2基エピタキシャル薄膜の強誘電性2015

    • Author(s)
      清水荘雄、 片山きりは、舟窪浩
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス、平塚市
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] 斜方晶相を含むエピタキシャルHfO2基薄膜の結晶構造解析2015

    • Author(s)
      1154)片山きりは、清水荘雄、横内達彦、白石貴久、及川貴弘、木口賢紀、赤間章裕、今野豊彦、内田寛、舟窪浩
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス、平塚市
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] 斜方晶HfO2のエピタキシャル薄膜作製とその評価2015

    • Author(s)
      片山きりは、清水荘雄、横内達彦、白石貴久、及川貴弘、木口賢紀、赤間章裕、今野豊彦、内田寛、舟窪浩
    • Organizer
      第53回セラミックス基礎科学討論会
    • Place of Presentation
      京都テルサ、京都市
    • Year and Date
      2015-01-08 – 2015-01-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] 斜方晶構造を持つエピタキシャルHfO2系薄膜の作製と評価2014

    • Author(s)
      清水荘雄、舟窪浩
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス、札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] HfO2系材料における強誘電体2014

    • Author(s)
      清水荘雄、横内達彦、白石貴久、及川貴弘、木口賢紀、今野豊彦、舟窪浩
    • Organizer
      日本セラミックス協会第27回秋季シンポジウム
    • Place of Presentation
      鹿児島大学郡元キャンパス、鹿児島市
    • Year and Date
      2014-09-09 – 2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Pt 電極上に堆積した(Hf,Zr)O2 薄膜の強誘電特性2014

    • Author(s)
      清水荘雄, 横内達彦, 白石貴久, 及川貴弘, 舟窪 浩
    • Organizer
      第31回強誘電体応用会議
    • Place of Presentation
      コープイン京都、京都市
    • Year and Date
      2014-05-28 – 2014-05-31
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ferroelectric Property in HfO2-ZrO2 Film with Various Metal Electrodes2014

    • Author(s)
      T. Shimizu, T. Yokouchi, T. Oikawa, T. Shiraishi, T. Kiguchi, A. Akama, T.J. Konno, D.J. Kim, A. Gruverman, and H. Funakubo
    • Organizer
      2014 Joint IEEE International Symposium on the Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices, Workshop on Piezoresponse Force Microscopy
    • Place of Presentation
      Penn State University in State College, PA, USA
    • Year and Date
      2014-05-12 – 2014-05-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] HfO2 ベース新規誘電体薄膜の特性の評価2014

    • Author(s)
      横内達彦、清水荘雄、及川貴弘、白石貴 久、舟窪浩
    • Organizer
      第52回セラミックス基礎科学討論会
    • Place of Presentation
      ウインクあいち
    • Related Report
      2013 Annual Research Report
  • [Presentation] (Hf0.5Zr0.5)O2 薄膜の強誘電性評価2014

    • Author(s)
      横内 達彦、清水 荘雄、及川 貴弘、白石 貴久、木口賢紀 、赤間章裕、今野豊彦、Dong Jik Kim、Alexei Gruverman、舟窪 浩
    • Organizer
      第 61 回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ferroelectric property in HfO2-ZrO2 film with various metal electordes2014

    • Author(s)
      Takao Shimizu, Tatsuhiko Yokouchi, Takahiro Oikawa, Takahisa Shiraishi, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Dong Jik Kim, Alexei Gruverman and Hiroshi Funakubo
    • Organizer
      2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy
    • Place of Presentation
      The Pennsylvania State University
    • Related Report
      2013 Annual Research Report

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Published: 2013-09-12   Modified: 2019-07-29  

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