GaN基板向けスラリーレス高効率無歪加工プロセスの開発

• Project/Area Number: 25K00031
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: The University of Osaka
• Principal Investigator: 孫 栄硯 大阪大学, 大学院工学研究科, 助教 (50963451)
• Project Period (FY): 2025-02-28 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000); Fiscal Year 2027: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000); Fiscal Year 2026: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000); Fiscal Year 2025: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)