低エネルギー電子線と反応性エッチングガスの衝突によるエッチングシステムの開発

• Project/Area Number: 25K01137
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Tohoku Institute of Technology
• Principal Investigator: 下位 法弘 東北工業大学, 工学部, 教授 (40624002)
• Project Period (FY): 2025-04-01 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000); Fiscal Year 2027: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2026: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2025: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)