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Flexible magnetic MEMS devices using highly corrosion-resistant and high-strength FePt thick film magnets

Research Project

Project/Area Number 25K01143
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 18040:Machine elements and tribology-related
Basic Section 18030:Design engineering-related
Sections That Are Subject to Joint Review: Basic Section18030:Design engineering-related , Basic Section18040:Machine elements and tribology-related
Research InstitutionInstitute of Science Tokyo

Principal Investigator

進士 忠彦  東京科学大学, 総合研究院, 教授 (60272720)

Co-Investigator(Kenkyū-buntansha) 中野 正基  長崎大学, 総合生産科学研究科(工学系), 教授 (20274623)
Project Period (FY) 2025-04-01 – 2028-03-31
Project Status Granted (Fiscal Year 2025)
Budget Amount *help
¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000)
Fiscal Year 2027: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2026: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2025: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
KeywordsMEMS / 厚膜 / FePt / 磁気特性 / 強度
Outline of Research at the Start

ネオジム磁石に準ずる残留磁束密度を有するバルクのFePt磁石は,引張強度はバルクNdFeB磁石に比べ一桁上,ポリシリコンと同等,ヤング率はシリコンよりも数分の1と,強くかつ柔軟な材料である.磁石と構造材料の両方の優れた特性を有するFePt厚膜磁石を活用した新しい磁気MEMSデバイスを提案・設計・試作し,機能をデモンストレーションすることで,FePt厚膜磁石の磁気MEMS用材料としての可能性や有用性を示すことを目的とする.

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Published: 2025-04-17   Modified: 2025-06-20  

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