HfO2-ZrO2系中間膜における動的格子整合の機構解明と完全結晶薄膜素子への応用

• Project/Area Number: 25K01258
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21050:Electric and electronic materials-related
• Research Institution: The University of Tokyo
• Principal Investigator: 関 宗俊 東京大学, 大学院工学系研究科(工学部), 准教授 (40432439)
• Project Period (FY): 2025-04-01 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000); Fiscal Year 2027: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2026: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2025: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)