多数の光渦の同軸干渉に立脚した革新的極微細レーザー描画露光法の創出

• Project/Area Number: 25K01285
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: Nagaoka University of Technology
• Principal Investigator: 坂本 盛嗣 長岡技術科学大学, 工学研究科, 准教授 (60757300)
• Project Period (FY): 2025-04-01 – 2029-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000); Fiscal Year 2028: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000); Fiscal Year 2027: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000); Fiscal Year 2026: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2025: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)