データ駆動多次元顕微分光による原子層デバイスの寄生抵抗の解明と制御

• Project/Area Number: 25K01628
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 28030:Nanomaterials-related
• Research Institution: National Institute for Materials Science
• Principal Investigator: 永村 直佳 国立研究開発法人物質・材料研究機構, マテリアル基盤研究センター, 主任研究員 (40708799)
• Project Period (FY): 2025-04-01 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000); Fiscal Year 2027: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2026: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000); Fiscal Year 2025: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)