マイクロ波を用いた半導体デバイス材料の点欠陥焼鈍機構の解明

• Project/Area Number: 25K01677
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 30010:Crystal engineering-related
• Research Institution: University of Tsukuba
• Principal Investigator: 上殿 明良 筑波大学, 数理物質系, 教授 (20213374)
• Project Period (FY): 2025-04-01 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000); Fiscal Year 2027: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000); Fiscal Year 2026: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2025: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)