非線形光学フィルタリング共焦点プローブによる次世代ピコメートル級走査式形状計測

• Project/Area Number: 25K17517
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Tohoku University
• Principal Investigator: 佐藤 遼 東北大学, 工学研究科, 助教 (20993421)
• Project Period (FY): 2025-04-01 – 2028-03-31
• Project Status: Adopted (Fiscal Year 2025)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2027: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2026: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2025: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)