Precise control of nanoparticle deposition using plasma

• Project/Area Number: 26246036
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Plasma electronics
• Research Institution: Kyushu University
• Principal Investigator: Shiratani Masaharu 九州大学, システム情報科学研究院, 教授 (90206293)
• Co-Investigator(Kenkyū-buntansha): 古閑 一憲 九州大学, システム情報科学研究院, 教授 (90315127) ; 内田 儀一郎 大阪大学, 接合科学研究所, 准教授 (90422435) ; 鎌滝 晋礼 九州大学, システム情報科学研究院, 助教 (60582658)
• Project Period (FY): 2014-04-01 – 2019-03-31
• Project Status: Completed (Fiscal Year 2018)
• Budget Amount: ¥41,340,000 (Direct Cost: ¥31,800,000、Indirect Cost: ¥9,540,000); Fiscal Year 2018: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2017: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000); Fiscal Year 2016: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000); Fiscal Year 2015: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000); Fiscal Year 2014: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
• Keywords: プラズマ / ゆらぎ / ナノ粒子 / 電気・電子材料 / ３Dプリンティング / 電子・電気材料 / 第３世代太陽電池 / ３Ｄプリンティング

Outline of Final Research Achievements

To establish plasma nanoparticle printing technology, we have obtained the following results.
(1) The fluctuation of interaction between plasma and nanoparticles has been revealed. Controlling the fluctuation is a key to generate nanoparticle with narrow size dispersion. (2) Nanoparticle transport using gas flow has been discussed. Selective nanoparticle deposition can be realized by using gas flow. (3) Selective deposition of Si nanoparticles and higher order silane molecules has been succeeded. Deposition kinetics of higher-order silane and their influence on the film characteristics have been revealed. (4) Optical trapping of a fine particle in plasmas has been firstly succeeded. Ultra high sensitive measurement of plasma potential has been succeeded by observing the behavior of the trapped particles.

Academic Significance and Societal Importance of the Research Achievements

本研究の成果は、プラズマを用いたナノ粒子の生成から輸送、堆積までを精密に制御するために欠かせない学術基盤を構築するものであり、ナノ構造体作製のボトムアッププロセスの実現に資するものである。プラズマ分野としては、プラズマゆらぎに関する新しい計測・解析法を提供した。加えて、応用面においては、プラズマを用いた、次世代太陽電池やCO2メタン化などエネルギー・環境関連技術の発達に貢献する成果を得ている。

Research Products

• [Int'l Joint Research] Kiel University(ドイツ)
• [Int'l Joint Research] Pusan National University(韓国)
• [Int'l Joint Research] Chulalongkorn University(Thailand)
• [Int'l Joint Research] Pusan National University(韓国)
• [Journal Article] Effects of Gas Pressure on Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition (2019)
  • Author(s): Sung Hwa Hwang, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani
  • Journal Title: Plasma and Fusion Research Volume: -
  • NAID: 130007723652
  • Peer Reviewed
• [Journal Article] Dependence of CO2 Conversion to CH4 on the CO2 Flow Rate in a Helicon Discharge Plasma (2018)
  • Author(s): Susumu Toko, Ryu Katayama, Kaunori Koga, Edbertho Leal-Quiros, Masaharu Shiratani
  • Journal Title: Science of Advanced Materials Volume: 10 Issue: 5 Pages: 655-659
  • DOI: 10.1166/sam.2018.3141
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Cross-Correlation Analysis of Fluctuations of Interactions between Nanoparticles and Low Pressure Reactive Plasmas (2018)
  • Author(s): Zhou Ren、Mori Kento、Ohtomo Hiroshi、Yamashita Daisuke、Seo Hyun Woong、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Materials Science Forum Volume: 941 Pages: 2104-2108
  • DOI: 10.4028/www.scientific.net/msf.941.2104
  • Peer Reviewed
• [Journal Article] Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH4 plasma chemical vapor deposition (2017)
  • Author(s): S. Toko, Y. Torigoe, K. Keya, T. Kojima, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
  • Journal Title: Surface and Coating Technology Volume: 印刷中 Pages: 388-394
  • DOI: 10.1016/j.surfcoat.2017.01.034
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst (2017)
  • Author(s): Seo Hyunwoong、Gopi Chandu V.V.M.、Kim Hee-Je、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
  • Journal Title: Electrochimica Acta Volume: 249 Pages: 337-342
  • DOI: 10.1016/j.electacta.2017.08.030
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] 低温プラズマによるナノ粒子の合成と太陽電池への応用 (2017)
  • Author(s): 古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治
  • Journal Title: 信学技報 (IEICE Technical Report) Volume: 117 Pages: 5-9
• [Journal Article] 色素増感太陽電池のポリマー対向電極における触媒反応の活性化 (2017)
  • Author(s): 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Journal Title: 信学技報 (IEICE Technical Report) Volume: 117 Pages: 27-29
• [Journal Article] Synthesis of Nanoparticles Using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body (2017)
  • Author(s): Koga Kazunori、Seo Hyunwoong、Tanaka Akiyo、Itagaki Naho、Shiratani Masaharu
  • Journal Title: ECS Transactions Volume: 77 Issue: 3 Pages: 17-24
  • DOI: 10.1149/07703.0017ecst
  • Peer Reviewed
• [Journal Article] Catalytic Improvement on Counter Electrode of Dye-Sensitized Solar Cells Using Electrospun Pt Nano-Fibers (2016)
  • Author(s): H. Seo, M. Shiratani, K. Seneekatima, R. Pornprasertsuk
  • Journal Title: J. Nanosci. Nanotechnol. Volume: 16 Issue: 4 Pages: 3332-3337
  • DOI: 10.1166/jnn.2016.12294
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Improvement of Charge Transportation in Si Quantum Dot-Sensitized Solar Cells Using Vanadium Doped TiO2 (2016)
  • Author(s): H. Seo, D. Ichida, S. Hashimoto, N. Itagaki, K. Koga, M. Shiratani, S. H. Nam and J. H. Boo
  • Journal Title: J. Nanosci. Nanotechnol. Volume: 16 Issue: 5 Pages: 4875-4879
  • DOI: 10.1166/jnn.2016.12210
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Surface Modification of Polymer Counter Electrode for Low Cost Dye-sensitized Solar Cells (2016)
  • Author(s): H. Seo, M. K. Son, S. Hashimoto, T. Takasaki, N. Itagaki, K. Koga, M. Shiratani
  • Journal Title: Electrochimica Acta Volume: 210 Pages: 880-887
  • DOI: 10.1016/j.electacta.2016.06.020
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Fluctuation of Position and Energy of a Fine Particle in Plasma Nanofabrication (2016)
  • Author(s): M. Shiratani, M. Soejima, H. Seo, N. Itagaki, K. Koga
  • Journal Title: Materials Science Forum Volume: 879 Pages: 1772-1777
  • DOI: 10.4028/www.scientific.net/msf.879.1772
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Effects of Gas Flow Rate on Deposition Rate and Amount of Si Clusters Incorporated into a-Si:H Films (2015)
  • Author(s): S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
  • Journal Title: Jpn. J. Appl. Phys. Volume: 55 Issue: 1S Pages: 01AA19-01AA19
  • DOI: 10.7567/jjap.55.01aa19
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas (2015)
  • Author(s): T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas (2015)
  • Author(s): S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter (2015)
  • Author(s): R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Laser trapped single fine particle as a probe of plasma parameters (2015)
  • Author(s): D. Yamashita, M. Soejima, T. Ito, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Effects of electrode structure on characteristics of multi-hollow discharges (2015)
  • Author(s): Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Raman spectroscopy of PIN hydrogenated amorphous silicon solar cells (2015)
  • Author(s): K. Keya, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Journal Title: Proc. 68th GEC/9th ICRP/33rd SPP Volume: 60
  • Int'l Joint Research
• [Journal Article] Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability (2015)
  • Author(s): S. Toko, Y. Torigoe, W. Chen, D. Yamashita, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
  • Journal Title: Thin Solid Films Volume: 587 Pages: 126-131
  • DOI: 10.1016/j.tsf.2015.02.052
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Photovoltaic application of Si nanoparticles fabricated by multihollow plasma discharge CVD: Dye and Si co-sensitized solar cells (2015)
  • Author(s): H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani
  • Journal Title: Jpn. J. Appl. Phys. Volume: 54 Issue: 1S Pages: 01AD02-01AD02
  • DOI: 10.7567/jjap.54.01ad02
  • NAID: 210000144740
  • Peer Reviewed
• [Journal Article] Dust Hour Glass in a Capacitive RF Discharge (2014)
  • Author(s): S. Iwashita, E. Schungel, J. Schulze, P. Hartmann, Z. Donko, G. Uchida, K. Koga, M. Shiratani, U. Czarnetzki
  • Journal Title: IEEE Trans. Plasma Science Volume: 42 Issue: 10 Pages: 2672-2673
  • DOI: 10.1109/tps.2014.2343975
  • Peer Reviewed
• [Journal Article] Performance enhancement of dye and Si quantum dot hybrid nanostructured solar cell with TiO2 barrier (2014)
  • Author(s): H. Seo, D. Ichida, S. Hashimoto, G. Uchida, N. Itagaki, K. Koga, and M. Shiratani
  • Journal Title: Trans. Mateｒ. Res. Soc. Jpn. Volume: 39 Pages: 321-324
  • NAID: 130005004352
  • Peer Reviewed
• [Presentation] Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method (2019)
  • Author(s): S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
  • Organizer: 第66回応用物理学会春季学術講演会
• [Presentation] A deep insight of plasma-nanoparticle interaction (2018)
  • Author(s): Kazunori Koga, Kunihiro Kamataki, Naho Itagaki and Masaharu Shiratani
  • Organizer: 19th International Congress on Plasma Physics
  • Int'l Joint Research / Invited
• [Presentation] Effect of gas flow rate on plasma-catalytic methanation reaction (2018)
  • Author(s): A. Yamamoto, S. Tanida, S. Toko, K. Koga, M. Shiratani
  • Organizer: 29th Symposium on Plasma Physics and Technology (SPPT)
  • Int'l Joint Research
• [Presentation] Methanation of CO2 using low temperature and catalyst (2018)
  • Author(s): A. Yamamoto, S. Tanida, S. Toko, K. Koga, M. Shiratani
  • Organizer: Workshop "Plasma surface interaction for technological applications"
  • Int'l Joint Research
• [Presentation] Cross correlation analysis of fluctuation of interactions between nanoparticles and low pressure reactive plasmas (2018)
  • Author(s): M. Shiratani, K. Koga
  • Organizer: 10th International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC 2018)
  • Int'l Joint Research / Invited
• [Presentation] Density modulation of nanoparticles in amplitude modulated discharge plasmas (2018)
  • Author(s): M. Shiratani, R. Zhou, H. Ohtomo, N. Itagaki, K. Koga
  • Organizer: 24th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2018)
  • Int'l Joint Research
• [Presentation] Analysis of Inter-particle Interactions of Two Fine Particles in Ar Plasma (2018)
  • Author(s): Hiroshi Ohtomo, Ren Zhou, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani
  • Organizer: JP-KO dust workshop 2018
  • Int'l Joint Research
• [Presentation] 反応性プラズマにおけるプラズマ揺らぎとナノ粒子揺らぎの関係 (2018)
  • Author(s): 鎌滝晋礼
  • Organizer: 第45回 西日本放電懇談会
• [Presentation] Effects of CH4 Concentration on Size of Carbon Nano-Particles Formed in Multi-hollow Discharge Plasma (2018)
  • Author(s): H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: 6th UK-Japan Engineering Education League Workshop 2018
  • Int'l Joint Research
• [Presentation] CH4+Arマルチホロー放電プラズマで生成したカーボンナノ粒子の基板堆積に対するガス流量の影響 (2018)
  • Author(s): H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: 第79回応用物理学会秋季学術講演会
• [Presentation] 銅電極を用いた低圧放電によるCO2のメタン変換 (2018)
  • Author(s): 谷田知史，山本瑛久，古閑一憲，白谷正治
  • Organizer: 放電/プラズマ・パルスパワー合同研究会
• [Presentation] Motion analysis of inter-particle interactions of three fine particles in Ar plasma (2018)
  • Author(s): H.Ohtomo, R.Zhou, D.Yamashita, K.Kamataki, N.Itagaki, K.Koga, and M.Shiratani
  • Organizer: 40th International Symposium on Dry Process (DPS2018)
  • Int'l Joint Research
• [Presentation] Spatial-Structure of Density Fluctuation of Nanoparticles in Amplitude Modulated Capactively Coupled Plasma (2018)
  • Author(s): Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
  • Organizer: 2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
  • Int'l Joint Research
• [Presentation] Impact of Amplitude Modulation of RF Discharge Voltage on the Spatial Profile of Nanoparticle Characteristics in Reactive Plasma (2018)
  • Author(s): Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu ShirataniKazunori Koga, Masaharu Shiratani
  • Organizer: 2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
  • Int'l Joint Research
• [Presentation] Effects of Gas Pressure on Size of Carbon Nanoparticles Prepared by Methane Plasma Process (2018)
  • Author(s): H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: 2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
  • Int'l Joint Research
• [Presentation] 反応性プラズマ中のナノ粒子量揺らぎの構造解析 (2018)
  • Author(s): 周靭,鎌滝晋礼,大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] 反応性プラズマにおけるプラズマ揺らぎとラジカルとナノ粒子成長の関係 (2018)
  • Author(s): 鎌滝晋礼, 周靭, 大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] Arプラズマ中微粒子の相互作用の評価 (2018)
  • Author(s): 大友 洋，周 靭，山下 大輔，鎌滝 晋礼，板垣 奈穂，古閑 一憲，白谷 正治
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] CO2のCH４化のための低圧高周波プラズマの分光計測 (2018)
  • Author(s): 谷田知史,山本瑛久, 古閑一憲, 白谷正治
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] Growth Kinetics of Carbon Nano Particles Generated in an Ar/CH4 Multi-Hollow Discharge Plasmas (2018)
  • Author(s): H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] プラズマCVDによるSiN製膜時のクラスターの混入が膜物性へ与える影響 (2018)
  • Author(s): 永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第35回プラズマ・核融合学会年会
• [Presentation] Effects of DC Bias Voltage on Deposition of Carbon Nano Particles Synthesized by Ar + CH4 Multi-Hollow Discharge Plasma (2018)
  • Author(s): S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
  • Organizer: The 3rd Asian Applied Physics Conference
  • Int'l Joint Research
• [Presentation] Approaches to increase throuput of Plasma- Catalytic CO2 methanation (2018)
  • Author(s): S. Tanida, A. Yamamoto, K. Koga, and M. Shiratani
  • Organizer: 28th Annual Meeting of MRS-Japan 2018
  • Int'l Joint Research
• [Presentation] CO2 hydrogenation by plasma catalytic method: pressure dependence (2018)
  • Author(s): A. Yamamoto, S. Tanida, K. Koga, and M. Shiratani
  • Organizer: 28th Annual Meeting of MRS-Japan 2018
  • Int'l Joint Research
• [Presentation] Size and Structure Control of Carbon Nano-particles Synthesized by Multi-hollow Discharge Plasma CVD Method (2018)
  • Author(s): S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
  • Organizer: 28th Annual Meeting of MRS-Japan 2018
  • Int'l Joint Research
• [Presentation] プラズマ-触媒併用型二酸化炭素メタン変換における律速段階 (2018)
  • Author(s): 都甲将, 谷田知史, 山本瑛久, 古閑一憲, 白谷正治
  • Organizer: 第65回応用物理学会春季学術講演会
• [Presentation] 任意電圧波形を用いたC7H8+Ar+H2プラズマ生成 (2018)
  • Author(s): 古閑一憲, 山木健司, 方トウジュン, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: 平成30年電気学会全国大会
• [Presentation] Analysis of Coupling of Interaction Fluctuation between Reactive Plasmas and Nanoparticles (2018)
  • Author(s): R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: ISPlasma2018/IC-PLANTS2018
  • Int'l Joint Research
• [Presentation] A tailored voltage waveform plasma CVD method for carbon film deposition (2018)
  • Author(s): K. Yamaki, T. Fang, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: ISPlasma2018/IC-PLANTS2018
  • Int'l Joint Research
• [Presentation] IoT-oriented solar cells fabricated using plasma-based nanotechnology (Invited) (2018)
  • Author(s): M. Shiratani, H. Seo, N. Itagaki, K. Koga
  • Organizer: ISPlasma2018/IC-PLANTS2018
  • Int'l Joint Research / Invited
• [Presentation] Thin film deposition using low temperature plasmas: past, present, and future (Plenary) (2018)
  • Author(s): M. Shiratani, K. Koga, H. Seo, N. Itagaki
  • Organizer: 4th International Workshop on Advanced Plasma Technology and Applications (The 4th IWAPTA workshop)
  • Int'l Joint Research / Invited
• [Presentation] Strategy for the commercialization of dye-sensitized solar cells (2018)
  • Author(s): H. Seo, D. Sakamoto, B. Zhang, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
  • Int'l Joint Research / Invited
• [Presentation] Reduction of activation energy of CO2 methanation reaction using plasma-catalytic method (2018)
  • Author(s): A. Yamamoto, S. Toko, S. Tanida, K. Koga, M. Shiratani
  • Organizer: 5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
  • Int'l Joint Research
• [Presentation] Enhancement on photovoltaic performance of dye-sensitized solar cells by applying up-conversion Y2O3:Er3 + nanoparticles (2018)
  • Author(s): D. Sakamoto, B. Zhang, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
  • Int'l Joint Research
• [Presentation] SiH4 gas flow rate dependence of Si-H2 bond density at P/I interface in aSi:H solar cells fabricated by plasma CVD (2018)
  • Author(s): K. Tanaka, H. Hara, S. Toko, T. Kojima, S. Nagaishi, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
  • Int'l Joint Research
• [Presentation] Utilizing cluster cloud as a selective filter of deposition precursors of aSi:H films (2018)
  • Author(s): S. Toko, T. Kojima, K. Koga, M. Shiratani
  • Organizer: 5th Korea-Japan Joint Symposium on Advanced Solar Cells 2018, 2nd International Symposium on Energy Research and Application
  • Int'l Joint Research
• [Presentation] 非平衡プラズマを用いたカーボンリサイクルによるエネルギー貯蔵 (2018)
  • Author(s): 谷田知史, 都甲将, 山本瑛久, 古閑一憲, 白谷正治
  • Organizer: 九州大学エネルギーウィーク2018
• [Presentation] Towards ultra-high capacity batteries (2018)
  • Author(s): K. Koga, G. Uchida, M. Shiratani
  • Organizer: Joint workshop btw SKKU and Kyushu University Emerging materials and devices
  • Int'l Joint Research
• [Presentation] プラズマとナノ粒子の相互作用ゆらぎのモード間相関 (2017)
  • Author(s): 森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 日本物理学会第72回年次大会（2017年）
  • Place of Presentation: 大阪大学
  • Year and Date: 2017-03-18
• [Presentation] プラズマを用いたCO2 のメタン化反応の考察 (2017)
  • Author(s): 都甲将, 谷田知史, 古閑一憲, 白谷正治
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-17
• [Presentation] 色素増感太陽電池の触媒としてのポリマーナノコンポジット (2017)
  • Author(s): 徐鉉雄, 坂本大輔, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-16
• [Presentation] マルチホロー放電プラズマCVD下流におけるラジカル製膜速度と膜中クラスター混入量の動的振る舞い (2017)
  • Author(s): 都甲将, 小島尚, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2017-03-14
• [Presentation] Time evolution of CH4 yield in methanation of CO2 using helicon discharge plasma (2017)
  • Author(s): S. Tanida, S. Toko, R. Katayama, K. Koga, M. Shiratani
  • Organizer: ISPlasma2017/IC-PLANTS2017
  • Place of Presentation: Chubu University
  • Year and Date: 2017-03-03
  • Int'l Joint Research
• [Presentation] Corrational study of fluctuation of coupling between plasmas and nanoparticles (2017)
  • Author(s): K. Koga, K. Mori, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: ISPlasma2017/IC-PLANTS2017
  • Place of Presentation: Chubu University
  • Year and Date: 2017-03-03
  • Int'l Joint Research
• [Presentation] Theoretical Consideration on Methane Production Using Plasma on Mars (2017)
  • Author(s): S. Toko, S. Tanida, K. Koga, M. Shiratani
  • Organizer: 34th Symposium on Plasma Processing (SPP34) / The 29th Symposium on Plasma Science for Materials (SPSM29)
  • Place of Presentation: Hokkaido University
  • Year and Date: 2017-01-17
• [Presentation] Si Nanoparticles Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition and their Photovoltaic Application (2017)
  • Author(s): D. Sakamoto, H. Chou, S. Tanami, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 34th Symposium on Plasma Processing (SPP34) / The 29th Symposium on Plasma Science for Materials (SPSM29)
  • Place of Presentation: Hokkaido University
  • Year and Date: 2017-01-16
• [Presentation] A new insight into nanoparticle-plasma interactions (Invited) (2017)
  • Author(s): K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: JP-KO dust workshop
  • Int'l Joint Research / Invited
• [Presentation] プラズマ CVD で作製した a-Si:H 薄膜の Si ネットワーク秩序性向上 (2017)
  • Author(s): 田中和真, 原尚志, 小島尚, 永石翔大, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第21回支部大会
• [Presentation] Ar プラズマ中で光捕捉した微粒子を用いたプラズマ揺動の評価 (2017)
  • Author(s): 大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第21回支部大会
• [Presentation] プラズマ CVD で作製した a-Si:H 積層膜の P/I 界面 SiH2結合量の基板温度依存性 (2017)
  • Author(s): 原尚志, 田中和真, 小島尚, 永石翔大, 都甲将, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第21回支部大会
• [Presentation] SiH4+N2マルチホロー放電プラズマ CVD による SiN 系膜の作製 (2017)
  • Author(s): 永石翔大, 小島尚, 田中和真, 原尚志, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第21回支部大会
• [Presentation] Cross-spectrum Analysis of Interaction Fluctuation between Plasma and Nanoparticles in Capacitively-Coupled RF Discharge Reactive Plasmas (2017)
  • Author(s): K. Mori, R. Zhou, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 18th Workshop on Fine Particle Plasmas
  • Int'l Joint Research
• [Presentation] Cloud of a-Si:H Clusters as Selective Filter in SiH4 Multi-Hollow Discharge Plasma (2017)
  • Author(s): T. Kojima, K. Tanaka, S. Nagaishi, H. Hara, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 18th Workshop on Fine Particle Plasmas
  • Int'l Joint Research
• [Presentation] Evaluation of coupling among interaction fluctuations in nanoparticle growth in reactive plasmas (2017)
  • Author(s): K. Koga, K. Mori, R. Zhou, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: 18th Workshop on Fine Particle Plasmas
  • Int'l Joint Research
• [Presentation] Analysis of Inter-particle Fluctuation in Capacitively Coupled Low Pressure Ar Plasma Using Optical Tweezers (2017)
  • Author(s): H. Ohtomo, K. Mori, R. Zhou, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 18th Workshop on Fine Particle Plasmas
  • Int'l Joint Research
• [Presentation] Fine Particle Plasma and Plasma Process (Invited) (2017)
  • Author(s): M. Shiratani, K. Koga
  • Organizer: 18th Workshop on Fine Particle Plasmas
  • Int'l Joint Research / Invited
• [Presentation] Fluctuation Analysis of An Optical Trapped Fine Particle in Ar Plasma (2017)
  • Author(s): H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 27th annual meeting of MRS-J
  • Int'l Joint Research
• [Presentation] Deposition of High Quality Silicon Thin Films Utilizing Nanoparticles Trapped in Plasmas (2017)
  • Author(s): K. Koga, T. Kojima, S. Toko, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: 27th annual meeting of MRS-J
  • Int'l Joint Research
• [Presentation] 低圧プラズマを用いた CO2 のメタン化反応の活性化エネルギー (2017)
  • Author(s): 山本瑛久, 都甲将, 谷田知史, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 2017年度応用物理学会九州支部学術講演会
• [Presentation] Correlation analysis between high energy electrons and nanoparticles in AM CCP (2017)
  • Author(s): R. Zhou, K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: The 2nd Asian Applied Physics Conference (Asian-APC)
  • Int'l Joint Research
• [Presentation] Effects of electrode material on low pressure plasma-catalytic CO2 methanation (2017)
  • Author(s): S. Tanida, S. Toko, A. Yamamoto, K. Koga, and M. Shiratani
  • Organizer: The 2nd Asian Applied Physics Conference (Asian-APC)
  • Int'l Joint Research
• [Presentation] 色素増感太陽電池のポリマー対向電極における触媒反応の活性化（招待講演） (2017)
  • Author(s): 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 電子情報通信学会有機エレクトロニクス研究会
  • Invited
• [Presentation] 光ピンセットを用いたArプラズマと単一微粒子との相互作用解析 (2017)
  • Author(s): 大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: Plasma Conference 2017
• [Presentation] 基板温度制御によるa-Si:H薄膜のSiネットワーク秩序性の向上 (2017)
  • Author(s): 田中和真, 小島尚, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: Plasma Conference 2017
• [Presentation] 反応性プラズマとナノ粒子の相互作用ゆらぎのクロスコリレーション解析区間の比較 (2017)
  • Author(s): 周靭, 森研人, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: Plasma Conference 2017
• [Presentation] Development of a fine particle transport analyzer for processing plasmas (2017)
  • Author(s): K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: The 39th International Symposium on Dry Process (DPS 2017)
  • Int'l Joint Research
• [Presentation] 反応性プラズマを用いた物質機能の初期階層形成 (2017)
  • Author(s): 古閑一憲
  • Organizer: 第33回九州・山口プラズマ研究会
• [Presentation] Carbon Recycling using Low Temperature Plasma with Activated Catalysts (2017)
  • Author(s): S. Tanida, S. Toko, K. Koga, A. Yamamoto, M. Shiratani
  • Organizer: The 4th International Symposium on Hybrid Materials and Processing (HyMaP 2017)
  • Int'l Joint Research
• [Presentation] An Analysis on a Kinetic Motion of Optical Trapped Single Fine Particle in Ar Plasma (2017)
  • Author(s): H. Ohtomo, K. Mori, Z. Ren, D. Yamashita H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: The 4th International Symposium on Hybrid Materials and Processing (HyMaP 2017)
  • Int'l Joint Research
• [Presentation] Nanoparticle Composite Films: Fabrication and Functions (Invited) (2017)
  • Author(s): M. Shiratani, K. Koga, H. Seo, N. Itagaki
  • Organizer: The 4th International Symposium on Hybrid Materials and Processing (HyMaP 2017)
  • Int'l Joint Research
• [Presentation] Surface-driven CH4 generation from CO2 in Low-pressure Non-thermal Plasma (2017)
  • Author(s): K. Koga, S. Toko, S. Tanida, M. Shiratani
  • Organizer: American Vacuum Society 64th International Symposium and Exhibition (AVS64)
  • Int'l Joint Research
• [Presentation] Spatiotemporal Non-uniformity of CVD Plasmas and Film Qualities (Invited) (2017)
  • Author(s): M. Shiratani
  • Organizer: American Vacuum Society 64th International Symposium and Exhibition (AVS64)
  • Int'l Joint Research
• [Presentation] 火星上CO2のCH4資源化のための低温低圧プラズマ触媒プロセス (2017)
  • Author(s): 古閑一憲, 都甲将, 谷田知史, 白谷正治, 細田聡史, 星野健
  • Organizer: 第61回宇宙科学技術連合講演会
• [Presentation] Novel Fabrication Methods of Thin Films using Low Temperature Plasmas (Invited) (2017)
  • Author(s): M. Shiratani, K. Koga, H. Seo, N. Itagaki
  • Organizer: Taiwan Association for Coating and Thin Film Technology (TACT) 2017
  • Int'l Joint Research / Invited
• [Presentation] 微粒子プラズマの揺動解析(招待講演) (2017)
  • Author(s): 白谷正治
  • Organizer: H29年度東北大学電気通信研究所共同プロジェクト研究会 微粒子－流体混成系がもたらす多様な機能性 ～ 基礎物理から、メタマテリアル効果、熱応答性、種々の新現象 ～
  • Invited
• [Presentation] Local Fluctuations of Plasma Detected with an Optically Trapped Fine Particle (2017)
  • Author(s): M. Shiratani, H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga
  • Organizer: 1st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2017)
  • Int'l Joint Research
• [Presentation] Spatial Structure of Interactions between Nanoparticles and Low Pressure Plasmas (Invited) (2017)
  • Author(s): M. Shiratani, H. Seo, N. Itagaki, K. Koga
  • Organizer: 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017)
  • Int'l Joint Research / Invited
• [Presentation] P/I界面のSi-H2結合形成に対する基板温度の効果 (2017)
  • Author(s): 田中和真, 原尚志, 小島尚, 永石翔大, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] Arプラズマ中で光捕捉された単一微粒子の運動解析 (2017)
  • Author(s): 大友洋, 森研人, 周靭, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 結晶Geナノ粒子膜の堆積とそのLiイオン電池への応用 (2017)
  • Author(s): 内田儀一郎, 古閑一憲, 白谷正治, 神原淳
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 反応性プラズマとナノ粒子の相互作用ゆらぎの相関関係解析 (2017)
  • Author(s): 周靭, 森研人, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 反応性プラズマ中ナノ粒子とプラズマの相互作用ゆらぎの起因解明 (2017)
  • Author(s): 森研人, 周靭, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 容量結合型プラズマを用いたCO2メタン化におけるCO2変換率のガス流量依存性 (2017)
  • Author(s): 谷田知史, 都甲将, 山本瑛久, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 高圧マルチホロー放電プラズマCVD下流におけるラジカル成膜速度の時間変化 (2017)
  • Author(s): 小島尚, 都甲将, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] プラズマを用いた二酸化炭素のメタン化における電極表面の影響 (2017)
  • Author(s): 都甲将, 谷田知史, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] 色素増感太陽電池におけるポリマー対向電極へのシリコンナノ粒子添加効果 (2017)
  • Author(s): 坂本大輔, 張博辰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] ポリマーナノコンポジットを用いた量子ドット増感太陽電池の対向電極 (2017)
  • Author(s): 徐鉉雄, 坂本大輔, 張博辰, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] Effects of H2 flow rate on methanation of CO2 using low pressure nonthermal plasma (2017)
  • Author(s): S. Toko, S. Tanida, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Next Generation Photovoltaics Based on Si Nano-particles Fabricated by Advanced Plasma Process (2017)
  • Author(s): H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Spatiotemporal structure of fluctuation of interactions between plasmas and nanoparticles in capacitively-coupled rf discharge reactive plasmas (2017)
  • Author(s): K. Mori, H. Ohtomo, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Optical Trapping Process of Single Fine Particle in Ar Plasma (2017)
  • Author(s): H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] A Theoretical Model for Time Evolution of Radical Deposition Rate in Silane Plasma CVD (2017)
  • Author(s): T. Kojima, S. Toko, K. Keya, K. Tanaka, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Film thickness dependence of structure of a-Si:H thin films measured by Raman spectroscopy (2017)
  • Author(s): K. Tanaka, S. Toko, K. Keya, T. Kojima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Catalytic Enhancement of Polymer Counter Electrode of Photochemical Photovoltaics based on Nano-particle Application (2017)
  • Author(s): H. Seo, D. Sakamoto, H. Chou, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Union of Materials Research Societies - The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017)
  • Int'l Joint Research
• [Presentation] Rise time of Sabatier process using low pressure and low temperature plasma (2017)
  • Author(s): S. Toko, S. Tanida, K. Koga, M. Shiratani
  • Organizer: International Conference on Phenomena in Ionized Gases (ICPIG 2017)
  • Int'l Joint Research
• [Presentation] Suppression of Si-H2 bond formation at P/I interface in a-Si:H solar cells deposited by multi-hollow discharge plasma CVD (2017)
  • Author(s): S. Toko, K. Tanaka, K. Keya, T. Kojima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: International Conference on Phenomena in Ionized Gases (ICPIG 2017)
  • Int'l Joint Research
• [Presentation] Carbon recycling using Cu catalyst together with low pressure capacitively-coupled plasma (2017)
  • Author(s): M. Shiratani, S. Toko, S. Tanida, K. Koga
  • Organizer: 2017 International Forum on Functional Materials (IFFM2017)
  • Int'l Joint Research
• [Presentation] a‐Si:H 薄膜中の Si ネットワーク秩序性のラマン分光法を_いた評価 (2017)
  • Author(s): 田中和真, 小島尚, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成29年度九州表面・真空研究会2017（兼第22回九州薄膜表面研究会）
• [Presentation] 色素増感太陽電池におけるナノ粒子を用いた表面改質によるポリマー触媒の反応活性化 (2017)
  • Author(s): 坂本大輔, 張博辰, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成29年度九州表面・真空研究会2017（兼第22回九州薄膜表面研究会）
• [Presentation] Synthesis of Nanoparticles Using Low Temperature Plasmas and Its Application to Solar Cells and Tracers in Living Body (Invited) (2017)
  • Author(s): K. Koga, H. Seo, A. Tanaka, N. Itagaki, M. Shiratani
  • Organizer: 231st Meeting of Electrochemical Society (ECS)
  • Int'l Joint Research / Invited
• [Presentation] 低温プラズマによるナノ粒子の合成と太陽電池への応用 (2017)
  • Author(s): 古閑一憲, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: 電子情報通信学会有機エレクトロニクス研究会
• [Presentation] Time evolution of cross-correlation between two fluctuations of couplings between plasmas and nanoparticles in amplitude modulated discharges (2016)
  • Author(s): K. Koga, K. Mori, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: 17th Workshop on Fine Particle Plasmas and JAPAN-KOREA Workshop on Dust Particles 2016
  • Place of Presentation: National Institute of Fusion Science, Gifu
  • Year and Date: 2016-12-21
  • Int'l Joint Research
• [Presentation] Characteristic length of position fluctuation of a single fine particle optically trapped in Ar plasma (2016)
  • Author(s): H. Ohtomo, M. Soejima, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 26th annual meeting of MRS-J
  • Place of Presentation: Yokohama Port Opening Plaza
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] Interaction potential fluctuation between binary collisions of fine particles suspended in low pressure Ar rf plasmas (2016)
  • Author(s): M. Soejima, H. Ohtomo, K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 26th annual meeting of MRS-J
  • Place of Presentation: Yokohama Port Opening Plaza
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] Effects of modulation frequency on interaction fluctuation between plasma and nanoparticles (2016)
  • Author(s): K. Mori, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 26th annual meeting of MRS-J
  • Place of Presentation: Yokohama Port Opening Plaza
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] Effects of electrostatic field direction on dust accumulation to mirror in a plasma reactor (2016)
  • Author(s): R. Katayama, T. Fang, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara
  • Organizer: 26th annual meeting of MRS-J
  • Place of Presentation: Yokohama Port Opening Plaza
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] Discharge power dependence of methanation of CO2 under low pressure (2016)
  • Author(s): S. Toko, R. Katayama, S. Tanida, K. Koga, M. Shiratani
  • Organizer: 26th annual meeting of MRS-J
  • Place of Presentation: Yokohama Port Opening Plaza
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] DC bias voltage dependence of dust transport in a compact dust trajectory analyzer (2016)
  • Author(s): R. Katayama, T. Fang, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara
  • Organizer: 17th Workshop on Fine Particle Plasmas and JAPAN-KOREA Workshop on Dust Particles 2016
  • Place of Presentation: National Institute of Fusion Science, Gifu
  • Year and Date: 2016-12-20
  • Int'l Joint Research
• [Presentation] プラズマを用いたサバティエ反応によるCH4生成速度の理論的検討 (2016)
  • Author(s): 都甲将, 谷田知史, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-18
• [Presentation] プラズマ中微粒子の光捕捉 (2016)
  • Author(s): 大友洋, 添島雅大, 森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] マルチホロー放電プラズマCVD下流領域におけるクラスター輸送量と膜中クラスター混入量の関係 (2016)
  • Author(s): 小島尚, 都甲将, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] プラズマ中微粒子の相互作用計測 (2016)
  • Author(s): 添島雅大, 大友洋, 森研人, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] 容量結合RFプラズマを用いた低温低圧下におけるCO2のメタン化 (2016)
  • Author(s): 谷田知史, 都甲将, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] プラズマプロセスによって作成されたSiナノ粒子の光電変換特性 (2016)
  • Author(s): 張博辰, 坂本大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] 反応性プラズマとナノ粒子の相互作用ゆらぎの時空間構造 (2016)
  • Author(s): 森研人, 添島雅大, 大友洋, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第20回支部大会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-12-17
• [Presentation] マルチホロー放電プラズマ中のクラスターサイズ・密度の放電時間依存性 (2016)
  • Author(s): 小島尚, 都甲将, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成28年度応用物理学会九州支部学術講演会
  • Place of Presentation: 対馬市交流センター, 長崎
  • Year and Date: 2016-12-03
• [Presentation] 低圧プラズマによるCO2変換への放電電力・ガス滞在時間の効果 (2016)
  • Author(s): 都甲将, 谷田知史, 古閑一憲, 白谷正治
  • Organizer: 平成28年度応用物理学会九州支部学術講演会
  • Place of Presentation: 対馬市交流センター, 長崎
  • Year and Date: 2016-12-03
• [Presentation] 小型ダスト飛跡分析装置を用いたミラー上ダスト堆積抑制の検討 (2016)
  • Author(s): 古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男
  • Organizer: 第33回プラズマ・核融合学会年会
  • Place of Presentation: 東北大学
  • Year and Date: 2016-12-01
• [Presentation] プラズマとナノ粒子の相互作用ゆらぎの２次元空間構造の時間発展 (2016)
  • Author(s): 古閑一憲, 森研人, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: 第33回プラズマ・核融合学会年会
  • Place of Presentation: 東北大学
  • Year and Date: 2016-11-30
• [Presentation] Effects of particle size on catalytic characteristics of polymer counter electrode containing Si nanoparticles in dye-sensitized solar cells (2016)
  • Author(s): D. Sakamoto, Y. Oide, S. Tanami, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: 26th International Photovoltaic Science and Engineering Conference (PVSEC-26)
  • Place of Presentation: Sands Expo and Convention Centre
  • Year and Date: 2016-10-28
  • Int'l Joint Research
• [Presentation] Low cost dye-sensitized solar cells based on polymer composite catalyst (2016)
  • Author(s): D. Sakamoto, H. Seo, S. Tanami, Y. Oide, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 26th International Photovoltaic Science and Engineering Conference (PVSEC-26)
  • Place of Presentation: Sands Expo and Convention Centre
  • Year and Date: 2016-10-26
  • Int'l Joint Research
• [Presentation] Catalytic enhancement on polymer composite counter electrode for low cost quantum dot-sensitized solar cells (2016)
  • Author(s): H. Seo, D. Sakamoto, C. V. V. M. Gopi, M. Kim, H. J. Kim, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: The 6th International Conference on Microelectronics and Plasma Technology (ICMAP 2016)
  • Place of Presentation: Dream Center, Gyeongju
  • Year and Date: 2016-09-28
  • Int'l Joint Research
• [Presentation] ヘリコンプラズマを用いた低温低圧下におけるCO2からのCH4生成 (2016)
  • Author(s): 都甲将, 片山龍, 谷田知史, 古閑一憲, 白谷正治
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ, 新潟
  • Year and Date: 2016-09-16
• [Presentation] マルチホロー放電プラズマ下流における電場とクラスター輸送の関係 (2016)
  • Author(s): 小島尚, 都甲将, 毛屋公孝, 田中和真, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ, 新潟
  • Year and Date: 2016-09-16
• [Presentation] 反応性プラズマとナノ粒子の相互作用ゆらぎの時空間構造解析 (2016)
  • Author(s): 森研人, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ, 新潟
  • Year and Date: 2016-09-13
• [Presentation] マルチホロー放電プラズマCVD法によって作成されたSiナノ粒子の量子測定と太陽電池への応用 (2016)
  • Author(s): 張博辰, 坂本大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第10回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2016-09-01
• [Presentation] ナノ粒子制御による高光安定なa-Si:H太陽電池セルの作成 (2016)
  • Author(s): 田中和真, 毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第10回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2016-09-01
• [Presentation] 低圧ヘリコン放電プラズマを用いたCO2のメタン化 (2016)
  • Author(s): 谷田知史, 都甲将, 片山龍, 古閑一憲, 白谷正治
  • Organizer: 第10回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2016-09-01
• [Presentation] プラズマ中でレーザートラップされた微粒子を用いたプラズマのその場計測 (2016)
  • Author(s): 大友洋, 添島雅大, 森研人, 山下大輔, 徐鉉雄, 古閑一憲, 板垣奈穂, 白谷正治
  • Organizer: 第10回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2016-09-01
• [Presentation] Methanation of CO2 by low pressure helicon plasma discharge (2016)
  • Author(s): S. Toko, R. Katayama, K. Koga, M. Shiratani
  • Organizer: 20th International Vacuum Congress (IVC-20)
  • Place of Presentation: Busan Exhibition Convention Center
  • Year and Date: 2016-08-24
  • Int'l Joint Research
• [Presentation] Inter-Particle Potential Fluctuation of Two Fine Particles Suspended in Ar Plasmas (2016)
  • Author(s): M. Soejima, K. Koga, M. Shiratani
  • Organizer: 16th International Conference On Nanotechnology (IEEE NANO 2016)
  • Place of Presentation: Sendai International Center
  • Year and Date: 2016-08-24
  • Int'l Joint Research
• [Presentation] Catalytic Activation of Polymer Composite Catalyst for Photochemical Solar Cells (2016)
  • Author(s): H. Seo, M. Son, S. Tanami, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: The 67th Annual Meeting of the International Society of Electrochemistry
  • Place of Presentation: The Hague, Netherland
  • Year and Date: 2016-08-23
  • Int'l Joint Research
• [Presentation] Surface modification of polymeric catalyst for the catalytic enhancement of dye and quantum dot sensitized solar cells (2016)
  • Author(s): H. Seo, M. K. Son, S. Tanami, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 20th International Vacuum Congress (IVC-20)
  • Place of Presentation: Busan Exhibition Convention Center
  • Year and Date: 2016-08-23
  • Int'l Joint Research
• [Presentation] Time evolution of radical deposition rate and cluster amount (Invited) (2016)
  • Author(s): M. Shiratani, S. Toko, Y. Torigoe, K. Keya, T. Kojima, H. Seo, N. Itagaki and K. Koga
  • Organizer: 20th International Vacuum Congress (IVC-20)
  • Place of Presentation: Busan Exhibition Convention Center
  • Year and Date: 2016-08-22
  • Int'l Joint Research / Invited
• [Presentation] Envelope analysis and cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas (2016)
  • Author(s): K. Mori, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani and S. Inagaki
  • Organizer: Workshop on Plasma surface interaction for technological applications
  • Place of Presentation: University of Kiel, Germany
  • Year and Date: 2016-07-20
  • Int'l Joint Research
• [Presentation] Effects of clusters transport on hydrogenated amorphous silicon solar cells (2016)
  • Author(s): T. Kojima, S. Toko, K. Keya, K. Tanaka, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
  • Organizer: Workshop on Plasma surface interaction for technological applications
  • Place of Presentation: University of Kiel, Germany
  • Year and Date: 2016-07-18
  • Int'l Joint Research
• [Presentation] コンパクトドリフトチューブへのダスト入射角度に対する印加バイアス電圧の影響 (2016)
  • Author(s): 片山龍, 方韜鈞, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男
  • Organizer: 第11回核融合エネルギー連合講演会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-07-14
• [Presentation] コンパクトドリフトチューブを用いたArプラズマとグラファイト壁の相互作用により発生したダストの捕集実験 (2016)
  • Author(s): 方韜鈞, 片山龍, 古閑一憲, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男
  • Organizer: 第11回核融合エネルギー連合講演会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-07-14
• [Presentation] QCMを用いたLHD内ダスト堆積量のその場測定 (2016)
  • Author(s): 古閑一憲, 片山龍, 方韜鈞, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治, 増崎貴, 芦川直子, 時谷政行, 西村清彦, 相良明男, LHD実験グループ
  • Organizer: 第11回核融合エネルギー連合講演会
  • Place of Presentation: 九州大学
  • Year and Date: 2016-07-14
• [Presentation] Modulation level dependence of fluctuation of interactions between plasmas and nanoparticles grown in amplitude modulated discharges (2016)
  • Author(s): K. Mori, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)
  • Place of Presentation: Bratislava, Slovekia
  • Year and Date: 2016-07-14
  • Int'l Joint Research
• [Presentation] Fluctuation of position and energy of a fine particle in plasma nanofabrication (Invited) (2016)
  • Author(s): M. Shiratani, K. Koga
  • Organizer: Intl’ Conf. on Processing & Manufacturing of Advanced Materials (THERMEC’2016)
  • Place of Presentation: Graz, Austria
  • Year and Date: 2016-05-31
  • Int'l Joint Research / Invited
• [Presentation] DC biased parallel plates for reduction of dust accumulation on first mirror (2016)
  • Author(s): M. Shiratani, R. Katayama, K. Koga, D. Yamashita, H. Seo, N. Itagaki, S. Masuzaki, N. Ashikawa, M. Tokitani, K. Nishimura, A. Sagara
  • Organizer: International Conference on Plasma Surface Interactions in Controlled Fusion Devices (22nd PSI)
  • Place of Presentation: Pontifical Urbaniana University, Roma
  • Year and Date: 2016-05-31
  • Int'l Joint Research
• [Presentation] プラズマ中微粒子を用いたプラズマポテンシャルゆらぎの評価 (2016)
  • Author(s): 古閑一憲, 添島雅大, 伊藤鉄平, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: 日本物理学会第71回年次大会
  • Place of Presentation: 東北学院大学
  • Year and Date: 2016-03-21
• [Presentation] プラズマによるクラスター捕捉を利用した低クラスター混入 a-Si:H 薄膜の作製 (2016)
  • Author(s): 都甲将, 毛屋公孝, 小島尚, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第7回薄膜太陽電池セミナー
  • Place of Presentation: 山形大学
  • Year and Date: 2016-03-14
• [Presentation] Fluctuation in interaction potential between binary colliding fine particles suspended in plasmas (2016)
  • Author(s): M. Soejima, T. Ito, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 5th International Conference on Advanced Plasma Technologies (ICAPT-5)
  • Place of Presentation: Rogla, Slovenia
  • Year and Date: 2016-03-01
  • Int'l Joint Research
• [Presentation] シランマルチホロー放電プラズマ下流領域におけるクラスタ量の時間変化 (2015)
  • Author(s): 小島尚, 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第19回支部大会
  • Place of Presentation: 熊本大学
  • Year and Date: 2015-12-20
• [Presentation] 反応性プラズマ中で形成されたナノ粒子によるレーザー散乱光強度のエンベロープ解析：変調周波数依存性 (2015)
  • Author(s): 森研人, 伊東鉄平, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 小林達哉, 稲垣滋
  • Organizer: プラズマ・核融合学会九州・沖縄・山口支部 第19回支部大会
  • Place of Presentation: 熊本大学
  • Year and Date: 2015-12-19
• [Presentation] Analysis of Spatiotemporal Development of Interaction Fluctuation between Nanoparticles and Radicals in Reactive Plasmas (2015)
  • Author(s): K. Koga, T. Ito, T. Kobayashi, M. Shiratani, S. Inagaki
  • Organizer: 9ｔｈ APSPT/28th SPSM
  • Place of Presentation: Nagasaki Univ., Japan
  • Year and Date: 2015-12-13
  • Int'l Joint Research
• [Presentation] Potential fluctuation evaluation using binary collision of fine particles suspended in plasmas (Invited) (2015)
  • Author(s): K. Koga and M. Shiratani
  • Organizer: 第16回微粒子プラズマ研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2015-12-11
  • Int'l Joint Research / Invited
• [Presentation] Arプラズマ中の２つのダスト粒子間のポテンシャル (2015)
  • Author(s): 白谷正治, 添島雅大, 伊東鉄平, 徐鉉雄, 板垣奈穂, 古閑一憲
  • Organizer: 第25回日本MRS年次大会
  • Place of Presentation: 横浜市開港記念会館
  • Year and Date: 2015-12-09
• [Presentation] クラスタ及びSiH3ラジカルのSiH2結合形成への寄与 (2015)
  • Author(s): 毛屋公孝, 鳥越祥宏, 都甲将, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第25回日本MRS年次大会
  • Place of Presentation: 横浜市開港記念会館
  • Year and Date: 2015-12-08
• [Presentation] Attraction during binary collision of fine particles in Ar plasma (2015)
  • Author(s): M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga, M. Shiratani
  • Organizer: ICRP9/GEC68/SPP33
  • Place of Presentation: Hawaii Convention Center, USA
  • Year and Date: 2015-10-13
  • Int'l Joint Research
• [Presentation] Cross correlation analysis of plasma perturbation in amplitude modulated reactive dusty plasmas (2015)
  • Author(s): T. Ito, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, K. Koga, M. Shiratani, T. Kobayashi, S. Inagaki
  • Organizer: ICRP9/GEC68/SPP33
  • Place of Presentation: Hawaii Convention Center, USA
  • Year and Date: 2015-10-13
  • Int'l Joint Research
• [Presentation] Cluster Incorporation into A-Si:H Films Deposited Using H 2 +SiH 4 Discharge Plasmas (2015)
  • Author(s): S. Toko, Y. Torigoe, K. Keya, H. Seo, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: ICRP9/GEC68/SPP33
  • Place of Presentation: Hawaii Convention Center, USA
  • Year and Date: 2015-10-13
  • Int'l Joint Research
• [Presentation] In-situ laser Raman spectroscopy of an optically trapped fine particle (2015)
  • Author(s): K. Koga, M. Soejima, K. Tomita, T. Ito, H. Seo, N. Itagaki, M. Shiratani
  • Organizer: 17th International Symposium on Laser-Aided Plasma Diagnostics (LAPD17)
  • Place of Presentation: Chateraise Gateaux Kingdom Sapporo, Japan
  • Year and Date: 2015-09-26
  • Int'l Joint Research
• [Presentation] プラズマ中微粒子運動の2次元顕微解析 (2015)
  • Author(s): 添島雅大, 伊東鉄平, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 野口将之, 内田誠一
  • Organizer: 平成27年度（第68回）電気・情報関係学会九州支部連合大会
  • Place of Presentation: 福岡大学
  • Year and Date: 2015-09-26
• [Presentation] 反応性プラズマ中ナノ粒子量揺らぎのクロスコリレーション解析 (2015)
  • Author(s): 伊東鉄平, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治, 小林達哉, 稲垣滋
  • Organizer: 平成27年度（第68回）電気・情報関係学会九州支部連合大会
  • Place of Presentation: 福岡大学
  • Year and Date: 2015-09-26
• [Presentation] マルチホロー放電プラズマCVD法におけるシランガス流速のクラスターに対するラジカル損失への影響 (2015)
  • Author(s): 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成27年度（第68回）電気・情報関係学会九州支部連合大会
  • Place of Presentation: 福岡大学
  • Year and Date: 2015-09-26
• [Presentation] Control Of Nanoprticle Transport And Their Deposition For Porous Low-k Films By Using Plasma Pertubation (Invited) (2015)
  • Author(s): K. Koga and M. Shiratani
  • Organizer: The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015)
  • Place of Presentation: Ramada Plaza Jeju Hotel, Korea
  • Year and Date: 2015-09-22
  • Int'l Joint Research / Invited
• [Presentation] Fabrication Of Ge Nanoparticle Composite Films By Reactive Dusty Plasma Process For Next Generation Energy Devices (Invited) (2015)
  • Author(s): G. Uchida, H. Seo, K. Koga, M. Shiratani
  • Organizer: The 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE2015)
  • Place of Presentation: Ramada Plaza Jeju Hotel, Korea
  • Year and Date: 2015-09-21
  • Int'l Joint Research / Invited
• [Presentation] アルゴンプラズマ中微粒子運動の画像解析によるプラズマパラメータ評価 (2015)
  • Author(s): 古閑一憲, 添島雅大, 徐鉉雄, 板垣奈穂, 白谷正治, 内田誠一
  • Organizer: 日本物理学会 2015年秋季大会
  • Place of Presentation: 関西大学
  • Year and Date: 2015-09-17
• [Presentation] 反応性プラズマ中ナノ粒子とラジカルの非線形結合成分の時空間解析 (2015)
  • Author(s): 古閑一憲, 伊東鉄平, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: 日本物理学会 2015年秋季大会
  • Place of Presentation: 関西大学
  • Year and Date: 2015-09-17
• [Presentation] AM変調を用いた反応性プラズマ中のナノ粒子揺らぎの時空間解析 (2015)
  • Author(s): 森研人, 伊東鉄平, 古閑一憲, 添島雅大, 山下大輔, 徐鉉雄, 板垣奈穂, 白谷正治,小林達哉, 稲垣滋
  • Organizer: 第9回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2015-09-02
• [Presentation] 膜中クラスター体積分率の水素ガス流量依存性 (2015)
  • Author(s): 小島尚, 都甲将, 鳥越祥宏, 毛屋公孝, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 第9回プラズマエレクトロニクスインキュベーションホール
  • Place of Presentation: 国立中央青少年交流の家, 静岡
  • Year and Date: 2015-09-02
• [Presentation] プラズマ中2体衝突ダスト間引力・斥力の検出 (2015)
  • Author(s): 白谷正治
  • Organizer: 平成27年度 東北大学電気通信研究所共同プロジェクト研究会「微粒子プラズマ物理に基づいた新規ナノ材料創成」
  • Place of Presentation: 東北大学
  • Year and Date: 2015-09-01
• [Presentation] Position fluctuation of a fine particle optically trapped in Ar plasma (2015)
  • Author(s): M. Shiratani, M. Soejima, T. Ito, D. Yamashita, N. Itagaki, H. Seo, K. Koga
  • Organizer: The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015)
  • Place of Presentation: Iasi, Romania
  • Year and Date: 2015-07-28
  • Int'l Joint Research
• [Presentation] Bispectrum analysis of fluctuation of nanoparticle amount in amplitude modulated capacitively-coupled discharge plasmas (2015)
  • Author(s): M. Shiratani, T. Ito, K. Koga, M. Soejima, D. Yamashita, H. Seo, N. Itagaki, T. Kobayashi, S. Inagaki
  • Organizer: The XXXII edition of the International Conference on Phenomena in Ionized Gases (ICPIG2015)
  • Place of Presentation: Iasi, Romania
  • Year and Date: 2015-07-28
  • Int'l Joint Research
• [Presentation] プラズマによるナノ粒子の合成と凝集・輸送制御 (2015)
  • Author(s): 白谷正治, 古閑一憲
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2015-03-12
  • Invited
• [Presentation] プロセシングプラズマを用いたIV族半導体ナノ粒子の作製と太陽電池への応用 (2015)
  • Author(s): 古閑一憲, 内田儀一郎, 徐鉉雄, 白谷正治
  • Organizer: 平成26年度 東北大学電気通信研究所共同プロジェクト研究会「プラズマナノバイオ・医療の基礎研究」
  • Place of Presentation: 東北大学
  • Year and Date: 2015-02-19
  • Invited
• [Presentation] Temporal development of nonlinear coupling between radicals and nanoparticles in reactive plasmas (2015)
  • Author(s): K. Koga, T. Ito, H. Seo, N. Itagaki, and M. Shiratani
  • Organizer: The 75th IUVSTA Workshop on Sheath Phenomena in Plasma Processing of Advanced Materials
  • Place of Presentation: Hotel Raj, Cerkljena Gorenjskem
  • Year and Date: 2015-01-20
  • Invited
• [Presentation] プラズマナノプロセシングにおける揺らぎ抑制のための戦略 (2014)
  • Author(s): 白谷正治, 古閑一憲, 徐鉉雄, 板垣奈穂
  • Organizer: 第24回日本MRS年次大会
  • Place of Presentation: 横浜市開港記念会館、横浜情報文化センター
  • Year and Date: 2014-12-11
• [Presentation] ラジカル密度摂動によるナノ粒子とラジカルのカップリング解析 (2014)
  • Author(s): 古閑一憲, 伊東鉄平, 徐鉉雄, 板垣奈穂, 白谷正治
  • Organizer: Plasma Conference 2014
  • Place of Presentation: 朱鷹メッセ, 新潟
  • Year and Date: 2014-11-19
• [Presentation] プロセスプラズマにおけるナノ粒子の成長とその制御 (2014)
  • Author(s): 白谷正治
  • Organizer: Plasma Conference 2014
  • Place of Presentation: 朱鷹メッセ, 新潟
  • Year and Date: 2014-11-18
  • Invited
• [Presentation] Quantum characterization of Si nano-particles fabricated by multi-hollow discharge plasma chemical vapor deposition (2014)
  • Author(s): H. Seo, G. Uchida, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: Global Photovoltaic Conference 2014
  • Place of Presentation: BEXCO Convention center, Busan
  • Year and Date: 2014-11-11
• [Presentation] Modulation frequency dependence of bispectrum of laser light scattering intensity from nanoparticles formed in reactive plasmas (2014)
  • Author(s): T. Ito, D. Yamashita, H. Seo, K. KamatakiI, N. Itagaki, K. Koga, M. Shiratani
  • Organizer: 67th Annual Gaseous Electronics Conference
  • Place of Presentation: Raleigh Convention Center, North Carolina
  • Year and Date: 2014-11-05
• [Presentation] Effects of amplitude modulated VHF discharge on coupling between plasmas and nanoparticles (2014)
  • Author(s): K. Koga, T. Ito, K. Kamataki, H. Seo, N. Itagaki, and M. Shiratani
  • Organizer: 24th International Toki Conference
  • Place of Presentation: Ceratopia Toki, Toki-city, Gifu
  • Year and Date: 2014-11-05
• [Presentation] Nanopartilce Composite Plasma CVD Films and Some Applications (2014)
  • Author(s): M. Shiratani, K. Koga
  • Organizer: 2014 ECS and SMEQ Joint International Meeting
  • Place of Presentation: Moon Palace Resort, Cancun
  • Year and Date: 2014-10-07
  • Invited
• [Presentation] マルチホロー放電プラズマCVDによるSi量子ドットの作製と新太陽電池への応用研究 (2014)
  • Author(s): 徐鉉雄, 橋本慎史, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成26年度（第67回）電気・情報関係学会九州支部連合大会
  • Place of Presentation: 鹿児島大学
  • Year and Date: 2014-09-18
• [Presentation] Si量子ドットを用いたハイブリッド型太陽電池の研究 (2014)
  • Author(s): 橋本慎史, 市田大樹, 徐鉉雄, 内田儀一郎, 板垣奈穂, 古閑一憲, 白谷正治
  • Organizer: 平成26年度（第67回）電気・情報関係学会九州支部連合大会
  • Place of Presentation: 鹿児島大学
  • Year and Date: 2014-09-18
• [Presentation] In-situ Measurements of Volume Fraction of clusters in Films During Plasma CVD (2014)
  • Author(s): M. Shiratani, S. Toko, K. Koga, N. Itagaki, H. Seo
  • Organizer: International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2014)
  • Place of Presentation: Town & Country Resort Hotel, San Diego
  • Year and Date: 2014-05-01
• [Remarks] プラズマ工学研究室
  • URL: http://plasma.ed.kyushu-u.ac.jp/index.html
• [Remarks] プラズマ工学研究室
  • URL: http://plasma.ed.kyushu-u.ac.jp/
• [Patent(Industrial Property Rights)] カーボンナノ粒子の製造方法 (2018)
  • Inventor(s): 古閑一憲、他8名
  • Industrial Property Rights Holder: 古閑一憲、他8名
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2018-158138
  • Filing Date: 2018