Surface acoustic wave investigation of vacancy orbital in silicon wafer
Project/Area Number |
26247059
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Condensed matter physics II
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Research Institution | Niigata University |
Principal Investigator |
GOTO Terutaka 新潟大学, 自然科学系, フェロー (60134053)
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Co-Investigator(Kenkyū-buntansha) |
根本 祐一 新潟大学, 自然科学系, 准教授 (10303174)
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Co-Investigator(Renkei-kenkyūsha) |
AKATSU Mitsuhiro 新潟大学, 自然科学系, 助教 (10431876)
MITSUMOTO Keisuke 新潟大学, 自然科学系, 特任助教 (50515567)
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Research Collaborator |
KURIHARA Ryosuke 新潟大学, 自然科学系, 研究員
KASHIMA Kazuhiko グローバルウェーハズ・ジャパン(株), 技監
SAITO Hiroyuki グローバルウェーハズ・ジャパン(株), 参事
FURUMURA Yuji (株)フィルテック, 社長
SAITO Yoshihiko (株)東芝, グループ長
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Project Period (FY) |
2014-06-27 – 2017-03-31
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Project Status |
Completed (Fiscal Year 2016)
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Budget Amount *help |
¥40,560,000 (Direct Cost: ¥31,200,000、Indirect Cost: ¥9,360,000)
Fiscal Year 2016: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2015: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2014: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
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Keywords | 物性実験 / 半導体物性 / 格子欠陥 / 強相関電子系 / 原子空孔 / シリコン / 表面弾性波 / 電気四極子 / 櫛状電極 / 半導体技術 / 表面超音波 / ソフト化 |
Outline of Final Research Achievements |
Ultrasonic investigation on the vacancy in silicon wafers currently used in semiconductor device fabrications is an important issue for both solid-state physics and technological applications. The electron orbital bounded around the vacancy exhibiting largely extended radius possesses the strong quadrupole-strain interaction. This provides us the sizable softening in the elastic constants caused by the vacancies existing in extremely small concentration of a vacancy per 10E10 Si atoms. In the present research, we have employed the surface acoustic wave (SAW) device to generate the Rayleigh wave propagating on the surface of the silicon wafer. We have observed the softening of the Rayleigh wave and its magnetic field dependence. We have found the interaction Hamiltonian for the vacancy orbital and the Rayleigh wave and analyzed the softening by the quadrupole susceptibility. We will develop the vacancy evaluation as a new semiconductor technology in near future.
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Report
(4 results)
Research Products
(19 results)
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[Journal Article] Surface acoustic wave diagnosis of vacancy orbital with electric quadrupoles in silicon2015
Author(s)
T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H.Y. Kaneta, Y. Furumura, H. Saito, K. Kashima, and Y. Saito
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Journal Title
Journal of Physics: Conference Series
Volume: 592
Pages: 012150-012150
DOI
Related Report
Peer Reviewed / Open Access
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[Journal Article] Elastic Softening of Surface Acoustic Wave Caused by Vacancy Orbital in Silicon Wafer2014
Author(s)
K. Mitsumoto, M. Akatsu, S. Baba, R. Takasu, Y. Nemoto, T. Goto, H.Y.-Kaneta, Y. Furumura, H. Saito, K. Kashima, and Y. Saito
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Journal Title
Journal of Physical Society of Japan
Volume: 83
Issue: 3
Pages: 034702-034702
DOI
NAID
Related Report
Peer Reviewed / Open Access
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[Presentation] Observation of Vacancy in Crystalline Silicon by Surface Acoustic Wave Measurement2016
Author(s)
K. Mitsumoto, M. Akatsu, S. Baba, R. Takasu, Y. Nemoto, T. Goto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
Organizer
BIT's 2nd Annual World Congress of Smart Materials-2016
Place of Presentation
Grand Copthorne Waterfront Hotel, Singapore
Year and Date
2016-03-04
Related Report
Int'l Joint Research / Invited
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[Presentation] Surface acoustic wave diagnosis of vacancy orbital in surface layer of silicon wafer2014
Author(s)
T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
Organizer
The Forum on the Science and Technology of Silicon Materials 2014 (Hamamatsu)
Place of Presentation
Hamamatsu, Japan
Year and Date
2014-10-19 – 2014-10-20
Related Report
Invited
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[Presentation] Ultrasonic diagnosis of vacancy orbital in silicon wafer2014
Author(s)
T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
Organizer
13th Bilateral German-Japanese Symposium “Interplay of Spin- and Orbital Degrees of Freedom in Strongly Correlated Electron Systems
Place of Presentation
Rottach-Egern, Germany
Year and Date
2014-07-13 – 2014-07-16
Related Report
Invited
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[Presentation] Surface Acoustic Wave Diagnosis of Vacancy Orbital with Electric Quadrupoles in Silicon2014
Author(s)
T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
Organizer
SCES’2014 (The international Conference on Strongly Correlated Electron Systems 2014)
Place of Presentation
Grenoble, France
Year and Date
2014-07-07 – 2014-07-11
Related Report
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