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Surface acoustic wave investigation of vacancy orbital in silicon wafer

Research Project

Project/Area Number 26247059
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Condensed matter physics II
Research InstitutionNiigata University

Principal Investigator

GOTO Terutaka  新潟大学, 自然科学系, フェロー (60134053)

Co-Investigator(Kenkyū-buntansha) 根本 祐一  新潟大学, 自然科学系, 准教授 (10303174)
Co-Investigator(Renkei-kenkyūsha) AKATSU Mitsuhiro  新潟大学, 自然科学系, 助教 (10431876)
MITSUMOTO Keisuke  新潟大学, 自然科学系, 特任助教 (50515567)
Research Collaborator KURIHARA Ryosuke  新潟大学, 自然科学系, 研究員
KASHIMA Kazuhiko  グローバルウェーハズ・ジャパン(株), 技監
SAITO Hiroyuki  グローバルウェーハズ・ジャパン(株), 参事
FURUMURA Yuji  (株)フィルテック, 社長
SAITO Yoshihiko  (株)東芝, グループ長
Project Period (FY) 2014-06-27 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥40,560,000 (Direct Cost: ¥31,200,000、Indirect Cost: ¥9,360,000)
Fiscal Year 2016: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2015: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2014: ¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Keywords物性実験 / 半導体物性 / 格子欠陥 / 強相関電子系 / 原子空孔 / シリコン / 表面弾性波 / 電気四極子 / 櫛状電極 / 半導体技術 / 表面超音波 / ソフト化
Outline of Final Research Achievements

Ultrasonic investigation on the vacancy in silicon wafers currently used in semiconductor device fabrications is an important issue for both solid-state physics and technological applications. The electron orbital bounded around the vacancy exhibiting largely extended radius possesses the strong quadrupole-strain interaction. This provides us the sizable softening in the elastic constants caused by the vacancies existing in extremely small concentration of a vacancy per 10E10 Si atoms. In the present research, we have employed the surface acoustic wave (SAW) device to generate the Rayleigh wave propagating on the surface of the silicon wafer. We have observed the softening of the Rayleigh wave and its magnetic field dependence. We have found the interaction Hamiltonian for the vacancy orbital and the Rayleigh wave and analyzed the softening by the quadrupole susceptibility. We will develop the vacancy evaluation as a new semiconductor technology in near future.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (19 results)

All 2017 2016 2015 2014 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 1 results,  Open Access: 2 results) Presentation (13 results) (of which Int'l Joint Research: 2 results,  Invited: 5 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Critical Slowing Down of Quadrupole and Hexadecapole Orderings in Iron Pnictide Superconductor2017

    • Author(s)
      Ryosuke Kurihara, Keisuke Mitsumoto, Mitsuhiro Akatsu, Yuichi Nemoto, Terutaka Goto, Yoshiaki Kobayashi, and Masatoshi Sato
    • Journal Title

      Journal of Physical Society of Japan

      Volume: 印刷中

    • NAID

      40021221785

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface acoustic wave diagnosis of vacancy orbital with electric quadrupoles in silicon2015

    • Author(s)
      T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H.Y. Kaneta, Y. Furumura, H. Saito, K. Kashima, and Y. Saito
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 592 Pages: 012150-012150

    • DOI

      10.1088/1742-6596/592/1/012150

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Elastic Softening of Surface Acoustic Wave Caused by Vacancy Orbital in Silicon Wafer2014

    • Author(s)
      K. Mitsumoto, M. Akatsu, S. Baba, R. Takasu, Y. Nemoto, T. Goto, H.Y.-Kaneta, Y. Furumura, H. Saito, K. Kashima, and Y. Saito
    • Journal Title

      Journal of Physical Society of Japan

      Volume: 83 Issue: 3 Pages: 034702-034702

    • DOI

      10.7566/jpsj.83.034702

    • NAID

      210000133000

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Observation of vacancy orbital in silicon crystals using low-temperature ultrasonic measurements2017

    • Author(s)
      Yuichi Nemoto, Keisuke Mitsumoto, Mitsuhiro Akatsu, Terutaka Goto et al.
    • Organizer
      29th International Conference on Defects in Semiconductors
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2017-07-31
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 静水圧下超音波計測によるシリコン原子空孔軌道の研究2017

    • Author(s)
      三原佳祐,坂井隼人,三本啓輔,赤津光洋,根本祐一,後藤輝孝
    • Organizer
      日本物理学会第72回年次大会
    • Place of Presentation
      大阪大学豊中キャンパス(大阪府大阪市)
    • Year and Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] Observation of Vacancy in Crystalline Silicon by Surface Acoustic Wave Measurement2016

    • Author(s)
      K. Mitsumoto, M. Akatsu, S. Baba, R. Takasu, Y. Nemoto, T. Goto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
    • Organizer
      BIT's 2nd Annual World Congress of Smart Materials-2016
    • Place of Presentation
      Grand Copthorne Waterfront Hotel, Singapore
    • Year and Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 一軸圧下超音波計測による産業用シリコンウェーハの原子空孔軌道の研究2016

    • Author(s)
      坂井隼人,三原佳祐,三本啓輔,赤津光洋,根本祐一,後藤輝孝
    • Organizer
      日本物理学会新潟支部第45回例会
    • Place of Presentation
      新潟大学五十嵐キャンパス(新潟県新潟市)
    • Related Report
      2016 Annual Research Report
  • [Presentation] 静水圧下超音波計測によるシリコン原子空孔軌道の研究2016

    • Author(s)
      三原佳祐,坂井隼人,三本啓輔,赤津光洋,根本祐一,後藤輝孝
    • Organizer
      日本物理学会新潟支部第45回例会
    • Place of Presentation
      新潟大学五十嵐キャンパス(新潟県新潟市)
    • Related Report
      2016 Annual Research Report
  • [Presentation] 超音波計測によるボロン添加CZシリコンの原子空孔濃度の決定2015

    • Author(s)
      木村駿生、岡部和樹、赤津光洋、馬場正太郎、三本啓輔、根本祐一、金田寛、後藤輝孝、斉藤広幸、鹿島一日兒、斎藤芳彦
    • Organizer
      平成27年度 日本物理学会新潟支部 第44回例回
    • Place of Presentation
      新潟大学(新潟市)
    • Year and Date
      2015-12-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] 静水圧下超音波計測による原子空孔軌道の研究2015

    • Author(s)
      三原佳祐、赤津光洋、三本啓輔、根本祐一、後藤輝孝
    • Organizer
      平成27年度 日本物理学会新潟支部 第44回例回
    • Place of Presentation
      新潟大学(新潟市)
    • Year and Date
      2015-12-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] シリコン原子空孔軌道が示す四極子秩序の臨界濃度2014

    • Author(s)
      木村駿生, 三本啓輔, 赤津光洋, 根本祐一, 後藤輝孝
    • Organizer
      物理学会新潟支部会 第43回例会
    • Place of Presentation
      新潟大学, 新潟県
    • Year and Date
      2014-12-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Surface acoustic wave diagnosis of vacancy orbital in surface layer of silicon wafer2014

    • Author(s)
      T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
    • Organizer
      The Forum on the Science and Technology of Silicon Materials 2014 (Hamamatsu)
    • Place of Presentation
      Hamamatsu, Japan
    • Year and Date
      2014-10-19 – 2014-10-20
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] シリコン原子空孔軌道の強い四極子-歪み結合による自発歪みと臨界濃度2014

    • Author(s)
      三本啓輔,木村駿生,赤津光洋,根本祐一,後藤輝孝
    • Organizer
      日本物理学会 2014年秋季大会
    • Place of Presentation
      中部大学, 愛知県
    • Year and Date
      2014-09-07 – 2014-09-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] 超音波で観る量子力学の世界2014

    • Author(s)
      根本祐一
    • Organizer
      第203回物理学教室セミナー日本物理学会北陸支部特別講演会
    • Place of Presentation
      富山大学, 富山県
    • Year and Date
      2014-07-17
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Ultrasonic diagnosis of vacancy orbital in silicon wafer2014

    • Author(s)
      T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
    • Organizer
      13th Bilateral German-Japanese Symposium “Interplay of Spin- and Orbital Degrees of Freedom in Strongly Correlated Electron Systems
    • Place of Presentation
      Rottach-Egern, Germany
    • Year and Date
      2014-07-13 – 2014-07-16
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Surface Acoustic Wave Diagnosis of Vacancy Orbital with Electric Quadrupoles in Silicon2014

    • Author(s)
      T. Goto, K. Mitsumoto, M. Akatsu, S. Baba, K. Okabe, R. Takasu, Y. Nemoto, H. Yamada-Kaneta, Y. Furumura, H. Saito, K. Kashima, Y. Saito
    • Organizer
      SCES’2014 (The international Conference on Strongly Correlated Electron Systems 2014)
    • Place of Presentation
      Grenoble, France
    • Year and Date
      2014-07-07 – 2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Remarks] 「新潟大学 大学院自然科学研究科 根本研究室」のHP

    • URL

      http://www.sc.niigata-u.ac.jp/nemoto/index.html

    • Related Report
      2015 Annual Research Report
  • [Remarks] 根本研究室

    • URL

      http://www.sc.niigata-u.ac.jp/nemoto/index.html

    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコンウェーハ表層中原子空孔評価方法及び装置2014

    • Inventor(s)
      後藤輝孝,根本祐一,金田寛,赤津光洋,三本啓輔
    • Industrial Property Rights Holder
      新潟大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-11-05
    • Related Report
      2014 Annual Research Report
    • Overseas

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Published: 2014-11-20   Modified: 2020-05-15  

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