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Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shape

Research Project

Project/Area Number 26249006
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

Takamasu Kiyoshi  東京大学, 大学院工学系研究科(工学部), 教授 (70154896)

Co-Investigator(Kenkyū-buntansha) 高橋 哲  東京大学, 先端科学技術研究センター, 教授 (30283724)
Project Period (FY) 2014-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥29,900,000 (Direct Cost: ¥23,000,000、Indirect Cost: ¥6,900,000)
Fiscal Year 2018: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2017: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2016: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2015: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2014: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Keywords座標計測 / ナノメートル計測 / 光計測 / 三次元形状測定 / 不確かさ推定
Outline of Final Research Achievements

In the next-generation manufacturing, in order to improve the shape accuracy of parts to be manufactured, three-dimensional shape measurement at nanoscale is indispensable.
In this research, we systematized the uncertainty estimation theory using error separation and self-calibration. This was applied to the uncertainty analysis of a three-dimensional measuring machine and a semiconductor measuring device, and the effectiveness was confirmed by experimental verification. Furthermore, the uncertainty estimation method was applied to the optical three-dimensional measurement system, and it was experimentally demonstrated that shape measurement can be performed with sub-nanometer uncertainty by self-calibration.
As described above, the uncertainty estimation method has been put to practical use to improve the accuracy of the next generation three-dimensional shape in precision measurement.

Academic Significance and Societal Importance of the Research Achievements

ナノスケールの精度を持つ三次元形状計測における測定の不確かさの評価は,次世代のものづくりの高度化に不可欠である.学術的には,本研究で開発した形状測定装置,自己校正手法,不確かさ推定手法は,他の測定システムへの適用が可能で波及効果が大きい.社会的には,日本のものづくりの優位性を活かしながら製作する部品の形状精度をナノスケール化することで,機械部品,半導体,光素子に高付加価値な機能を付与するナノスケールものづくりへの展開が可能となった.

Report

(6 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (111 results)

All 2019 2018 2017 2016 2015 2014 Other

All Journal Article (32 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 32 results,  Open Access: 11 results,  Acknowledgement Compliant: 3 results) Presentation (74 results) (of which Int'l Joint Research: 69 results,  Invited: 9 results) Remarks (5 results)

  • [Journal Article] A new measurement method to simultaneously determine group refractive index and thickness of a sample using low-coherence tandem interferometry2019

    • Author(s)
      Winarno Agustinus、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
    • Journal Title

      Precision Engineering

      Volume: 55 Pages: 254-259

    • DOI

      10.1016/j.precisioneng.2018.09.013

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparative evaluation of estimation of step gauge measurement uncertainty via Monte Carlo simulation2019

    • Author(s)
      Miura Yuka、Nakanishi Shoichi、Higuchi Eiichi、Takamasu Kiyoshi、Abe Makoto、Sato Osamu
    • Journal Title

      Precision Engineering

      Volume: 55 Pages: 390-396

    • DOI

      10.1016/j.precisioneng.2018.10.007

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparative evaluation of estimation of hole plate measurement uncertainty via Monte Carlo simulation2019

    • Author(s)
      Miura Yuka、Nakanishi Shoichi、Higuchi Eiichi、Takamasu Kiyoshi、Abe Makoto、Sato Osamu
    • Journal Title

      Precision Engineering

      Volume: 56 Pages: 496-505

    • DOI

      10.1016/j.precisioneng.2019.02.007

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and Calibration of Reassembled Ultrasonic Diagnosis Robot2018

    • Author(s)
      Matsuno Shigeru、Numata Takashi、Iwahashi Toshihide、Takamasu Kiyoshi、Kotani Kiyoshi、Jimbo Yasuhiko
    • Journal Title

      IEEJ Transactions on Electronics, Information and Systems

      Volume: 138 Issue: 9 Pages: 1133-1140

    • DOI

      10.1541/ieejeiss.138.1133

    • NAID

      130007479917

    • ISSN
      0385-4221, 1348-8155
    • Year and Date
      2018-09-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Diameter Measurement of a Microsphere Based on Whispering Gallery Mode Resonance2018

    • Author(s)
      MICHIHATA Masaki、CHU Bohuai、ZHAO Zheng、HAYASHI Kohei、TAKAMASU Kiyoshi、TAKAHASHI Satoru
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 84 Issue: 1 Pages: 77-84

    • DOI

      10.2493/jjspe.84.77

    • NAID

      130006301970

    • ISSN
      0912-0289, 1882-675X
    • Year and Date
      2018-01-05
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection2018

    • Author(s)
      Kong Deqing、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 2 Pages: 112-124

    • DOI

      10.1007/s41871-018-0013-z

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove2018

    • Author(s)
      Ye Shiwei、Takahashi Satoru、Michihata Masaki、Takamasu Kiyoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 29 Issue: 5 Pages: 054011-054011

    • DOI

      10.1088/1361-6501/aab008

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Linewidth roughness of advanced semiconductor features using focused ion beam and planar-transmission electron microscope as reference metrology2018

    • Author(s)
      Takamasu Kiyoshi、Takahashi Satoru、Kawada Hiroki、Ikota Masami
    • Journal Title

      Journal of Micro/Nanolithography, MEMS, and MOEMS

      Volume: 17 Issue: 04 Pages: 1-1

    • DOI

      10.1117/1.jmm.17.4.041010

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] One-shot stereolithography for biomimetic micro hemisphere covered with relief structure2018

    • Author(s)
      Suzuki Yuki、Suzuki Kunikazu、Michihata Masaki、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      Precision Engineering

      Volume: 54 Pages: 353-360

    • DOI

      10.1016/j.precisioneng.2018.07.004

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018

    • Author(s)
      Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 1 Pages: 32-38

    • DOI

      10.1007/s41871-018-0004-0

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Consideration of Measurement Environment2018

    • Author(s)
      大西 徹、高増 潔
    • Journal Title

      JOURNAL OF JAPAN SOCIETY FOR DESIGN ENGINEERING

      Volume: 53 Issue: 4 Pages: 313-322

    • DOI

      10.14953/jjsde.2017.2749

    • NAID

      130006639076

    • ISSN
      0919-2948, 2188-9023
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Noncontact method of point-to-point absolute distance measurement using tandem low-coherence interferometry2018

    • Author(s)
      Winarno Agustinus、Masuda Shusei、Takahashi Satoru、Matsumoto Hirokazu、Takamasu Kiyoshi
    • Journal Title

      Measurement Science and Technology

      Volume: 29 Issue: 2 Pages: 025006-025006

    • DOI

      10.1088/1361-6501/aaa16e

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Precision Aspheric Surface Measurement Using Scanning Deflectometry: Three-Dimensional Error Analysis and Experiments2017

    • Author(s)
      Hu Tingzhi、Xiao Muzheng、Wang Xicheng、Wang Chao、Zhang Zhijing、Takamasu Kiyoshi
    • Journal Title

      International Journal of Automation Technology

      Volume: 11 Issue: 5 Pages: 728-735

    • DOI

      10.20965/ijat.2017.p0728

    • NAID

      130007505964

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2017-09-05
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] A Simulation Study of Plasmonic Substrate for In-Process Measurement of Refractive Index in Nano-Stereolithography2017

    • Author(s)
      Michihata Masaki、Kong Deqing、Takamasu Kiyoshi、Takahashi Satoru
    • Journal Title

      International Journal of Automation Technology

      Volume: 11 Issue: 5 Pages: 772-780

    • DOI

      10.20965/ijat.2017.p0772

    • NAID

      130007505873

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2017-09-05
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale2017

    • Author(s)
      Michihata Masaki、Ueda Shin-ichi、Takahashi Satoru、Takamasu Kiyoshi、Takaya Yasuhiro
    • Journal Title

      Optical Engineering

      Volume: 56 Issue: 06 Pages: 064103-064103

    • DOI

      10.1117/1.oe.56.6.064103

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response2017

    • Author(s)
      Takahashi S.、Jin C.、Ye S.、Michihata M.、Takamasu K.
    • Journal Title

      CIRP Annals

      Volume: 66 Issue: 1 Pages: 503-506

    • DOI

      10.1016/j.cirp.2017.04.064

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens2016

    • Author(s)
      Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
    • Journal Title

      Precision Engineering

      Volume: 46 Pages: 254-262

    • DOI

      10.1016/j.precisioneng.2016.05.004

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Is the Two-Color Method Superior to Empirical Equations in Refractive Index Compensation?2016

    • Author(s)
      Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Journal Title

      Optics and Photonics Journal

      Volume: 2016 (6) Issue: 08 Pages: 8-13

    • DOI

      10.4236/opj.2016.68b002

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology2016

    • Author(s)
      Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: 17 Issue: 9 Pages: 1093-1099

    • DOI

      10.1007/s12541-016-0133-6

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Non-contact precision profile measurement to rough-surface objects with optical frequency combs2016

    • Author(s)
      Onoe Taro、Takahashi Satoru、Takamasu Kiyoshi、Matsumoto Hirokazu
    • Journal Title

      Measurement Science Technology

      Volume: 27 Issue: 12 Pages: 124002-124002

    • DOI

      10.1088/0957-0233/27/12/124002

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Non-contact measurement technique for dimensional metrology using optical comb2016

    • Author(s)
      Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Measurement

      Volume: 78 Pages: 381-387

    • DOI

      10.1016/j.measurement.2015.07.053

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer2015

    • Author(s)
      Hirokazu Matsumoto, Kiyoshi Takamasu
    • Journal Title

      International Journal of Automation Technology

      Volume: 9 Issue: 5 Pages: 482-486

    • DOI

      10.20965/ijat.2015.p0482

    • NAID

      130007674121

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2015-09-05
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball targetOriginal Research Article2015

    • Author(s)
      Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Precision Engineering 41

      Volume: 41 Pages: 63-67

    • DOI

      10.1016/j.precisioneng.2015.01.007

    • Related Report
      2015 Annual Research Report 2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Concept for laser-assisted nano removal beyond the diffraction limit using photocatalyst nanoparticles2015

    • Author(s)
      S. Takahashi, Y. Horita, F. Kaji, Y. Yamaguchi, M. Michihata, K. Takamasu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 未定 Issue: 1 Pages: 201-204

    • DOI

      10.1016/j.cirp.2015.04.041

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (3rd report)2015

    • Author(s)
      工藤良太, 高橋哲, 高増潔
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 81 Issue: 6 Pages: 562-569

    • DOI

      10.2493/jjspe.81.562

    • NAID

      130005074035

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Research on three-dimensional microfabrication using photocatalytic reaction at the vicinity of beam waist2015

    • Author(s)
      堀田陽亮,吉越久倫,松田恵介,道畑正岐,高増潔,高橋哲
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 81 Issue: 832 Pages: 15-00309-15-00309

    • DOI

      10.1299/transjsme.15-00309

    • NAID

      130005118095

    • ISSN
      2187-9761
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor2015

    • Author(s)
      Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Precision Engineering

      Volume: 42 Pages: 276-282

    • DOI

      10.1016/j.precisioneng.2015.05.009

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (4th report)2015

    • Author(s)
      工藤良太, 高橋哲, 高増潔
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 81 Issue: 7 Pages: 684-691

    • DOI

      10.2493/jjspe.81.684

    • NAID

      130005084685

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control2014

    • Author(s)
      S. Takahashi, H. Yokozeki, D. Fujii, R. Kudo, K. Takamasu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 63 Issue: 1 Pages: 465-468

    • DOI

      10.1016/j.cirp.2014.03.035

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range2014

    • Author(s)
      Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
    • Journal Title

      Measurement Science and Technology 25 (6)

      Volume: 25 (6) Issue: 6 Pages: 0640081-7

    • DOI

      10.1088/0957-0233/25/6/064008

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Performance evaluation of a coordinate measuring machine’s axis using a high-frequency repetition mode of a mode-locked fiber laser2014

    • Author(s)
      Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 15 (8)

      Volume: 15 (8) Issue: 8 Pages: 1507-1512

    • DOI

      10.1007/s12541-014-0498-3

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Two-color absolute length measuring method based on pulse repetition interval lengths2014

    • Author(s)
      Wei, Dong Aketagawa, Masato Takamasu, Kiyoshi Matsumoto, Hirokazu
    • Journal Title

      Optical Engineering

      Volume: 53 Issue: 12 Pages: 1224131-5

    • DOI

      10.1117/1.oe.53.12.122413

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Linewidth and Roughness Measurement of SAOP by Using FIB and Planer-TEM as Reference Metrology2019

    • Author(s)
      Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Stefan Decoster, Frederic Lazzarino, Gian Lorusso
    • Organizer
      SPIE Advanced Lithography, San Jose, USA
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-Process Measurement of Resin's Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle2018

    • Author(s)
      D. Kong, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of Quantitative Depth Evaluation for Diffraction-Limited Microgroove Using LED Light Source2018

    • Author(s)
      Ye Shiwei1, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      XXII World Congress of the International Measurement Confederation (IMEKO 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Basic Study on Laser Additive Processing for Nanostructures Based on Optical Trapping Potential2018

    • Author(s)
      Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Scattered Field Analysis for Diameter Measurement of Tapered Optical Fiber Under Counter-Propagating-Beam Illumination2018

    • Author(s)
      Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysing Tapered Fiber-Microsphere Coupling for Diameter Measurement of Microsphere Using Whispering Gallery Mode Resonance2018

    • Author(s)
      Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of Super-Resolution Microscopy by Use of a Nano-Patterned Substrate2018

    • Author(s)
      Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Absolute Measurement of Optical Path Length of the Three-Dimensional Nanoprofiler Based on the Normal Vector Tracing Method by Tandem White Light Interferometer2018

    • Author(s)
      Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-Situ Measurement of the Refractive Index and Geometrical Length for Determining the Location of Optical Part Using a Tandem Low-Coherence Interferometry2018

    • Author(s)
      Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a Laser Tracker Using Absolute Length Measurement Technique by an Optical Comb Pulsed Interferometer2018

    • Author(s)
      Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-Calibration Method of Nanometer Profile Measurement on Large Aspheric Optical Surface2018

    • Author(s)
      Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-Contact High Speed Measurements of the Processed-Product Shape Using New Optical Comb Interferometer2018

    • Author(s)
      Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Basic Study on Cell-in-Microfactory System with Localized Light Control2018

    • Author(s)
      Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography2018

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi
    • Organizer
      ICPE2018, 17th International Conference on Precision Engineering. Kamakura, Japan
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Line Width Roughness of Advanced Semiconductor Features by Using FIB and Planar-TEM as Reference Metrology2018

    • Author(s)
      Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota
    • Organizer
      SPIE Advanced Lithography, San Jose, USA
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position2017

    • Author(s)
      Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      CLEO2017, San Jose, USA
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Accuracy Improvement in Diameter Measurement of Microsphere Based on Whispering Gallery Mode2017

    • Author(s)
      Masaki Michihata, Bohuai Chu, Zhao Zheng, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      59th Ilmenau Scientific Colloquium, Ilmenau, Germany
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation Strategy of Spheroidal Distortion for Micro-Sphere Based on Whispering Gallery Mode Resonance2017

    • Author(s)
      K.Hayashi, B. Chu, Z. Zhao, M. Michihata, K. Takamasu, S. Takahashi
    • Organizer
      59th Ilmenau Scientific Colloquium, Ilmenau, Germany
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental verification of a novel in-process depth measurements of diffraction limited micro-groove based on near-field optical response2017

    • Author(s)
      Shiwei Ye, Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system2017

    • Author(s)
      Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Coordinate measuring machine verification using an optical comb probe with ball-lens targets2017

    • Author(s)
      Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano-stereolithography2017

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-contact method of an absolute length measurement between two ball-lenses using a tandem low-coherence interferometer2017

    • Author(s)
      Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Numerical investigation on refractive index compensation performance of three-color method2017

    • Author(s)
      Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High sensitive and super resolution optical inspection of nanodefects on Si wafer surface using infrared standing evanescent wave2017

    • Author(s)
      Satoru Takahashi
    • Organizer
      ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi'an, China
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] New Developments for Next-generation Precision Engineering Opened with Localized Light Energy Control2017

    • Author(s)
      Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanometer Profile Measurement on Large Aspheric Optical Surface2017

    • Author(s)
      Xiang Guo, Satoru Takahashi, Yohan Kondo, Youichi Bitou, Kiyoshi Takamasu
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The Development of an Absolute Internal Distance Measurement Between Two Ball Lenses Within Sub-Micro Accuracy2017

    • Author(s)
      Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Accuracy Evaluation of Optical Comb Probe for Coordinate Measuring Machines Verification2017

    • Author(s)
      Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Monitor Resin Curing Degree for In-process Measurement in Micro-stereolithography2017

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Precision Profile Measurement for Small Aspheric Optical Surface by an Multi-beam Angle Sensor2017

    • Author(s)
      Jumpei Miyachi, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light2017

    • Author(s)
      Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Double Imaging Micro-Stereolithography for One-Shot Curing of Surface Micro-Structure Unit2017

    • Author(s)
      Yuki Matsumoto, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology2017

    • Author(s)
      Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota
    • Organizer
      SPIE Advanced Lithography
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer2017

    • Author(s)
      Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo
    • Organizer
      ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines2017

    • Author(s)
      Kiyoshi Takamasu
    • Organizer
      ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 3D-Profile Measurement of Advanced2016

    • Author(s)
      Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi
    • Organizer
      SPIE Advanced Lithography 2016
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2016-02-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography2016

    • Author(s)
      Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      18th CIRP Conference on Electro Physical and Chemical Machining
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb2016

    • Author(s)
      Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      euspen2016, 16th International Conference & Exhibition
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of 3D form measurement of semiconductor structure - Measurement of FinFET profile using TEM and CD-SEM images2016

    • Author(s)
      Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      euspen2016, 16th International Conference & Exhibition
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016

    • Author(s)
      Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      CLEO2016, Conference on Lasers and Electro-Optics
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of non-destructive optical depth measurement of sub-diffraction limit fine holes2016

    • Author(s)
      Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      nanoMan2016, 5th International Conference on Nanomanufacturing
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance2016

    • Author(s)
      Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      LANE2016, 9th International Conference on Photonic Technologies
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPE2016, 31st ASPE Annual Meeting
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface2016

    • Author(s)
      Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPE2016, 31st ASPE Annual Meeting
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography2016

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system2016

    • Author(s)
      Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC2016

    • Author(s)
      Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda
    • Organizer
      IWAA2016, International Workshop on Accelerator Alignment
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-2016

    • Author(s)
      Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light2016

    • Author(s)
      Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-process measurement for micro-stereolithography using surface plasmon resonance2016

    • Author(s)
      Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016

    • Author(s)
      Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs2016

    • Author(s)
      Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Advanced Measurement Method of 3D Semiconductor Structure - 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -2016

    • Author(s)
      Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe2015

    • Author(s)
      Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      京都リサーチパーク(京都府・京都市)
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light2015

    • Author(s)
      Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      京都リサーチパーク(京都府・京都市)
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction2015

    • Author(s)
      Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015),
    • Place of Presentation
      Harbin (China)
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-contact precision profile measurement to rough surface objects with optical frequency combs2015

    • Author(s)
      Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      Taipei (Taiwan)
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference2015

    • Author(s)
      Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      Taipei (Taiwan)
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface2015

    • Author(s)
      Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      Taipei (Taiwan)
    • Year and Date
      2015-09-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 知的計測技術によるナノスケール三次元形状測定2015

    • Author(s)
      高増潔
    • Organizer
      精密測定展2015,精密測定セミナー
    • Place of Presentation
      パシフィコ横浜(神奈川県・横浜市)
    • Year and Date
      2015-06-09
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target2015

    • Author(s)
      Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      15th euspen International Conference (euspen2015)
    • Place of Presentation
      Leuven (Belgium)
    • Year and Date
      2015-06-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Roundness measurement machine using multi-beam angle sensor - experimental verification of multi-beam angle sensor2015

    • Author(s)
      Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      15th euspen International Conference (euspen2015)
    • Place of Presentation
      Leuven (Belgium)
    • Year and Date
      2015-06-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Line Profile Measurement of Advanced-FinFET Features by Reference Metrology2015

    • Author(s)
      Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2015-02-23
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb2014

    • Author(s)
      Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      11th Laser Metrology for Precision Measurement and Inspection in Industry
    • Place of Presentation
      つくば国際会議場(茨城県つくば市)
    • Year and Date
      2014-09-02
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of Surface Roundness Using a Multi-Beam Angle Sensor2014

    • Author(s)
      Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      11th Laser Metrology for Precision Measurement and Inspection in Industry
    • Place of Presentation
      つくば国際会議場(茨城県つくば市)
    • Year and Date
      2014-09-02
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 参照計測ためのTEM画像を用いたレジストおよびFinFETの形状測定2014

    • Author(s)
      高増潔
    • Organizer
      次世代リソグラフィワークショップ2014
    • Place of Presentation
      東京工業大学蔵前会館(東京都目黒区)
    • Year and Date
      2014-07-18
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator2014

    • Author(s)
      Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi
    • Organizer
      ASPE/ASPEN Summer Topical Meeting
    • Place of Presentation
      Hawaii (USA)
    • Year and Date
      2014-06-25
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] トレーサビリティと精密測定の歴史,精密測定の条件,精密測定における測定不確かさ2014

    • Author(s)
      高増潔
    • Organizer
      精密工学会/精密測定技術振興財団第367回講演会「“はかる”を知る,精密測定の理論と最新動向」
    • Place of Presentation
      東京大学本郷キャンパス(東京都文京区)
    • Year and Date
      2014-06-16
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Precision measurement technique for rough surface object using self-beat signals of optical frequency comb2014

    • Author(s)
      Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      14th euspen International Conference
    • Place of Presentation
      Dubrovnik (Croatia)
    • Year and Date
      2014-06-02
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 記念講演・精密測定の今後2014

    • Author(s)
      高増潔
    • Organizer
      日本精密測定機器工業会 創立60周年記念講演会
    • Place of Presentation
      ホテルアルジュール竹橋(東京都港区)
    • Year and Date
      2014-05-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] STEMによる半導体構造の形状測定2014

    • Author(s)
      高増潔
    • Organizer
      日本学術振興会ナノプローブテクノロジー第167委員会第74回研究会
    • Place of Presentation
      産業技術総合研究所臨海f区都心センター(東京都江東区)
    • Year and Date
      2014-04-24
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Remarks] Takamasu - Takahashi Lab

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/

    • Related Report
      2018 Annual Research Report
  • [Remarks] Takamasu - Takahashi Lab.

    • Related Report
      2017 Annual Research Report
  • [Remarks] 東京大学 高増・高橋研究室

    • Related Report
      2016 Annual Research Report
  • [Remarks] 東京大学 高増・高橋研究室

    • Related Report
      2015 Annual Research Report
  • [Remarks] www.nanolab.t.u-tokyo.ac.jp

    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2020-03-30  

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