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Development of nano manufacturing technology by combination of nano machining and self organization technique, and application to development of optical function.

Research Project

Project/Area Number 26249007
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

Yoshino Masahiko  東京工業大学, 工学院, 教授 (40201032)

Co-Investigator(Kenkyū-buntansha) 松村 隆  東京電機大学, 工学部, 教授 (20199855)
長尾 忠昭  国立研究開発法人物質・材料研究機構, その他部局等, その他研究員 (40267456)
山中 晃徳  東京農工大学, 工学(系)研究科(研究院), 准教授 (50542198)
梅原 徳次  名古屋大学, 工学研究科, 教授 (70203586)
Co-Investigator(Renkei-kenkyūsha) YAMAMOTO TAKATOKI  東京工業大学, 工学院, 准教授 (20322688)
Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥37,570,000 (Direct Cost: ¥28,900,000、Indirect Cost: ¥8,670,000)
Fiscal Year 2016: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2015: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Fiscal Year 2014: ¥23,140,000 (Direct Cost: ¥17,800,000、Indirect Cost: ¥5,340,000)
Keywords超微細塑性加工 / 自己組織化 / 微細金属素子 / 光学機能材料 / 製造プロセス / 微細切削加工 / 熱ナノインプリント / 超微細加工 / 金属ナノドットアレイ / 熱デウェッティング / 製造技術 / 光メタマテリアル / プラスチックフィルム / 微細素子 / 機能表面 / 生産工学
Outline of Final Research Achievements

This research was aimed to develop low cost and efficient manufacturing technology for metallic elements of submicrometer size on quartz glass substrates. Firstly, a combined machining device capable of nano/micro cutting and nano plastic forming was developed. Nano structured diamond tools used on the combined machining device were also develope, and those machining characteristics were investigated. Then, it was shown that metallic elements that induce unique optical properties, such as metal nanodot arrays and double nanorod arrays, can be fabricated by combination of nano/micro machining and self-organization process. In addition, thermal nanoimprinting method to transfer a nano/micro structures fabircated on a mother mold to a plastic film was developed. Chemical stamping method using the plastic mold was also proposed. It was show that the chemical stamping method is capable for efficient production of metallic elements of nano/micro meter size.

Report

(4 results)
  • 2017 Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (26 results)

All 2017 2016 2015 2014 Other

All Int'l Joint Research (1 results) Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 5 results) Presentation (19 results) (of which Int'l Joint Research: 5 results,  Invited: 3 results) Remarks (1 results)

  • [Int'l Joint Research] インド工科大学デリー校(インド)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Fabrication of Metallic Nanodot Arrays Using Nano-Chemical Stamping Technique with a Polymer Stamp2016

    • Author(s)
      Potejana Potejanasak, Masahiko Yoshino, Motoki Terano
    • Journal Title

      International Journal of Automation Technology

      Volume: 10 Issue: 5 Pages: 794-803

    • DOI

      10.20965/ijat.2016.p0794

    • NAID

      130007673851

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2016-09-05
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Nano Texturing and Self-Organization Process for Development of Optical Functional Surface2016

    • Author(s)
      Masahiko Yoshino, Takayuki Ueno, Motoki Terano
    • Journal Title

      Int. J. of Automation Technology

      Volume: 10 Pages: 41-47

    • NAID

      130007674015

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Efficient Fabrication Process of Metal Nanodot Arrays Using Direct Nanoimprinting Method with a Polymer Mold2015

    • Author(s)
      Potejana Potejanasak; Masahiko Yoshino, Motoki Terano, and Masahiro Mita
    • Journal Title

      Int. J. of Automation Technology

      Volume: 9 Pages: 629-635

    • NAID

      130007673923

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Tool wear of a single-crystal diamond tool in nano-groove machining of a quartz glass plate2015

    • Author(s)
      Masahiko Yoshino, Satoshi Nakajima, Motoki Terano
    • Journal Title

      Surface, Topography, Material & Property

      Volume: 3 Issue: 4 Pages: 044007-044007

    • DOI

      10.1088/2051-672x/3/4/044007

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Efficient fabrication methods of various 3D nanodot array structures2015

    • Author(s)
      Masahiko Yoshino, Zhenxing Li, Motoki Terano, Tadaaki Nagao
    • Journal Title

      proceedings of 4M/ICOMM2015

      Volume: - Pages: 393-396

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Fabrication of Metallic Micro Line and Space Structure by Chemical Stamping2017

    • Author(s)
      Hao Shen, Motoki Terano, Masahiko Yoshino, Duc Phuc Truong
    • Organizer
      2017年精密工学会春季大会学術講演会
    • Place of Presentation
      慶応大学理工学部(日吉)
    • Year and Date
      2017-03-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Efficient Fabrication Method of Ordered Metal Nanodot Array by Transferring to Plastic Films2016

    • Author(s)
      Satoshi NAKAJIMA, Motoki TERANO, Masahiko YOSHINO
    • Organizer
      ICPE2016
    • Place of Presentation
      hamamatsu, Japan
    • Year and Date
      2016-11-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] New manufacturing process of metal nanowires on a substrate by combination of chemical stamping and sputter coating2016

    • Author(s)
      Masahiko Yoshino, Potejana Potejanasak, Motoki Terano
    • Organizer
      ICAMN2016
    • Place of Presentation
      Hanoi, Vietnam
    • Year and Date
      2016-10-03
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超微細塑性加工と自己組織化を用いた光メタマテリアル用二層ロッド構造共振素子の開発2016

    • Author(s)
      寺野元規,吉野雅彦,上野貴之
    • Organizer
      日本機械学会 2016年度年次大会
    • Place of Presentation
      九州大学(福岡)
    • Year and Date
      2016-09-11
    • Related Report
      2016 Annual Research Report
  • [Presentation] 超微細加工を用いた金属ナノドットアレイの製作と光学センサーへの応用2016

    • Author(s)
      吉野 雅彦
    • Organizer
      2016年度精密工学会秋季講演会
    • Place of Presentation
      茨城大学(水戸)
    • Year and Date
      2016-09-06
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] ケミカルプリントによる超微細構造の作製2016

    • Author(s)
      Potejana Potejanasak,吉野 雅彦,寺野 元規
    • Organizer
      2016年度砥粒加工学会学術講演会
    • Place of Presentation
      兵庫県立大学(姫路)
    • Year and Date
      2016-08-31
    • Related Report
      2016 Annual Research Report
  • [Presentation] 金属薄膜自己凝集過程のin-situ SEM観察2016

    • Author(s)
      寺野元規、吉野雅彦、伊藤寛征、立花繁明
    • Organizer
      日本顕微鏡学会 第72回学術講演会
    • Place of Presentation
      仙台国際センター(宮城県)
    • Year and Date
      2016-06-14
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 石英ガラス板の延性モード切削シミュレーション2016

    • Author(s)
      吉野 雅彦、寺野 元規
    • Organizer
      2016年度精密工学会春季大会学術講演会
    • Place of Presentation
      野田、日本
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Numerical simulation of tool wear in ductile mode machining of quartz glass2016

    • Author(s)
      Masahiko Yoshino, Satoshi Nakajima, Motoki Terano
    • Organizer
      ICTMP2016
    • Place of Presentation
      Puket, Thailand
    • Year and Date
      2016-02-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Efficient Fabrication Process of A Metal Nanodot Array by Nano Chemical Stamping Method with A Polymer Mold2015

    • Author(s)
      POTEJANA Potejanasak1, Masahiko YOSHINO1 and Motoki TERANO
    • Organizer
      The 19th International Conference on Mechatronics Technology
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-11-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 金属ナノドットアレイ作製のためのテンプレーテッド熱デウェッティング基板の超微細切削加工2015

    • Author(s)
      吉野 雅彦
    • Organizer
      マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      新潟、日本
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Fabrication of nanodot arrays by the template thermal dewetting method using nano chemical stamp technique2015

    • Author(s)
      POTEJANA Potejanasak, Masahiko YOSHINO, Motoki TERANO
    • Organizer
      LEM21_2015
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Double Layer Nano-rod Resonators by Utilizing the Templated Thermal Dewetting Method2015

    • Author(s)
      Takayuki UENO1, Masahiko YOSHINO2 and Motoki TERANO
    • Organizer
      LEM21,2015
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
  • [Presentation] 超微細塑性加工と自己組織化を用いた光機能表面の開発2015

    • Author(s)
      上野 貴之,吉野 雅彦,寺野 元規
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      札幌、日本
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 超精密切削加工を利用した金属ナノドットアレイの効率的製造法の検討2015

    • Author(s)
      中島 慧,寺野 元規,吉野 雅彦
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      札幌、日本
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 機械的微細加工を利用した光学機能表面の開発2015

    • Author(s)
      吉野雅彦,寺野元規
    • Organizer
      2015年精密工学会秋季大会シンポジウム「超精密加工による表面機能創成とその工学・医学への応用」
    • Place of Presentation
      仙台、日本
    • Year and Date
      2015-09-05
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Nano imprinting of optical metamaterial resonators on an Aluminium foil2015

    • Author(s)
      Potejana Potejanasak, Jermwiwat Amornrit, Aravindan Sivanandam, Motoki Terano, Masahiko Yoshino
    • Organizer
      平成27年度塑性加工春季講演会
    • Place of Presentation
      神奈川、日本
    • Year and Date
      2015-05-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] A Study of Efficient Fabrication Method of Metal Dot Array Using the Micro Metal Forming a Polymer Mold2015

    • Author(s)
      Potejana Potejanasak, Masahiko Yoshino, Motoki Terano, Masahiro Mita
    • Organizer
      7th JSTP International Seminar on Precision Forging
    • Place of Presentation
      名古屋
    • Year and Date
      2015-03-09 – 2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Direct nano-imprinting on Au coating layer by a polymer film mold for the templated thermal dewetting method2014

    • Author(s)
      Potejana Potenanasak、吉野雅彦、寺野 元規、三田正弘
    • Organizer
      日本機械学会第6回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      くにびきメッセ(島根)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Remarks] 吉野・山本研究室 助成金による研究成果

    • URL

      http://www.yocky.mes.titech.ac.jp/kenkyuzyosei.html

    • Related Report
      2015 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2019-03-29  

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