Profilometry system at nano level for whole cylinder surfaces by laser scanning interferometry technique
Project/Area Number |
26249012
|
Research Category |
Grant-in-Aid for Scientific Research (A)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Design engineering/Machine functional elements/Tribology
|
Research Institution | Niigata University |
Principal Investigator |
Nitta Isami 新潟大学, 自然科学系, 教授 (30159082)
|
Research Collaborator |
KANNO Akihiro
KOMATA Kimio
TSUKIYAMA Yosuke
|
Project Period (FY) |
2014-04-01 – 2017-03-31
|
Project Status |
Completed (Fiscal Year 2016)
|
Budget Amount *help |
¥42,770,000 (Direct Cost: ¥32,900,000、Indirect Cost: ¥9,870,000)
Fiscal Year 2016: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2015: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2014: ¥30,550,000 (Direct Cost: ¥23,500,000、Indirect Cost: ¥7,050,000)
|
Keywords | 機械要素 / レーザ走査干渉計 / 円筒面 / 広視野レーザ顕微鏡 / シュリンクフィッタ / ナノ計測 / 広領域 / 空気静圧軸受 |
Outline of Final Research Achievements |
With the wide field of view laser interferometer we developed, we could measure a whole cylindrical surface at a nano-level which was conventionally difficult to measure. However, in the laser interferometry, especially for wide surface measurement, it is inconvenient that it is necessary to use a phase shift method which requires from three to five interference fringe images. In this study, we proposed a simple new method that can obtain the surface profile from one interference fringe image by using a reference plate coated with metal thin film. We have investigated the measurement principle both theoretically and experimentally, and showed the validity of the measurement principle of the wide - field laser interferometer. Furthermore, based on this new principle, we developed the program to construct the surface profiles from the image of the interference fringes at a nano-level.
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Report
(4 results)
Research Products
(9 results)