| Budget Amount *help |
¥42,770,000 (Direct Cost: ¥32,900,000、Indirect Cost: ¥9,870,000)
Fiscal Year 2016: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2015: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2014: ¥30,550,000 (Direct Cost: ¥23,500,000、Indirect Cost: ¥7,050,000)
|
|---|
| Outline of Final Research Achievements |
With the wide field of view laser interferometer we developed, we could measure a whole cylindrical surface at a nano-level which was conventionally difficult to measure. However, in the laser interferometry, especially for wide surface measurement, it is inconvenient that it is necessary to use a phase shift method which requires from three to five interference fringe images. In this study, we proposed a simple new method that can obtain the surface profile from one interference fringe image by using a reference plate coated with metal thin film. We have investigated the measurement principle both theoretically and experimentally, and showed the validity of the measurement principle of the wide - field laser interferometer. Furthermore, based on this new principle, we developed the program to construct the surface profiles from the image of the interference fringes at a nano-level.
|
