| Budget Amount *help |
¥39,780,000 (Direct Cost: ¥30,600,000、Indirect Cost: ¥9,180,000)
Fiscal Year 2016: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2015: ¥18,330,000 (Direct Cost: ¥14,100,000、Indirect Cost: ¥4,230,000)
Fiscal Year 2014: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
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| Outline of Final Research Achievements |
We have been working on the development of an advanced method for growing diamond thin films, which may enable the implementation of nano NMR sensing. We have explored a method to grow homoepitaxial diamond thin films by focusing on a high purity microwave source (solid state type). The solid state microwave source has almost never been used in the diamond thin film synthesis using the microwave plasma CVD process. The magnetron power source is commonly used one currently.
We have demonstrated, through our systematic experiments on thin film synthesis, that our new method employing a high purity microwave source enables the suppression of crystal defects and the formation of extremely shallow NV centers, which have not been achieved when using the conventional magnetron source. Also we have clarified the features of the CVD process used with the solid state source.
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