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Study of substrates for h-BN single crystal growth by chemical vapor deposition method

Research Project

Project/Area Number 26286025
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Nanomaterials engineering
Research InstitutionNational Institute for Materials Science

Principal Investigator

WATANABE Kenji  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (20343840)

Co-Investigator(Renkei-kenkyūsha) TANIGUCHI Takashi  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点・超高圧グループ, グループリーダー (80354413)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
Fiscal Year 2016: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Keywords六方晶窒化ホウ素 / 原子層科学 / 結晶成長 / 気相成長 / 格子欠陥 / 電子デバイス / 結晶工学 / 半導体超微細化
Outline of Final Research Achievements

In this study, we have examined the various kind of substrates for the single crystal growth of hexagonal boron nitride (h-BN) by employing the chemical vapor deposition (CVD) method.Among various kind of substrates, h-BN substrates successfully gave high quality h-BN thin films, which showed similar or higher crystallinity than the one for the crystals grown by high temperature-high pressure (HT-HP) technique. These homoepitaxial films were examined by confocal Raman depth mapping and UV-photoluminescence microscope. The depth profiles of the width of the Raman mode showed the significant decrease and the exciton luminescence near the band edge showed a single narrower band. These results imply the decrease of defects of the epitaxial h-BN layers.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (14 results)

All 2016 2015 2014 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Acknowledgement Compliant: 1 results) Presentation (8 results) (of which Invited: 2 results) Remarks (5 results)

  • [Journal Article] Direct Chemical Vapor Deposition Growth of WS2 Atomic Layers on hBN2014

    • Author(s)
      M. Okada, T. Sawazaki, K. Watanabe, T. Taniguchi, H. Hibino, H. Shinohara, and R. Kitaura
    • Journal Title

      ACS Nano, 8, (2014), DOI:

      Volume: 8273 Issue: 8 Pages: 8273-8273

    • DOI

      10.1021/nn503093k

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 六方晶窒化ホウ素ホモエピタキシャル膜のラマン散乱マッピング2016

    • Author(s)
      渡邊賢司
    • Organizer
      第30回ダイヤモンドシンポジウム
    • Place of Presentation
      東京大学駒場リサーチキャンパス(東京)
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Raman spectroscopy study of homoepitaxially grown hexagonal boron nitride2016

    • Author(s)
      渡邊賢司
    • Organizer
      第35回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖(守山市)
    • Year and Date
      2016-07-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] マルテンサイト変態によるウルツ鉱型窒化ホウ素の偏光ラマン散乱測定2015

    • Author(s)
      渡邊 賢司
    • Organizer
      第29回ダイヤモンドシンポジウム
    • Place of Presentation
      東京理科大学(東京都葛飾区)
    • Year and Date
      2015-11-17
    • Related Report
      2015 Annual Research Report
  • [Presentation] Polarized Raman Scattering of martensitic transformed wurtzite BN2015

    • Author(s)
      渡邊 賢司
    • Organizer
      第34回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖(守山市)
    • Year and Date
      2015-07-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Polarized Raman Scattering of martensitic transformed w-BN2015

    • Author(s)
      渡邊 賢司
    • Organizer
      9th International Conference on New Diamond and Nano Carbons (NDNC2015)
    • Place of Presentation
      グランシップ静岡(静岡市)
    • Year and Date
      2015-05-24
    • Related Report
      2015 Annual Research Report
  • [Presentation] 高純度窒化ホウ素単結晶研究の現状と新しい応用展開2015

    • Author(s)
      渡邊 賢司
    • Organizer
      日本学術振興会 将来加工技術第136委員会 平成26年度第5回研究会
    • Place of Presentation
      弘済会館(東京都千代田区麹町)
    • Year and Date
      2015-01-16
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Single crystal growth of Boron Nitride and new applications2014

    • Author(s)
      渡邊 賢司
    • Organizer
      18th International Symposium on Boron Borides and Related Materials
    • Place of Presentation
      Honolulu ( U.S.A)
    • Year and Date
      2014-08-31 – 2014-09-05
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Raman image of cleaved crystal in hexagonal boron nitride grown by temperature gradient method2014

    • Author(s)
      渡邊 賢司
    • Organizer
      第33回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ修善寺(静岡県伊豆市)
    • Year and Date
      2014-07-09 – 2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Remarks] 窒化ホウ素の研究

    • URL

      http://www.nims.go.jp/personal/BN_research/index-j_BNR.html

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report
  • [Remarks] Boron Nitride Research

    • URL

      http://www.nims.go.jp/personal/BN_research/index-e_BNR.html

    • Related Report
      2016 Annual Research Report 2014 Annual Research Report
  • [Remarks] 物質・材料研究機構 研究者情報

    • URL

      http://samurai.nims.go.jp/WATANABE_Kenji_AML-j.html

    • Related Report
      2016 Annual Research Report
  • [Remarks] NIMS Researchers

    • URL

      http://samurai.nims.go.jp/WATANABE_Kenji_AML-e.html

    • Related Report
      2016 Annual Research Report
  • [Remarks] 窒化ホウ素の研究

    • URL

      http://http://www.nims.go.jp/personal/BN_research/index-j_BNR.html

    • Related Report
      2014 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

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