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MEMS two-dimensional variable dielectric device to control wavefront of electromagnetic waves

Research Project

Project/Area Number 26286033
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Nano/Microsystems
Research InstitutionToyo University (2016)
The University of Tokyo (2014-2015)

Principal Investigator

Matsumoto Kiyoshi  東洋大学, 理工学部, 教授 (10282675)

Co-Investigator(Kenkyū-buntansha) 野田 堅太郎  東京大学, 情報理工学(系)研究科, 特任助教 (00547482)
Co-Investigator(Renkei-kenkyūsha) FUJIKAWA Hisayoshi  株式会社豊田中央研究所, 戦略研究企画推進室, 主任研究員 (60394665)
OOKADO Makoto  株式会社豊田中央研究所, 電波応用研究室, 副研究員 (70443819)
NOMURA Tsuyoshi  株式会社豊田中央研究所, マルチフィジックスプログラム, 主任研究員 (80394823)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
Fiscal Year 2016: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Keywords波面制御 / 誘電率分布 / 液体アクチュエータ / MEMS / マイクロ・ナノデバイス / NEMS
Outline of Final Research Achievements

In this study, to control wavefront of THz-waves or millimeter-waves, a device which can control distribution of the dielectric constant by dynamically deforming the shape of the dielectric liquid was proposed. By using MEMS technology, a liquid actuator device with flow channels which can deform the thickness of liquid was developed. The wave-front’s deformation was analyzed and confirmed that waves can be deflected or converged by the permittivity distribution. As application devices, a variable focus ultrasonic lens and a wave-front control device with fine structures were developed.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (9 results)

All 2016 2015

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 2 results) Presentation (6 results) (of which Int'l Joint Research: 3 results)

  • [Journal Article] Silicon based near infrared photodetector using self-assembled organic crystalline nano-pillars2016

    • Author(s)
      Yoshiharu Ajiki, Tetsuo Kan, Masayuki Yahiro, Akiko Hamada, Junji Adachi, Chihaya Adachi, Kiyoshi Matsumoto, Isao Shimoyama
    • Journal Title

      Applied Physics Letters

      Volume: 108 Issue: 15

    • DOI

      10.1063/1.4945690

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR2016

    • Author(s)
      Chen Wenjing, Kan Tetsuo, Ajiki Yoshiharu, Matsumoto Kiyoshi, Shimoyama Isao
    • Journal Title

      OPTICS EXPRESS

      Volume: 24(22) Issue: 22 Pages: 25797-25804

    • DOI

      10.1364/oe.24.025797

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Frequency-Tunable Microstrip Antenna With Liquid Actuator Using Gradually Widened Transmission Line2015

    • Author(s)
      Kentaro Noda, Makoto Ohkado, Nguyen Binh-Khiem, Kiyoshi Matsumoto, Hisayoshi Fujikawa, Isao Shimoyama
    • Journal Title

      IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS

      Volume: 14 Pages: 551-555

    • DOI

      10.1109/lawp.2014.2369521

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Presentation] Elastic wave measurement using a MEMS AE sensor2016

    • Author(s)
      Takahiro Omori, Takashi Usui, Kazuo Watabe, Minh-Dung Nguyen, Kiyoshi Matsumoto, Isao Shimoyama
    • Organizer
      8th International Conference on Acoustic Emission
    • Place of Presentation
      京都テルサ(京都府京都市)
    • Year and Date
      2016-12-05
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 非侵襲血圧計測のためのMEMS超音波計測2016

    • Author(s)
      竹井裕介,松井亮,グェン・ミン・ジュン,高畑智之,松本潔,下山勲
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸文化センター(長崎県平戸市)
    • Year and Date
      2016-10-23
    • Related Report
      2016 Annual Research Report
  • [Presentation] Au/Si ナノピラーアレイを用いた近赤外光シリコン型フォトディテクタ2016

    • Author(s)
      菅哲朗,安食嘉晴,松本潔,下山勲
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸文化センター(長崎県平戸市)
    • Year and Date
      2016-10-23
    • Related Report
      2016 Annual Research Report
  • [Presentation] DETECTION OF HIGH-FREQUENCY COMPONENT OF MECHANOMYOGRAM2016

    • Author(s)
      Ryo Aoki, Yusuke Takei, Nguyen Minh-Dung, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama
    • Organizer
      The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '16)
    • Place of Presentation
      上海(中華人民共和国)
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] WOOD MONITORING USING MEMS ACOUSTIC SENSOR2016

    • Author(s)
      Kenei Matsudaira, Nguyen Minh-Dung, Yusuke Takei, Tomoyuki Takahata, Kiyoshi Matsumoto and Isao Shimoyama
    • Organizer
      The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '16)
    • Place of Presentation
      上海(中華人民共和国)
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SOUND FOCUSING IN LIQUID USING A VARIFOCAL ACOUSTIC MIRROR2015

    • Author(s)
      Ryo Aoki
    • Organizer
      The 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
    • Place of Presentation
      Estoril, PORTUGAL
    • Year and Date
      2015-01-18 – 2015-01-22
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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