| Budget Amount *help |
¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2016: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2015: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2014: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
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| Outline of Final Research Achievements |
Atmospheric pressure plasma jets (APPJs) with low temperature is expected for various application in biomedicine and material processing because of the simple set up without expensive vacuum systems. In this study, the APPJ is localized for fine material processing using a nanopipette which has a submicrometer aperture as a fine nozzle. Additionally, the nanometer scale positioning of the nanopipette was achieved by using a SPM technique. As positioning of the nanopipette, shear force control using an optical detection system was employed to stabilize the plasma jet. Photoresist film was fabricated using the APPJ system. The processing depth was controlled by controlling a pulse voltage applied on the pipette electrode.
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