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Development of a Microrobot Performing High-Power Needed Tasks in Narrow Space

Research Project

Project/Area Number 26289025
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionTokyo Institute of Technology

Principal Investigator

Yoshida Kazuhiro  東京工業大学, 科学技術創成研究院, 教授 (00220632)

Co-Investigator(Kenkyū-buntansha) 金 俊完  東京工業大学, 科学技術創成研究院, 准教授 (40401517)
嚴 祥仁  東京工業大学, 科学技術創成研究院, 助教 (20551576)
横田 眞一  東京工業大学, 精密工学研究所, 教授 (10092579)
Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2016: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
Fiscal Year 2015: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2014: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Keywordsマイクロマシン / 先端機能デバイス / マイクロロボット / ER(電気粘性)流体 / 交流圧力 / MEMS / ソフトロボット / アクチュエータ / 多自由度 / 高アスペクト比
Outline of Final Research Achievements

For a microrobot performing high-power needed tasks in narrow space in rubble at disaster sites, small diameter pipes in chemical plants, etc., a multiple ER microfinger system using an alternating pressure source was expanded, which rectifies alternating flow of electro-rheological (ER) fluid by its viscosity change due to the synchronously applied electric field. First, a 1.6 mm long ER microfinger was developed using MEMS technologies. Second, a 1.9 mm long two-DOF PDMS finger part was fabricated and characterized pneumatically. Third, a micro alternating pressure source with 3.3 mm in diameter was fabricated using piezoelectric bimorph and its bandwidth of 200 Hz was clarified. Finally, a two-DOF ER microfinger system was fabricated on a chip.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (9 results)

All 2017 2016 2015 2014

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 2 results) Presentation (7 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source2016

    • Author(s)
      Tomoya Miyoshi, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom, Shinichi Yokota
    • Journal Title

      Sensors and Actuators A

      Volume: 245 Pages: 68-75

    • DOI

      10.1016/j.sna.2016.04.041

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Proposal of a multiple ER microactuator system using an alternating pressure source2015

    • Author(s)
      T. Miyoshi, K. Yoshida, S. I. Eom and S. Yokota
    • Journal Title

      Sensors and Actuators A

      Volume: 222 Pages: 167-175

    • DOI

      10.1016/j.sna.2014.12.002

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Development of a MEMS-based Two-DOF ER Bending Actuator System Using an Alternating Pressure Source2017

    • Author(s)
      Tomoya Miyoshi, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom
    • Organizer
      The 10th JFPS Int. Symp. on Fluid Power, Fukuoka 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A MEMS-based two-DOF PDMS bending actuator for mupltiple ER microactuator systems2016

    • Author(s)
      T. Miyoshi, K. Yoshida, J.-w. Kim and S. I. Eom
    • Organizer
      The 20th International Conference on Mechatronics Technology (ICMT2016)
    • Place of Presentation
      Dalian University of Technology, China
    • Year and Date
      2016-10-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MEMS技術を応用したマイクロ交流圧力源搭載形2自由度ERアクチュエータシステムに関する研究2016

    • Author(s)
      三好智也,吉田和弘,金俊完,嚴祥仁
    • Organizer
      日本機械学会2016年度年次大会
    • Place of Presentation
      九州大学
    • Year and Date
      2016-09-11
    • Related Report
      2016 Annual Research Report
  • [Presentation] MEMS技術を応用した交流圧力システムのための2自由度ソフトアクチュエータ2016

    • Author(s)
      三好智也,吉田和弘,金俊完,嚴祥仁
    • Organizer
      日本機械学会第16回機素潤滑設計部門講演会
    • Place of Presentation
      福井県あわら市グランディア芳泉
    • Year and Date
      2016-04-18
    • Related Report
      2016 Annual Research Report
  • [Presentation] Development of a MEMS-Based Electro-Rheological Microfinger System with an Alternating Pressure Source2015

    • Author(s)
      T. Miyoshi, K. Yoshida, J.-W. Kim, S.I. Eom and S. Yokota
    • Organizer
      The 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)
    • Place of Presentation
      Alaska, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of a MEMS-Based Electro-Rheological Microfinger System with an Alternating Pressure Source2015

    • Author(s)
      T. Miyoshi, K. Yoshida, J.-W. Kim, S. I. Eom and S. Yokota
    • Organizer
      The 6th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2015)
    • Place of Presentation
      Okinawa, Japan
    • Year and Date
      2015-04-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of A MEMS-Based ER Microgripper with Alternating-Pressure Source2014

    • Author(s)
      T. Miyoshi, K. Yoshida, J.-W. Kim, S. I. Eom and S. Yokota
    • Organizer
      9th JFPS Int. Symp. on Fluid Power, Matsue 2014
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2014-10-28 – 2014-10-31
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2019-03-29  

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