| Budget Amount *help |
¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000)
Fiscal Year 2016: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2015: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2014: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
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| Outline of Final Research Achievements |
A thick piezoelectric film is strongly required for realizing miniaturized piezoelectric actuator because conventional piezoelectric ceramics has difficulty to be machined. The hydrothermal synthesis method enables such thick film and high power ultrasonic irradiation during hydrothermal process is effective for thicker film. In this study, we examined to obtain thick piezoelectric film for the miniaturized actuator by using the ultrasonic assisted hydrothermal synthesis. As a result, the thickness of lead zirconate titanate was increased to 31 micro meter by repeated two processes, and the excellent vibration performance 1.2 m/s was measured by using the piezoelectric transducer. In addition, 10 micro meter thick film of barium titanate could be achieved as a lead-free material. Its piezoelectric property was confirmed by a piezoelectric force microscope (PFM).
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