| Project/Area Number |
26289066
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokushima |
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Principal Investigator |
Iwata Tetsuo 徳島大学, 大学院理工学研究部, 教授 (50304548)
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| Co-Investigator(Kenkyū-buntansha) |
安井 武史 徳島大学, ソシオテクノサイエンス研究部, 教授 (70314408)
水谷 康弘 大阪大学, 工学(系)研究科(研究院), 准教授 (40374152)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Fiscal Year 2016: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2015: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
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| Keywords | テラヘルツ / エリプソメエータ / 薄膜計測 / 光計測 / 分光計測 / 幾何学的位相 / エイプソメータ / 膜厚測定 / 塗装膜 / 薄膜 / エリプソメトリ / 偏光解析 / 光コム / エリプソメータ |
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| Outline of Final Research Achievements |
We constructed a double-modulation, reflection-type terahertz (THz) ellipsometer for precise measurement of the thickness of a paint film that was coated on a metal surface, which was not transparent to the visible and the mid-infrared light. The double-modulation technique enabled us to obtain two ellipsometric parameters directly as a function of angular frequency with a single measurement, while reducing flicker noise due to a pump laser. In the THz frequency region, we carried out direct measurement of the geometric phase. We also proposed a high-sensitive measurement method of optical rotatory dispersion (ORD) of optically active samples by taking advantage of a nonlinear behavior of the geometric phase.
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