Development of a novel 2D MEMS mirror combining different materials
| Project/Area Number |
26289067
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Gunma University (2015-2016)
Kagawa University (2014) |
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Principal Investigator |
Suzuki Takaaki 群馬大学, 理工学研究科, 准教授 (10378797)
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| Co-Investigator(Renkei-kenkyūsha) |
OOHIRA Fumikazu 香川大学, 社会連携・知的財産センター, 教授 (80325315)
SHIMOKAWA Fusao 香川大学, 工学部, 教授 (90580598)
NAMAZU Takahiro 愛知工業大学, 工学部, 教授 (90347526)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥16,640,000 (Direct Cost: ¥12,800,000、Indirect Cost: ¥3,840,000)
Fiscal Year 2016: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2015: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2014: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
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| Keywords | ナノマイクロメカトロニクス / MEMS / ミラー / 異種材料 / マイクロ・ナノデバイス / マイクロファブリケーション / フォトリソグラフィ |
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| Outline of Final Research Achievements |
Raster scan type MEMS mirrors are expected to be applied to various fields. For the purpose of large deflection angle drive, miniaturization, low power consumption, and high impact resistance of the MEMS mirror, we proposed a novel MEMS mirror configuration combining heterogeneous materials of silicon / polymer on hinges. Specifically, we fabricated and evaluated two types of MEMS mirrors; 1) a Lorentz driven MEMS mirror with a hybrid configuration combining different materials, and 2) a MEMS mirror integrated with a magnetically induced electromotive force type sensor coil.
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Report
(4 results)
Research Products
(45 results)
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[Presentation] 単一細胞マイクロアレイの孔形状が固定効率に及ぼす影響2016
Author(s)
古谷尚輝, 島上卓也, 佐藤竜偉, 寺尾京平, 高尾 英邦, 下川 房男, 秋光和也, 鈴木孝明
Organizer
電気学会 第33回「センサ・マイクロマシンと応用システム」シンポジウム
Place of Presentation
平戸文化センター（長崎県平戸市）
Year and Date
2016-10-24
Related Report
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[Presentation] Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite2015
Author(s)
Junya Suzuki, Yoshiyuki Onishi, Kyohei Terao, Hidekuni Takao, Fusao Shimokawa, Fumikazu Oohira, Hayato Miyagawa, Takahiro Namazu, and Takaaki Suzuki
Organizer
The 28th International Microprocesses and Nanotechnology Conference
Place of Presentation
Toyama International Conference Center, Toyama, Japan
Year and Date
2015-11-10
Related Report
Int'l Joint Research
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[Presentation] BioMEMS向け厚膜フォトレジストの開発2015
Author(s)
鈴木孝明, 圓尾且也, 上野秀貴, 寺尾京平, 高尾英邦, 下川房男, 小寺秀俊
Organizer
電気学会フィジカルセンサ/バイオ・マイクロシステム合同研究会
Place of Presentation
機械振興会館（東京都港区）
Year and Date
2015-08-03
Related Report
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