• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of basic technology for Ge-CMOS integratable high-performance Ge optical devices

Research Project

Project/Area Number 26289090
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKyushu University

Principal Investigator

Wang Dong  九州大学, 総合理工学研究科(研究院), 准教授 (10419616)

Co-Investigator(Kenkyū-buntansha) 中島 寛  九州大学, 産学連携センター, 教授 (70172301)
Co-Investigator(Renkei-kenkyūsha) HAMAMOTO Kiichi  九州大学, 総合理工学研究科, 教授 (70404027)
YAMAMOTO Keisuke  九州大学, 総合理工学研究科, 助教 (20706387)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2016: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2015: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2014: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
KeywordsGe光素子 / 金属/半導体コンタクト / Siフォトニクス / CMOS / 電子・電気材料 / 電子密度 / GOI / Ge-光素子 / 局所歪み / 局所歪
Outline of Final Research Achievements

Direct-band-gap electroluminescence (EL) spectra was clearly observed by using asymmetric lateral metal/Ge/metal structure, which enables a highly-efficient injection of minority carriers. The main target of this research was obtained by employing a PtGe/Ge contact with extremely low barrier height for holes, and a SiO2/GeO2 bilayer passivation. As the result, EL efficiency was enhanced by 10 times and the dark current density was decreased by 1 order. An on/off ratio of 10,000 and a responsivity of 0.7 A/W were also achieved, which is superior to the research target of 0.4 A/W. The electron density of Ge substrates was successfully controlled in a wide region by Sb doping. By using a highly-doped n-type Ge substrate, the EL efficiency was furtherly enhanced by 3 times.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (62 results)

All 2017 2016 2015 2014 Other

All Journal Article (14 results) (of which Peer Reviewed: 14 results,  Acknowledgement Compliant: 5 results,  Open Access: 2 results) Presentation (47 results) (of which Int'l Joint Research: 17 results,  Invited: 7 results) Remarks (1 results)

  • [Journal Article] Achievement of low parasitic resistance in Ge n-channel metal-oxide-semiconductor field-effect transistor using embedded TiN-source/drain structure2017

    • Author(s)
      Y. Nagatomi, T. Tateyama, S. Tanaka, K. Yamamoto, D. Wang, and H. Nakashima
    • Journal Title

      Semiconductor Science and Technology

      Volume: 32 Issue: 3 Pages: 035001-035001

    • DOI

      10.1088/1361-6641/32/3/035001

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electrical properties of epitaxial Lu- or Y-doped La2O3/La2O3/Ge high-k gate-stacks2016

    • Author(s)
      T. Kanashima, R. Yamashiro, M. Zenitaka, K. Yamamoto, D. Wang, J. Tadano, S. Yamada, H. Nohira, H. Nakashima, and K. Hamaya
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: - Pages: 260-264

    • DOI

      10.1016/j.mssp.2016.11.016

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanism of mobility enhancement in Ge p-channel metal-oxide-semiconductor field-effect transistor due to introduction of Al atoms into SiO2/GeO2 gate stack2016

    • Author(s)
      Y. Nagatomi, T. Tateyama, S. Tanaka, W.-C. Wen, T. Sakaguchi, K. Yamamoto, L. Zhao, D. Wang, and H. Nakashima
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: - Pages: 246-253

    • DOI

      10.1016/j.mssp.2016.11.014

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of asymmetric Ge Schottky tunneling source n-channel field-effect transistor and its characterization of tunneling conduction2016

    • Author(s)
      K. Yamamoto, H. Okamoto, D. Wang, and H. Nakashima
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: - Pages: 283-287

    • DOI

      10.1016/j.mssp.2016.09.024

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct band gap light emission and detection at room temperature in bulk germanium diodes with HfGe/Ge/TiN structure2016

    • Author(s)
      D. Wang, T. Maekura, K. Yamamoto, and H. Nakashima
    • Journal Title

      Thin Solid Films

      Volume: 602 Pages: 43-47

    • DOI

      10.1016/j.tsf.2015.09.074

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of metal/Ge contact and surface passivation on direct band gap light emission and detection for asymmetric metal/Ge/metal diodes2016

    • Author(s)
      T. Maekura, K. Yamamoto, H. Nakashima, and D. Wang
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55(4S) Issue: 4S Pages: 04EH08-04EH08

    • DOI

      10.7567/jjap.55.04eh08

    • NAID

      210000146355

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical and structural properties of group-4 transition-metal nitride (TiN, ZrN, and HfN) contacts on Ge2015

    • Author(s)
      K. Yamamoto, R. Noguchi, M. Mitsuhara, M. Nishida, T. Hara, D. Wang, and H. Nakashima
    • Journal Title

      Journal of Applied Physics

      Volume: 118(11) Issue: 11

    • DOI

      10.1063/1.4930573

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electrical Properties of Group 4 Metal-Nitride/Ge Contacts and the Application to Ge Optoelectronic Devices2015

    • Author(s)
      H. Nakashima, K. Yamamoto, and D. Wang
    • Journal Title

      The Electrochemical Society Transactions

      Volume: 69(10) Issue: 10 Pages: 55-66

    • DOI

      10.1149/06910.0055ecst

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of PtGe/Ge contacts with high on/off ratio and its application to metal source/drain Ge p-channel MOSFETs2015

    • Author(s)
      Y. Nagatomi, S. Tanaka, Y. Nagaoka, K. Yamamoto, D. Wang, and H. Nakashima
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54(7) Issue: 7 Pages: 070306-070306

    • DOI

      10.7567/jjap.54.070306

    • NAID

      210000145332

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Direct band gap electroluminescence from bulk germanium at room temperature using an asymmetric fin type metal/germanium/metal structure2014

    • Author(s)
      D. Wang, T. Maekura, S. Kamezawa, K. Yamamoto, and H. Nakashima
    • Journal Title

      Applied Physics Letters

      Volume: 106(7) Issue: 7

    • DOI

      10.1063/1.4913261

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of Al-PMA Effect on Al2O3/GeOX/Ge Gate Stack2014

    • Author(s)
      Y. Nagatomi, Y. Nagaoka, K. Yamamoto, D. Wang, H. Nakashima
    • Journal Title

      ECS Transactions

      Volume: 64 Issue: 6 Pages: 261-266

    • DOI

      10.1149/06406.0261ecst

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-temperature fabrication of Y2O3/Ge gate stacks with ultrathin GeOx interlayer and low interface states density characterized by a reliable deep-level transient spectroscopy method2014

    • Author(s)
      D. Wang, Y. Nagatomi, S. Kojima, K. Yamamoto, H. Nakashima
    • Journal Title

      Thin Solid Films

      Volume: 557 Pages: 288-291

    • DOI

      10.1016/j.tsf.2013.10.065

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Role of an interlayer at a TiN/Ge contact to alleviate the intrinsic Fermi-level pinning position toward the conduction band edge2014

    • Author(s)
      K. Yamamoto, M. Mitsuhara, K. Hiidome, R. Noguchi, M. Nishida, D. Wang, and H. Nakashima
    • Journal Title

      Applied Physics Letters

      Volume: 104 Issue: 13 Pages: 288-291

    • DOI

      10.1063/1.4870510

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of Kr/O2ECR Plasma Oxidation on Electrical Properties of Al2O3/Ge Gate Stacked Fabricated by ALD2014

    • Author(s)
      Yuta Nagatomi, Yuichi Nagaoka, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Journal Title

      Extended Abstracts of the 2014 International Conference on Solid State Devices and Materials (SSDM2014)

      Volume: なし Pages: 10-11

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Presentation] 非晶質Zr-Ge-N層上への金属堆積による低抵抗Geコンタクトの形成2017

    • Author(s)
      岡本 隼人、山本 圭介、王 冬、中島 寛
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] ゲートスタック中へのAl 導入によるGe p-MOSFET の移動度向上機構2017

    • Author(s)
      永冨 雄太、織田 知輝、坂口 大成、山本 圭介、王 冬、中島 寛
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Sbドーピング基板を用いた非対称-金属/Ge/金属構造光素子の作製・特性評価2017

    • Author(s)
      前蔵 貴行、本山 千里、田中 健太郎、山本 圭介、中島 寛、王 冬
    • Organizer
      2017年第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Achievement of Ultralow Contact Resistivity of Metal/Ge Contacts with Zr-N-Ge Amorphous Interlayer2017

    • Author(s)
      K. Yamamoto, H. Okamoto, D. Wang, and H. Nakashima
    • Organizer
      10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University, Sendai, Japan
    • Year and Date
      2017-02-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effect of n-type doping level on direct band gap light emission intensity for asymmetric metal/Ge/metal diodes2017

    • Author(s)
      T. Maekura, C. Motoyama, K. Tanaka, K. Yamamoto, H. Nakashima, and D. Wang
    • Organizer
      10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University, Sendai, Japan
    • Year and Date
      2017-02-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ge 光素子における基板キャリア密度と伝導型が及ぼす発光特性への影響2016

    • Author(s)
      田中 健太郎, 前蔵 貴行, 本山 千里, 王 冬, 山本 圭介, 中島 寛
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-04
    • Related Report
      2016 Annual Research Report
  • [Presentation] ゲートスタック中へのAl 導入によるp-MOSFET の移動度向上機構2016

    • Author(s)
      坂口 大成, 建山 知輝, 永冨 雄太, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] 反応性スパッタリングで形成したZrN 物性とGe とのコンタクト特性2016

    • Author(s)
      板屋 航, 岡本 隼人, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] Influence of Al-PMA for fin type asymmetric metal/germanium/metal diodes2016

    • Author(s)
      C. Motoyama, T. Maekura, K. Tanaka, D. Wang, K. Yamamoto, H. Nakashima
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] TOF-SIMS and XPS analyses for investigation of Al post-metallization annealing effect for Ge MOS capacitors with SiO2/GeO2 bilayer passivation2016

    • Author(s)
      W.-C. Wen, Y. Nagatomi, L. Zhao, K. Yamamoto, D. Wang, H. Nakashima
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] Achievement of low parasitic resistance in Ge n-MOSFET with embedded TiN-source/drain structure2016

    • Author(s)
      T. Tateyama, Y. Nagatomi, S. Tanaka, K. Yamamoto, D. Wang, H. Nakashima
    • Organizer
      平成28(2016)年度応用物理学会九州支部学術講演会
    • Place of Presentation
      長崎県対馬市 対馬市交流センター
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] Electrical Properties of Metal/Ge Contacts with Zr-N-Ge Amorphous Interlayer2016

    • Author(s)
      H. Nakashima, H. Okamoto, K. Yamamoto, and D. Wang
    • Organizer
      JSPS Core-to Core Program "Atomically Controlled Processsing for Ultralarge Scale Integration"
    • Place of Presentation
      Forschungszentrum Jülich, Germany
    • Year and Date
      2016-11-24
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Achievement of Ultralow Contact Resistivity of Metal/Ge Contacts with Zr-N-Ge Amorphous Interlayer2016

    • Author(s)
      H. Okamoto, K. Yamamoto, D. Wang, and H. Nakashima
    • Organizer
      2016 International Conference on Solid State Devices and Materiaals (SSDM2016)
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba, Japan
    • Year and Date
      2016-09-29
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 非晶質Zr-Ge-N層上への金属堆積による低抵抗Geコンタクトの形成2016

    • Author(s)
      岡本 隼人、山本 圭介、王 冬、中島 寛
    • Organizer
      2016年秋季第77回応用物理学会学術講演会
    • Place of Presentation
      朱鷺メッセ:新潟コンベンションセンター
    • Year and Date
      2016-09-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Al/SiO2/GeO2/Geゲートスタックに於ける界面ダイポールの生成と消失2016

    • Author(s)
      永冨 雄太、建山 知輝、坂口 大成、山本 圭介、王 冬、中島 寛
    • Organizer
      2016年秋季第77回応用物理学会学術講演会
    • Place of Presentation
      朱鷺メッセ:新潟コンベンションセンター
    • Year and Date
      2016-09-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] Characterization of Ge Tunnel FET with Metal/Ge Junction2016

    • Author(s)
      K. Yamamoto, H. Okamoto, D. Wang, and H. Nakashima
    • Organizer
      7th Int. Symp. on Control of Semiconductor Interfaces and Int. SiGe Technology and Device Meeting 2016
    • Place of Presentation
      Noyori Conference Hall, Nagoya University, Chikusa-ku, Nagoya, Japan
    • Year and Date
      2016-06-09
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mobility enhancement in Ge p-MOSFET due to introduction of Al atoms in SiO2/GeO2gate stacks2016

    • Author(s)
      Y. Nagatomi, S. Tanaka, T. Tateyama, K. Yamamoto, D. Wang, and H. Nakashima
    • Organizer
      7th Int. Symp. on Control of Semiconductor Interfaces and Int. SiGe Technology and Device Meeting 2016
    • Place of Presentation
      Noyori Conference Hall, Nagoya University, Chikusa-ku, Nagoya, Japan
    • Year and Date
      2016-06-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 金属/Ge接合及びn+/Ge接合を用いたGeトンネルFETの作製と評価2016

    • Author(s)
      山本 圭介、岡本 隼人、王 冬、中島 寛
    • Organizer
      2016年第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Year and Date
      2016-03-20
    • Related Report
      2015 Annual Research Report
  • [Presentation] ゲートスタック中へのAl導入によるGe p-MOSFETの正孔移動度向上2016

    • Author(s)
      永冨 雄太、田中 慎太郎、建山 知輝、山本 圭介、王 冬、中島 寛
    • Organizer
      2016年第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Year and Date
      2016-03-20
    • Related Report
      2015 Annual Research Report
  • [Presentation] メタルS/D型Ge n-MOSFETの寄生抵抗低減2016

    • Author(s)
      建山 知輝、永冨 雄太、田中 慎太郎、山本 圭介、王 冬、中島 寛
    • Organizer
      2016年第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Influences of metal/Ge contact and surface passivation on direct band gap light emission and detection for asymmetric metal/Ge/metal diodes2016

    • Author(s)
      Takayuki Maekura, Chisato Motoyama, Keisuke Yamamoto, Hiroshi Nakashima, Dong Wang
    • Organizer
      9th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University
    • Year and Date
      2016-01-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mechanism of mobility enhancement in Ge p-MOSFET due to introduction of Al atoms in SiO2/GeO2 gate stacks2016

    • Author(s)
      Yuta Nagatomi, Shintaro Tanaka, Tomoki Tateyama, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      9th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University
    • Year and Date
      2016-01-11
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical properties of metal-nitride/Ge contacts and the application to Ge optoelectronic devices2015

    • Author(s)
      Hiroshi Nakashima, Keisuke Yamamoto, Dong Wang
    • Organizer
      The 2nd International Conference & Exhibition for Nanopia
    • Place of Presentation
      Changwon Exhibition Convention Center, Gyeongsangnam-do, Korea
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Direct band gap light emission and detection in lateral HfGe/Ge/TiN diodes2015

    • Author(s)
      Dong Wang, Takayuki Maekura, Keisuke Yamamoto, Hiroshi Nakashima
    • Organizer
      American Vacuum Society (AVS) Shanghai Thin Film Conference
    • Place of Presentation
      Fuxuan Hotel, Shanghai, China
    • Year and Date
      2015-10-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical characterization of SiGe-on-insulator fabricated using Ge condensation by dry oxidation2015

    • Author(s)
      Hiroshi Nakashima, Keisuke Yamamoto, Dong Wang
    • Organizer
      American Vacuum Society (AVS) Shanghai Thin Film Conference
    • Place of Presentation
      Fuxuan Hotel, Shanghai, China
    • Year and Date
      2015-10-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical Properties of Group 4 Metal-Nitride/Ge Contacts and the Application to Ge Optoelectronic Devices2015

    • Author(s)
      Hiroshi Nakashima, Keisuke Yamamoto, Dong Wang
    • Organizer
      228th ECS Meeting
    • Place of Presentation
      Phoenix, AZ, USA
    • Year and Date
      2015-10-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] PtGe-Source/Drain Ge p-MOSFET with High On/Off Ratio and Low Parasitic Resistance2015

    • Author(s)
      Shintaro Tanaka, Yuta Nagatomi, Yuichi Nagaoka, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      2015 International Conference on Solid State Devices and Materiaals (SSDM2015)
    • Place of Presentation
      Sapporo Convention Center, Japan
    • Year and Date
      2015-09-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influences of Metal/Ge Contact and Surface Passivation on Light Emission and Detection for Asymmetric Metal/Ge/Metal Diodes2015

    • Author(s)
      Takayuki Maekura, Dong Wang, Keisuke Yamamoto, Hiroshi Nakashima
    • Organizer
      2015 International Conference on Solid State Devices and Materiaals (SSDM2015)
    • Place of Presentation
      Sapporo Convention Center, Japan
    • Year and Date
      2015-09-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 低い正孔障壁を有するPtGe/Geコンタクトの作製とメタルS/D型Ge p-MOSFETへの適用2015

    • Author(s)
      永冨 雄太, 田中 慎太郎, 長岡 裕一, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      シリコン材料・デバイス研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2015-06-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Direct-bandgap light emission and detection at room temperature in bulk-Ge diodes with HfGe/Ge/TiN structure2015

    • Author(s)
      Dong Wang, Takayuki Maekura, Keisuke Yamamoto, Hiroshi Nakashima
    • Organizer
      9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9)
    • Place of Presentation
      The University of Montreal, Quebec, Canada
    • Year and Date
      2015-05-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Barrier Height Modulation for Metal/Ge Contacts with Nitrogen-Contained Amorphous Interlayers2015

    • Author(s)
      Keisuke Yamamoto, Ryutaro Noguchi, Masatoshi Mitsuhara, Minoru Nishida, Toru Hara, Dong Wang, Hiroshi Nakashima
    • Organizer
      9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9)
    • Place of Presentation
      The University of Montreal, Quebec, Canada
    • Year and Date
      2015-05-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Contact Formation for Metal Source/Drain Ge-CMOS2015

    • Author(s)
      Hiroshi Nakashima, Keisuke Yamamoto, Dong Wang, Masatoshi Mitsuhara, Ryutaro Noguchi, Keisuke Hiidome, Minoru Nishida
    • Organizer
      9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9)
    • Place of Presentation
      The University of Montreal, Quebec, Canada
    • Year and Date
      2015-05-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ALDとECRプラズマ酸化による酸化膜固定電荷密度の制御2015

    • Author(s)
      永冨 雄太, 長岡 裕一, 田中 慎太郎, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      2015年第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] 非対称-金属/Ge/金属構造を有する光素子の試作と特性評価2015

    • Author(s)
      前蔵 貴行, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      2015年第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Effect of Al Post Metallization Annealing on Al2O3/GeO2/Ge Gate Stack2015

    • Author(s)
      Yuta Nagatomi, Yuichi Nagaoka, Shintaro Tanaka, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      8th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University
    • Year and Date
      2015-01-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Electrical Properties of Metal/Ge Contacts with Nitrogen-Contained Amorphous Interlayers2015

    • Author(s)
      Keisuke Yamamoto, Ryutaro Noguchi, Masatoshi Mitsuhara, Minoru Nishida, Toru Hara, Dong Wang, Hiroshi Nakashima
    • Organizer
      8th International Workshop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar
    • Place of Presentation
      Tohoku University
    • Year and Date
      2015-01-29
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] バルクGe発光素子のデバイス構造による発光効率の変化2014

    • Author(s)
      前蔵 貴行, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      2014年応用物理学会九州支部学術講演会
    • Place of Presentation
      大分大学
    • Year and Date
      2014-12-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 原子層堆積法により形成したAl2O3/GeゲートスタックにおけるAl堆積後熱処理の有効性2014

    • Author(s)
      田中 慎太郎, 長岡 裕一, 永冨 雄太, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      2014年応用物理学会九州支部学術講演会
    • Place of Presentation
      大分大学
    • Year and Date
      2014-12-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Contact properties of group IV metal-nitrides(TiN, ZrN, HfN) on Ge2014

    • Author(s)
      Hiroshi Nakashima, Keisuke Yamamoto, Dong Wang, Masatoshi Mitsuhara, Ryutaro Noguchi, Keisuke Hiidome, Minoru Nishida
    • Organizer
      JSPS Core-to-Core Program,“Atomically Controlled Processsing for Ultralarge Scale Integration”
    • Place of Presentation
      Leuven, Belgium
    • Year and Date
      2014-11-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of Al-PMA Effect on Al2O3/GeOX/Ge Gate Stack2014

    • Author(s)
      Yuta Nagatomi, Yuichi Nagaoka, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      226th ECS Meeting
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-10-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] ALDにより形成したAl2O3/Geゲートスタックに於けるKr/O2ECRプラズマ酸化効果2014

    • Author(s)
      長岡 裕一, 永冨 雄太, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      2014年秋季第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] 非晶質Ge界面層とNによるGeコンタクトの外因性準位とSファクターの変調2014

    • Author(s)
      山本 圭介, 王 冬, 中島 寛
    • Organizer
      2014年秋季第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] n形3C-SiCへのゲートスタックの低温形成2014

    • Author(s)
      山本 裕介, 村山 亮介, 山本 圭介, 王 冬, 中島 寛, 菱木 繁臣, 川村 啓介
    • Organizer
      2014年秋季第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] Effect of Kr/O2ECR Plasma Oxidation on Electrical Properties of Al2O3/Ge Gate Stacked Fabricated by ALD2014

    • Author(s)
      Yuta Nagatomi, Yuichi Nagaoka, Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      2014 International Conference on Solid State Devices and Materials (SSDM2014)
    • Place of Presentation
      Tsukuba International Congress Center
    • Year and Date
      2014-09-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Al2O3/GeOx/Geゲートスタックに於けるAl-PMA効果の調査2014

    • Author(s)
      永冨 雄太, 長岡 裕一, 山本 圭介, 王 冬, 中島 寛
    • Organizer
      電子情報通信学会 シリコン材料・デバイス研究会 (応用物理学会, シリコンテクノロジー分科会との合同開催)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2014-06-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Direct band gap electroluminescence from bulk germanium at room temperature using an asymmetric metal/germanium/metal structure2014

    • Author(s)
      Dong Wang, Sho Kamezawa, Keisuke Yamamoto, Hiroshi Nakashima
    • Organizer
      7th International Silicon-Germanium Technology and Device Meeting
    • Place of Presentation
      Singapore
    • Year and Date
      2014-06-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fermi Level Pinning Alleviation at the TiN, ZrN, and HfN/Ge Interfaces2014

    • Author(s)
      Keisuke Yamamoto, Dong Wang, Hiroshi Nakashima
    • Organizer
      7th International Silicon-Germanium Technology and Device Meeting
    • Place of Presentation
      Singapore
    • Year and Date
      2014-06-03
    • Related Report
      2014 Annual Research Report
  • [Remarks] 中島・王研究室

    • URL

      http://www.gic.kyushu-u.ac.jp/nakasima/index.htm

    • Related Report
      2016 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi