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Research on technology for fabricating medical and biochemical micro-parts using optical lithography onto cylindrical surfaces of small-diameter pipes

Research Project

Project/Area Number 26390040
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nano/Microsystems
Research InstitutionTokyo Denki University

Principal Investigator

HORIUCHI Toshiyuki  東京電機大学, 工学部, 教授 (00297582)

Research Collaborator ITO Kaiki  
TAKAHASHI Hiroshi  
KIMURA Nozomi  
SUZUKI Yuta  
FURUHATA Takahiro  
MURO Hideyuki  
SAGARA Tomoya  
FUJII Hayato  
YASUNAGA Kahori  
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords光リソグラフィ / 同期走査回転投影露光 / レーザ走査露光 / ステンレス管 / ウェットエッチング / マイクロ部品 / ステント / マルチスリット管 / リソグラフィ / 同期走査投影露光装置 / レーザ走査露光装置 / 金属管 / SUS304 / 円柱面露光 / 円柱面投影露光装置 / 円柱面へのリソグラフィ / 偏心補正 / 電解エッチング
Outline of Final Research Achievements

New technologies for fabricating micro-parts used in medical and biochemical fields were developed by combining lithography onto stainless steel pipes with small diameters and etching. The lithography is a technology for printing fine patterns by exposing to light and developing sensitized parts of a resist film. The etching is a technology for dissolving parts of materials without covered by the resist patterns. After coating stainless-steel pipes with diameters of 2 mm and 100 μm, fine patterns were printed or delineated on the resist film, and the pipes were etched by using the resist patterns as etching masks. As a result, fine micro-parts imitating medical stents used for reinforcing half damaged blood vessels, fine pipes with multi-holes or multi-slits for the use of filtering or selection of bio-materials were fabricated. Technology for non-destructively inspecting air-bearing grooves fabricated on inner surfaces of pipes aiming dental high-speed spindles was also developed.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (13 results)

All 2017 2016 2015

All Journal Article (4 results) (of which Open Access: 4 results,  Acknowledgement Compliant: 3 results,  Peer Reviewed: 2 results) Presentation (9 results) (of which Int'l Joint Research: 5 results)

  • [Journal Article] Synchronous Scan-Projection Lithography for Fabricating Cylindrical Micro-Parts2016

    • Author(s)
      Kaiki Ito, Yuta Suzuki, and Toshiyuki Horiuchi
    • Journal Title

      Proc. of SPIE

      Volume: 9984 Pages: 99840I-99840I

    • DOI

      10.1117/12.2240273

    • Related Report
      2016 Annual Research Report
    • Open Access / Acknowledgement Compliant
  • [Journal Article] Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter2016

    • Author(s)
      Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
    • Journal Title

      Proc. of SPIE

      Volume: 9984 Pages: 99840J-99840J

    • DOI

      10.1117/12.2240158

    • Related Report
      2016 Annual Research Report
    • Open Access / Acknowledgement Compliant
  • [Journal Article] Synchronous scan-projection lithography on overall circumference of fine pipes with a diameter of 2 mm2016

    • Author(s)
      Toshiyuki Horiuchi, Takahiro Furuhata, and Hideyuki Muro
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55

    • NAID

      210000146693

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Lithography onto Surfaces of Fine-Diameter Pipes Using Rotary Scan-Projection Exposure2015

    • Author(s)
      Toshiyuki Horiuchi, Hayato Fujii, and Kahori Yasunaga
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 28 Pages: 273-278

    • NAID

      130005093857

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Fabrication of Cylindrical Micro-Parts Using Synchronous Scan-Projection Lithography and Chemical Etching2017

    • Author(s)
      Kaiki Ito, Yuhta Suzuki, and Toshiyuki Horiuchi
    • Organizer
      Photomask Japan 2016, The 24th Symposium on Photomask and NGL Mask Technology
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-04-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser-Scan Lithography and Electrolytic Etching of Fine Pipes with a Diameter of 100 μm2017

    • Author(s)
      Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
    • Organizer
      Photomask Japan 2016, The 24th Symposium on Photomask and NGL Mask Technology
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-04-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 同期走査投影露光と化学エッチングによるマイクロ円筒部品の製作2016

    • Author(s)
      伊藤海樹, 鈴木佑汰, 堀内敏行
    • Organizer
      2016年度第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-01
    • Related Report
      2016 Annual Research Report
  • [Presentation] 外径100μmのステンレス微細管へのマルチスリット形状電解エッチング2016

    • Author(s)
      髙橋宏志, 相良友也, 堀内敏行
    • Organizer
      2016年度精密工学会秋季大会学術講演会
    • Place of Presentation
      茨城大学(茨城県水戸市)
    • Year and Date
      2016-08-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Synchronous Scan-Projection Lithography for Fabricating Cylindrical Micro-Parts2016

    • Author(s)
      Kaiki Ito, Yuhta Suzuki, and Toshiyuki Horiuchi
    • Organizer
      Photomask Japan 2016, The 23rd Symposium on Photomask and NGL Mask Technology
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2016-04-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter2016

    • Author(s)
      Hiroshi Takahashi, Tomoya Sagara, and Toshiyuki Horiuchi
    • Organizer
      Photomask Japan 2016, The 23rd Symposium on Photomask and NGL Mask Technology
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2016-04-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Scan-Projection Lithography onto Overall Circumferences of Small-diameter Pipes2015

    • Author(s)
      Toshiyuki Horiuchi, Takahiro Furuhata and Hideyuki Muro, 12P-7-104, 2015.11.10.
    • Organizer
      MNC 2015, 28th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2015-11-10
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 小径管内面へのパターン形成と内面パターンの非破壊観察2015

    • Author(s)
      堀内敏行, 木村のぞみ
    • Organizer
      電気学会光応用・視覚、計測合同研究会, LAV-15-2, IM-15-2, pp. 5-9.
    • Place of Presentation
      徳島県徳島市内ホテル千秋閣
    • Year and Date
      2015-02-12
    • Related Report
      2014 Research-status Report
  • [Presentation] Patterning of Multi-slits on Pipes for Developing Fine Diameter Stents2015

    • Author(s)
      Toshiyuki Horiuchi, Hiroshi Sakabe, and Hiroshi Kobayashi
    • Organizer
      BIODEVICES 2015, Proceedings, pp. 103-108, 査読有
    • Place of Presentation
      Lisbon, Portugal
    • Year and Date
      2015-01-12 – 2015-01-15
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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