Research on technology for fabricating medical and biochemical micro-parts using optical lithography onto cylindrical surfaces of small-diameter pipes
| Project/Area Number |
26390040
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Nano/Microsystems
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| Research Institution | Tokyo Denki University |
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Principal Investigator |
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| Research Collaborator |
ITO Kaiki
TAKAHASHI Hiroshi
KIMURA Nozomi
SUZUKI Yuta
FURUHATA Takahiro
MURO Hideyuki
SAGARA Tomoya
FUJII Hayato
YASUNAGA Kahori
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 光リソグラフィ / 同期走査回転投影露光 / レーザ走査露光 / ステンレス管 / ウェットエッチング / マイクロ部品 / ステント / マルチスリット管 / リソグラフィ / 同期走査投影露光装置 / レーザ走査露光装置 / 金属管 / SUS304 / 円柱面露光 / 円柱面投影露光装置 / 円柱面へのリソグラフィ / 偏心補正 / 電解エッチング |
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| Outline of Final Research Achievements |
New technologies for fabricating micro-parts used in medical and biochemical fields were developed by combining lithography onto stainless steel pipes with small diameters and etching. The lithography is a technology for printing fine patterns by exposing to light and developing sensitized parts of a resist film. The etching is a technology for dissolving parts of materials without covered by the resist patterns. After coating stainless-steel pipes with diameters of 2 mm and 100 μm, fine patterns were printed or delineated on the resist film, and the pipes were etched by using the resist patterns as etching masks. As a result, fine micro-parts imitating medical stents used for reinforcing half damaged blood vessels, fine pipes with multi-holes or multi-slits for the use of filtering or selection of bio-materials were fabricated. Technology for non-destructively inspecting air-bearing grooves fabricated on inner surfaces of pipes aiming dental high-speed spindles was also developed.
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Report
(4 results)
Research Products
(13 results)
