Mechanism of energy loss in 1 GHz MEMS metal resonators due to nano-crystal
| Project/Area Number |
26390041
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Nano/Microsystems
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| Research Institution | Ritsumeikan University |
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Principal Investigator |
Tanigawa Hiroshi 立命館大学, 総合科学技術研究機構, 教授 (00469199)
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| Co-Investigator(Kenkyū-buntansha) |
肥後 矢吉 立命館大学, 総合科学技術研究機構, 教授 (30016802)
鈴木 健一郎 立命館大学, 理工学部, 教授 (70388122)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | 共振器 / エネルギ損失 / Q値 / 静電気力 / 高周波 / ナノ結晶 / 金属 / シリコン / MEMS / メッキ / 狭ギャップ / ニッケルメッキ / 電気機械変換効率 / リング共振器 / エクステンショナルモード / ラメモード / フィードスルー電流 / 寄生容量 / ネットワークアナライザ |
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| Outline of Final Research Achievements |
We fabricated a nickel MEMS resonatorin order to evaluate mechanical energy loss mechanism of nano-crytal. However, fabricated devices failed in fully operating due to shortage. Along with this research, we developed a new resonator based on pn-diode resonators, which had no need of a space gap. From the evaluation of a fabricated 20 MHz ring resonator, we succeeded in demonstrating in-plane drive of pn-diode resonators. The pn-diode resonators consist of only silicon and can be easily integrated with IC's. At present, the evaluation of energy loss in the pn-diode resonators is investigated.
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Report
(4 results)
Research Products
(15 results)
