| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2014: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
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| Outline of Final Research Achievements |
Non-evaporable getter (NEG) pumps are widely used in ultrahigh vacuum because they have a high pumping speed for active residual gases. We constructed a new NEG pump which uses commercial 60 NEG pills (St707, 70 wt% Zr, 24.6 wt% V, and 5.4 wt% Fe). The NEG pills are vertically and radially aligned around a heater to maximize the effective area for pumping. After activation at 400°C for 30 min, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 140-130, 200-140, 190-130, and 35-17 L/s were estimated for H2, CO, CO2, and N2 gasses, respectively. The performance is comparable with commercial NEG pumps. Next we developed a new NEG coating method using titanium (Ti) vacuum sublimation followed by palladium (Pd) vacuum sublimation. The Pd/Ti thinfilm work as a NEG pump after 6-hours baking with a maximum temperature of 185 °C. Since the Pd/Ti thinfilm is durable against repeated vent-activation cycles, it can be used for various vacuum systems.
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