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Development of plasma processing methods for the metallic oxide thin films having an electricity storage function

Research Project

Project/Area Number 26390098
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma electronics
Research InstitutionKyushu University

Principal Investigator

UCHINO Kiichiro  九州大学, 総合理工学研究院, 教授 (10160285)

Co-Investigator(Kenkyū-buntansha) 高田 啓二  関西大学, システム理工学部, 教授 (50416939)
梶山 博司  徳島文理大学, 理工学部, 教授 (80422434)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2016: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2015: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywordsフォトクロミズム / プラズマCVD / PLD / 金属酸化薄膜 / X線吸収微細構造 / 蓄電機能 / プラズマプロセス / CVD / 蓄電 / PLD法 / 金属酸化膜 / エレクトロクロミズム
Outline of Final Research Achievements

Metallic oxide thin-films made of zinc oxide and silicon oxide, for example, exhibit photochromism (PC) and electrochromism. This study developed the method to fabricate such thin films using plasma processing. Two methods were used. One was the pulsed laser deposition (PLD) method and another was the plasma CVD method. By the PLD method, PC thin films were successfully fabricated on the whole surface of the 30 mm square substrate. For the CVD method, we found that the PC-transformation can be exhibited only by the zinc oxide (ZnO) thin film. The crystal structure of the ZnO PC thin films were examined by the x-ray absorption at the Zn-K edge. It is confirmed that the ionic valence around Zn atoms is changed as a result of the PC-transformation.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (4 results)

All 2016 2015

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (3 results)

  • [Journal Article] Synthesis of photochromic nanoparticles and determination of the mechanism of photochromism2016

    • Author(s)
      Shuhei Inoue, Takahiro Kawamoto, Yukihiko Matsumura, Kentaro Tomita, Kiichiro Uchino, Keiji Takata, and Hiroshi Kajiyama
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 5 Pages: 055214-055214

    • DOI

      10.1063/1.4952424

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] フォトクロミック金属酸化物ナノ粒子の特性2016

    • Author(s)
      松井聡紀,井上修平,川本貴弘,松村幸彦,高田啓二,富田健太郎,内野喜一郎,梶山博司
    • Organizer
      第53回日本電伝熱シンポジウム
    • Place of Presentation
      大阪府立国際会議場(大阪市北区)
    • Year and Date
      2016-05-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] フォトミック金属酸化膜作製のためのプラズマプロセス2015

    • Author(s)
      刀祢聖子、久保山真、川本貴裕、井上修平、内野喜一郎
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部第19回支部大会
    • Place of Presentation
      熊本市 熊本大学
    • Year and Date
      2015-12-19
    • Related Report
      2015 Research-status Report
  • [Presentation] 亜鉛シリコン酸化物の粒径及び組成とフォトクロミズム発現の関係2015

    • Author(s)
      井上修平,川本貴弘,松村幸彦,高田啓二,富田健太郎,内野喜一郎,梶山博司
    • Organizer
      第 52 回日本伝熱シンポジウム
    • Place of Presentation
      福岡国際会議場
    • Year and Date
      2015-06-03 – 2015-06-05
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2018-03-22  

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