| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Outline of Final Research Achievements |
The purpose of this study is a realization of a high sensitive force sensor composed of “X-formed” zinc oxide (ZnO) nano-rods. In this sensor, a piezo-resistance of the nano-rods is changed by applying force. We investigated the optimal conditions of bringing up ZnO nano-rods so that rods become cross “X-formed”, and the fine processing for forming electrodes sandwiching the both ends of the ZnO nano-rods in order to realize a high sensitive force sensor composed of ZnO nano-rods.
As for the main results in this study, 1) orientational ZnO nano-rods could be successfully obtained at room temperature by hydrothermal synthesis, 2) high sensitivity of the X-formed ZnO nanorods for applied force could be confirmed and 3) the condition of thermal chemical vapor deposition (CVD) processing that ZnO nano-rods grow up directly on graphene could be found out.
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