Study on high sensitive force sensor using a piezo-effect occurred in ZnO nano-rods synthesized controlling their growth mode
Project/Area Number |
26390102
|
Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
General applied physics
|
Research Institution | Nagoya Institute of Technology |
Principal Investigator |
Ichikawa Yo 名古屋工業大学, 工学(系)研究科(研究院), 教授 (10314072)
|
Co-Investigator(Kenkyū-buntansha) |
市村 正也 名古屋工業大学, 工学(系)研究科(研究院), 教授 (30203110)
|
Project Period (FY) |
2014-04-01 – 2017-03-31
|
Project Status |
Completed (Fiscal Year 2016)
|
Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
|
Keywords | ZnOナノロッド / ピエゾ効果 / フォースセンサー / X字状成長 / グラフェン / 直接成長 / 低温成長 / X字状成長 |
Outline of Final Research Achievements |
The purpose of this study is a realization of a high sensitive force sensor composed of “X-formed” zinc oxide (ZnO) nano-rods. In this sensor, a piezo-resistance of the nano-rods is changed by applying force. We investigated the optimal conditions of bringing up ZnO nano-rods so that rods become cross “X-formed”, and the fine processing for forming electrodes sandwiching the both ends of the ZnO nano-rods in order to realize a high sensitive force sensor composed of ZnO nano-rods. As for the main results in this study, 1) orientational ZnO nano-rods could be successfully obtained at room temperature by hydrothermal synthesis, 2) high sensitivity of the X-formed ZnO nanorods for applied force could be confirmed and 3) the condition of thermal chemical vapor deposition (CVD) processing that ZnO nano-rods grow up directly on graphene could be found out.
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Report
(4 results)
Research Products
(25 results)