Study of a solid Ar plasma source generating continuously soft X-ray pulses in water window around 3nm

• Project/Area Number: 26390113
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Quantum beam science
• Research Institution: University of Hyogo
• Principal Investigator: Amano Sho 兵庫県立大学, 高度産業科学技術研究所, 助教 (50271200)
• Co-Investigator(Kenkyū-buntansha): 宮本 修治 兵庫県立大学, 高度産業科学技術研究所, 教授 (90135757)
• Project Period (FY): 2014-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: レーザープラズマ / 軟X線 / 水の窓 / 固体アルゴン / 高平均出力 / 微細加工 / 連続発生小型X線源 / 放射光 / 連続発生X線

Outline of Final Research Achievements

Water window soft X-ray around 3 nm are expected in soft X-ray microscope imaging of live biological samples or micromachining for organic polymer samples. We developed a laser plasma source that had a solid Ar target and generated the soft X-ray. It is both compact and inexpensive compared to conventional synchrotron radiation sources. A high average power of 0.5 W was achieved in the water window soft X-ray irradiated by a commercial Nd:YAG Q-switched laser. Micromachining in micron size scale for PMMA samples was succeeded and we demonstrated the laser plasma source was practical and useful.

Research Products

• [Journal Article] Laser plasma soft X-ray source based on cryogenic target (2017)
  • Author(s): Amano Sho
  • Journal Title: Proc. of SPIE Volume: 10243 Pages: 102430Q-102430Q
  • DOI: 10.1117/12.2267660
  • Peer Reviewed
• [Journal Article] Laser Plasma Soft X-Ray Source in the Water Window Based on Cryogenic Targets (2017)
  • Author(s): AMANO SHO
  • Journal Title: Electronics and Communications in Japan Volume: 101 Issue: 1 Pages: 55-60
  • DOI: 10.1002/ecj.12022
  • NAID: 130005398421
  • Peer Reviewed
• [Journal Article] クライオターゲットによる「水の窓」レーザ生成プラズマ軟X線源 (2017)
  • Author(s): 天野壮
  • Journal Title: 電気学会論文誌C（電子・情報・システム部門誌） Volume: 137 Pages: 406-410
  • NAID: 130005398421
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] High-average-power water window soft X-ray from an Ar laser plasma (2016)
  • Author(s): Sho Amano
  • Journal Title: Applied Physics Express Volume: 9 Issue: 7 Pages: 076201-076201
  • DOI: 10.7567/apex.9.076201
  • NAID: 210000137996
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Continuous generation of laser plasma X-ray using solid rare gas targets (2015)
  • Author(s): Sho Amno
  • Journal Title: Proceedings of ALPS'15 (The 4th Advanced Lasers and Photon Sources) Volume: - Pages: 227-228
  • Acknowledgement Compliant
• [Journal Article] 固体希ガスレーザープラズマX線源とその応用 (2015)
  • Author(s): 天野壮、宮本修治
  • Journal Title: レーザー学会第483回研究会報告 Volume: RTM-15-45~50 Pages: 9-13
  • Acknowledgement Compliant
• [Presentation] ワット級出力の「水の窓」軟X線源 (2018)
  • Author(s): 天野壮
  • Organizer: 第65回応用物理学会春季学術講演会
• [Presentation] Laser plasma soft X-ray source based on cryogenic target (2017)
  • Author(s): Amano Sho
  • Organizer: SPIE, Optics+Optoelectronics
  • Int'l Joint Research / Invited
• [Presentation] 高効率・高平均出力レーザープラズマ「水の窓」軟X線源 (2017)
  • Author(s): 天野壮
  • Organizer: Plasma Conference2017
• [Presentation] レーザープラズマ「水の窓」軟X線源 (2016)
  • Author(s): 天野壮
  • Organizer: レーザー励起X線源とその応用研究会
  • Place of Presentation: 滝の湯ホテル（山形県天童市）
  • Year and Date: 2016-12-15
• [Presentation] Laser plasma VUV- X-ray source using solid rare gas targets (2016)
  • Author(s): Sho Amano
  • Organizer: The 39th International Conference on Vacuum Ultraviolet and X-ray Physics
  • Place of Presentation: チューリッヒ（スイス）
  • Year and Date: 2016-07-03
  • Int'l Joint Research
• [Presentation] Laser plasma X-ray source based on cryogenic targets (2016)
  • Author(s): Sho Amano
  • Organizer: The 15th International Conference on X-ray Lasers (ICXRL2016)
  • Place of Presentation: 奈良春日野国際フォーラム（奈良県奈良市）
  • Year and Date: 2016-05-22
  • Int'l Joint Research
• [Presentation] 固体Ar とN2レーザープラズマの「水の窓」軟X線特性 (2016)
  • Author(s): 天野壮
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学、東京都目黒区
  • Year and Date: 2016-03-19
• [Presentation] 固体希ガスレーザープラズマX線源とその応用 (2015)
  • Author(s): 天野壮、宮本修治
  • Organizer: レーザー学会第483回研究会
  • Place of Presentation: 広島大学、広島県東広島市
  • Year and Date: 2015-12-02
• [Presentation] 固体ArレーザープラズマX線源のデブリ特性 (2015)
  • Author(s): 天野壮
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場、愛知県名古屋市
  • Year and Date: 2015-09-13
• [Presentation] Continuous generation of laser plasma X-ray using solid rare gas targets (2015)
  • Author(s): Sho Amano
  • Organizer: ALPS'15 (The 4th Advanced Lasers and Photon Sources)
  • Place of Presentation: Pacifico Yokohama, 神奈川県横浜市
  • Year and Date: 2015-04-22
  • Int'l Joint Research
• [Presentation] 120mW出力「水の窓」軟X線の連続発生 (2015)
  • Author(s): 天野壮
  • Organizer: 応用物理学会
  • Place of Presentation: 東海大学湘南キャンパス（神奈川県平塚市）
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] 「水の窓」3nm帯軟X線連続発生レーザープラズマ光源の研究 (2015)
  • Author(s): 天野壮
  • Organizer: レーザー学会
  • Place of Presentation: 東海大学高輪キャンパス（東京都港区）
  • Year and Date: 2015-01-11 – 2015-01-12
• [Book] X-Ray Lasers 2016 (2018)
  • Author(s): Tetsuya Kawachi, SegeiV. Bulanov, Hiroyuki Daido, Yoshiaki Kato, edit
  • Total Pages: 421
  • Publisher: Springer
  • ISBN: 9783319730240