| Project/Area Number |
26420004
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Akita University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
川手 悦男 国立研究開発法人産業技術総合研究所, その他部局等, 研究員 (80344216)
相浦 義弘 国立研究開発法人産業技術総合研究所, その他部局等, 研究員 (80356328)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | ラマン分光 / 全反射ラマン分光 / 表面層 / 回転楕円鏡 / ラマン散乱 / 全反射 / 楕円面鏡 / 加工変質層 / 分光分析 / 材料評価 |
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| Outline of Final Research Achievements |
Evaluation of sub-surface layer is has attracted attention with development of film formation technology. Raman scattering spectroscopy is one of the powerful technique for evaluating the surface layer. Raman scattering spectroscopy has the advantage that it can measure non-destructive and non-contact, and it is possible to identify of molecular structure and chemical bonds. On the other hand, in a sample transparent to the excitation light, excitation light reach into the inside of the sample, so it is difficult to acquire only the Raman signal form the surface layer. In this research, we have constructed a Raman scattering spectroscopy system using an entrance / collection optical system consisting of multiple spheroid mirrors.For verification of the optical system, it was possible to measure the samples with known spectra such as diamond and clearly observe those spectra.
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