Development of Evaluation Method of Film Delamination Strength, and Improvement by Nano-wire
| Project/Area Number |
26420016
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Hiroshima University |
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Principal Investigator |
Kato Masahiko 広島大学, 工学研究院, 准教授 (70274115)
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| Co-Investigator(Kenkyū-buntansha) |
菅田 淳 広島大学, 工学研究院, 教授 (60162913)
曙 紘之 広島大学, 工学研究院, 助教 (50447215)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | プラズマ放電 / はく離強度 / ナノワイヤ / SiC薄膜 / 薄膜 / プラズマプロセス / はく離 |
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| Outline of Final Research Achievements |
Evaluation system of delamination strength of films with a thickness less than 1 micro meter was newly developed, because quantitative evaluation of delamination strength of thin films is important for engineering application. Reliable results were obtained by the newly developed measurement system, and the system was applicable to the evaluation of delamination strength of thin films.
Nano-wires were formed on the substrate to improve the delamination strength of thin films before coating. The result showed that the delamination strength was improved by the formation of the nano-wire, and revealed the effectiveness of the formation of nano-wire.
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Report
(4 results)
Research Products
(1 results)
